Fe—Pt based magnetic material sintered compact

Patent metadata

Field	Value
Publication number	US-10937455-B2
Application number	US-202016933071-A
Country	US
Kind code	B2
Filing date	Jul 20, 2020
Priority date	Sep 21, 2012
Publication date	Mar 2, 2021
Grant date	Mar 2, 2021

Abstract

Provided is an Fe—Pt based magnetic material sintered compact, comprising BN and SiO2 as non-magnetic materials, wherein Si and O are present in a region where B or N is present at a cut surface of the sintered compact. A high density sputtering target is provided which enables production of a magnetic thin film for heat-assisted magnetic recording media, and also reduces the amount of particles generated during sputtering.

First claim

I claim:

1. A Fe—Pt based magnetic material sintered compact, consisting of iron, platinum and 0.5 mol % or more and 10.0 mol % or less of one or more elements selected from the group consisting of B, Ru, Ag, Au and Cu forming a sintered alloy and particles of hexagonal BN and SiO 2 dispersed in the sintered alloy, wherein, in an element mapping image obtained by a Field Emission Electron Probe Micro Analyzer (FE-EPMA) of a cross-sectional surface of the sintered compact, elements of Si and O are detected in a same area as that where elements of B and N are detected, and wherein, in X-ray diffraction analysis of a cross-sectional surface of the sintered compact which is parallel to a pressurized face of the sintered compact, an X-ray diffraction peak from (002) plane of hexagonal BN is present, and an X-ray diffraction peak from (101) plane of cristobalite has an intensity ratio of 1.40 or less relative to a back-ground intensity of the (101) X-ray diffraction peak.

2. The Fe—Pt based magnetic material sintered compact according to claim 1 , wherein the X-ray diffraction peak from (002) plane of hexagonal BN has an intensity ratio of 1.50 or more relative to a back-ground intensity of the (002) X-ray diffraction peak.

3. The Fe—Pt based magnetic material sintered compact according to claim 2 , wherein the content of SiO 2 has a ratio of 1% or more relative to the content of hexagonal BN.

4. The Fe—Pt based magnetic material sintered compact according to claim 3 , wherein the sintered compact has a content of Pt in an amount of 5 mol % or more and 60 mol % or less, a content of BN in an amount of 1 mol % or more and 50 mol % or less, and a content of SiO 2 in an amount of 0.5 mol % or more and 20 mol % or less.

5. The Fe—Pt based magnetic material sintered compact according to claim 1 , wherein a content of SiO 2 in the sintered compact has a ratio of 1% or more relative to a content of hexagonal BN.

6. The Fe—Pt based magnetic material sintered compact according to claim 1 , wherein the sintered compact has a content of Pt in an amount of 5 mol % or more and 60 mol % or less, a content of BN in an amount of 1 mol % or more and 50 mol % or less, a content of SiO 2 in an amount of 0.5 mol % or more and 20 mol % or less.

7. A Fe—Pt based magnetic material sintered compact, consisting of iron and platinum forming a sintered Fe—Pt alloy, particles of hexagonal BN and SiO 2 dispersed in the sintered Fe—Pt alloy, and at least one inorganic material selected from the group consisting of oxides other than SiO 2 , nitrides other than BN, carbides and carbon nitrides as an additive, wherein, in an element mapping image obtained by a Field Emission Electron Probe Micro Analyzer (FE-EPMA) of a cross-sectional surface of the sintered compact, elements of Si and O are detected in a same area as that where elements of B and N are detected, and wherein, in X-ray diffraction analysis of a cross-sectional surface of the sintered compact which is parallel to a pressurized face of the sintered compact, an X-ray diffraction peak from (002) plane of hexagonal BN is present, and an X-ray diffraction peak from (101) plane of cristobalite has an intensity ratio of 1.40 or less relative to a back-ground intensity of the (101) X-ray diffraction peak.

8. The Fe—Pt based magnetic material sintered compact according to claim 7 , wherein the X-ray diffraction peak from (002) plane of hexagonal BN has an intensity ratio of 1.50 or more relative to a back-ground intensity of the (002) X-ray diffraction peak.

9. The Fe—Pt based magnetic material sintered compact according to claim 8 , wherein the content of SiO 2 has a ratio of 1% or more relative to the content of hexagonal BN.

10. The Fe—Pt based magnetic material sintered compact according to claim 9 , wherein the sintered compact has a content of Pt in an amount of 5 mol % or more and 60 mol % or less, a content of BN in an amount of 1 mol % or more and 50 mol % or less, and a content of SiO 2 in an amount of 0.5 mol % or more and 20 mol % or less.

11. The Fe—Pt based magnetic material sintered compact according to claim 7 , wherein a content of SiO 2 in the sintered compact has a ratio of 1% or more relative to a content of hexagonal BN.

12. The Fe—Pt based magnetic material sintered compact according to claim 7 , wherein the sintered compact has a content of Pt in an amount of 5 mol % or more and 60 mol % or less, a content of BN in an amount of 1 mol % or more and 50 mol % or less, a content of SiO 2 in an amount of 0.5 mol % or more and 20 mol % or less.

13. A Fe—Pt based magnetic material sintered compact, consisting of iron, platinum and 0.5 mol % or more and 10.0 mol % or less of one or more elements selected from the group consisting of B, Ru, Ag, Au and Cu forming a sintered alloy and particles of hexagonal BN and SiO 2 dispersed in the sintered alloy and at least one inorganic material selected from the group consisting of oxides other than SiO 2 , nitrides other than BN, carbides and carbon nitrides as an additive, wherein, in an element mapping image obtained by a Field Emission Electron Probe Micro Analyzer (FE-EPMA) of a cross-sectional surface of the sintered compact, elements of Si and O are detected in a same area as that where elements of B and N are detected, and wherein, in X-ray diffraction analysis of a cross-sectional surface of the sintered compact which is parallel to a pressurized face of the sintered compact, an X-ray diffraction peak from (002) plane of hexagonal BN is present, and an X-ray diffraction peak from (101) plane of cristobalite has an intensity ratio of 1.40 or less relative to a back-ground intensity of the (101) X-ray diffraction peak.

14. The Fe—Pt based magnetic material sintered compact according to claim 13 , wherein the X-ray diffraction peak from (002) plane of hexagonal BN has an intensity ratio of 1.50 or more relative to a back-ground intensity of the (002) X-ray diffraction peak.

15. The Fe—Pt based magnetic material sintered compact according to claim 14 , wherein the content of SiO 2 has a ratio of 1% or more relative to the content of hexagonal BN.

16. The Fe—Pt based magnetic material sintered compact according to claim 15 , wherein the sintered compact has a content of Pt in an amount of 5 mol % or more and 60 mol % or less, a content of BN in an amount of 1 mol % or more and 50 mol % or less, and a content of SiO 2 in an amount of 0.5 mol % or more and 20 mol % or less.

17. The Fe—Pt based magnetic material sintered compact according to claim 13 , wherein a content of SiO 2 in the sintered compact has a ratio of 1% or more relative to a content of hexagonal BN.

18. The Fe—Pt based magnetic material sintered compact according to claim 13 , wherein the sintered compact has a content of Pt in an amount of 5 mol % or more and 60 mol % or less, a content of BN in an amount of 1 mol % or more and 50 mol % or less, a content of SiO 2 in an amount of 0.5 mol % or more and 20 mol % or less.

Assignees

• Jx Nippon Mining & Metals Corp

Inventors

• Ogino Shin-Ichi

Classifications

• C22C38/16

  containing copper · CPC title

• H01F41/183

  Sputtering targets therefor · CPC title

• B22F2999/00

  Aspects linked to processes or compositions used in powder metallurgy · CPC title

• C22C33/02

  by powder metallurgy · CPC title

• H01F1/33

  mixtures of metallic and non-metallic particles; metallic particles having oxide skin · CPC title