Optical component having depth modulated angled gratings and method of formation

Patent metadata

Field	Value
Publication number	US-10935799-B2
Application number	US-201816168185-A
Country	US
Kind code	B2
Filing date	Oct 23, 2018
Priority date	Oct 23, 2018
Publication date	Mar 2, 2021
Grant date	Mar 2, 2021

Abstract

A method of forming an optical grating component. The method may include providing a substrate, the substrate comprising an underlayer and a hard mask layer, disposed on the underlayer. The method may include patterning the hard mask layer to define a grating field and etching the underlayer within the grating field to define a variable height of the underlayer along a first direction, the first direction being parallel to a plane of the substrate. The method may include forming an optical grating within the grating field using an angled ion etch, the optical grating comprising a plurality of angled structures, disposed at a non-zero angle of inclination with respect to a perpendicular to a plane of the substrate, wherein the plurality of angled structures define a variable depth along the first direction, based upon the variable height of the underlayer.

First claim

What is claimed is:

1. A method of forming an optical grating component, comprising:
providing an underlayer atop a substrate;
providing a hard mask layer atop the underlayer;
patterning an opening in the hard mask layer;
etching the underlayer through the opening of the hard mask layer to define a variable height of the underlayer along a first direction, the first direction being parallel to a plane defined by a top surface of the substrate;
forming an etch stop layer over the underlayer after the underlayer is etched;
forming a backfill material over the hard mask layer and over the etch stop layer;
planarizing the backfill material selective to the hard mask layer, wherein a top surface of the backfill material over the etch stop layer is co-planar with the hard mask layer; and
forming a plurality of angled structures in the backfill material using an angled ion etch delivered at a non-zero angle of inclination with respect to a perpendicular to the plane defined by the top surface of the substrate, wherein the plurality of angled structures define a variable depth along the first direction, based upon the variable height of the underlayer.

2. The method of claim 1 , further comprising:
forming a second hard mask layer atop the backfill material and the hard mask layer;
patterning a set of openings in the second hard mask layer to define a plurality of grating structures; and
directing an angled ion beam to the backfill material in the presence of the plurality of grating structures to form the plurality of angled structures.

3. The method of claim 2 , further comprising removing the second hard mask layer after formation of the plurality of angled structures.

4. The method of claim 1 , wherein forming the backfill layer comprises depositing a silicon nitride over the hard mask layer and over the etch stop layer.

5. The method of claim 1 , further comprising depositing an oxide coating on the plurality of angled structures after the angled ion etch.

6. The method of claim 1 , wherein forming the plurality of angled structures comprises forming a plurality of trenches in the backfill layer selective to the etch stop layer.

7. The method of claim 1 , wherein etching the underlayer through the opening of the hard mask layer comprises recessing the underlayer to define a top surface of the underlayer having a constant slope relative to the plane of the substrate.

8. A method of forming an optical grating component, comprising:
providing an underlayer atop a substrate;
providing a hard mask layer atop the underlayer;
patterning an opening in the hard mask layer;
etching the underlayer through the opening of the hard mask layer to define a variable height of the underlayer along a first direction, the first direction being parallel to a plane defined by a top surface of the substrate;
forming a backfill material over the hard mask layer and over an etch stop layer;
planarizing the backfill material selective to the hard mask layer, wherein a top surface of the backfill material over the etch stop layer is co-planar with the hard mask layer; and
forming a plurality of angled structures in the backfill material using an angled ion etch delivered to the backfill material at a non-zero angle of inclination with respect to a perpendicular to the plane defined by the top surface of the substrate, wherein the plurality of angled structures define a variable depth along the first direction, based upon the variable height of the underlayer.

9. The method of claim 8 , further comprising forming an etch stop layer over the underlayer after the underlayer is etched.

10. The method of claim 9 , wherein forming the backfill layer comprises depositing a silicon nitride over the hard mask layer and over the etch stop layer.

11. The method of claim 9 , wherein forming the plurality of angled structures comprises forming a plurality of trenches in the backfill layer selective to the etch stop layer.

12. The method of claim 9 , further comprising:
forming a second hard mask layer atop the backfill material and the hard mask layer; and
patterning a set of openings in the second hard mask layer to define a plurality of grating structures, wherein the angled ion etch comprises directing an angled ion beam to the backfill material in the presence of the plurality of grating structures.

13. The method of claim 12 , further comprising removing the second hard mask layer after formation of the plurality of angled structures.

14. The method of claim 13 , further comprising depositing an oxide coating on the plurality of angled structures after the second hard mask layer is removed.

15. The method of claim 8 , wherein etching the underlayer through the opening of the hard mask layer comprises recessing the underlayer to define a top surface of the underlaying having a constant slope relative to the plane of the substrate.

Assignees

• Applied Materials Inc

Inventors

• Meyer Timmerman Thijssen Rutger
• Godet Ludovic
• Evans Morgan
• Olson Joseph C

Classifications

• G02B27/0944 Primary

  Diffractive optical elements, e.g. gratings, holograms (gratings per se G02B5/18; holograms used as optical elements per se G02B5/32) · CPC title

• G02B27/00 Primary

  Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 · CPC title

• G02B2027/0178

  Eyeglass type (eyeglass details G02C) · CPC title

• G02B5/1819

  Plural gratings positioned on the same surface, e.g. array of gratings (plural diffractive elements positioned sequentially along the optical path G02B27/4272) · CPC title

• G02B27/0172

  characterised by optical features · CPC title