Semiconductor-on-insulator (SOI) substrate comprising a trap-rich layer with small grain sizes

Patent metadata

Field	Value
Publication number	US-10923503-B2
Application number	US-201816024962-A
Country	US
Kind code	B2
Filing date	Jul 2, 2018
Priority date	Jul 2, 2018
Publication date	Feb 16, 2021
Grant date	Feb 16, 2021

Abstract

Various embodiments of the present application are directed towards a method for forming a semiconductor-on-insulator (SOI) substrate comprising a trap-rich layer with small grain sizes, as well as the resulting SOI substrate. In some embodiments, an amorphous silicon layer is deposited on a high-resistivity substrate. A rapid thermal anneal (RTA) is performed to crystallize the amorphous silicon layer into a trap-rich layer of polysilicon in which a majority of grains are equiaxed. An insulating layer is formed over the trap-rich layer. A device layer is formed over the insulating layer and comprises a semiconductor material. Equiaxed grains are smaller than other grains (e.g., columnar grains). Since a majority of grains in the trap-rich layer are equiaxed, the trap-rich layer has a high grain boundary area and a high density of carrier traps. The high density of carrier traps may, for example, reduce the effects of parasitic surface conduction (PSC).

First claim

What is claimed is:

1. A method for forming a semiconductor-on-insulator (SOI) substrate, the method comprising:
depositing an amorphous silicon layer on a high-resistivity substrate;
performing a rapid thermal anneal (RTA) to crystallize the amorphous silicon layer into a trap-rich layer of polysilicon in which a majority of grains are equiaxed;
forming an insulating layer over the trap-rich layer; and
forming a device layer over the insulating layer, wherein the device layer comprises a semiconductor material;
wherein the insulating layer comprises fixed charge attracting mobile carriers in the high-resistivity substrate, wherein grain boundaries of the trap-rich layer define carrier traps trapping the mobile carriers, wherein the RTA forms the trap-rich layer with a high percentage of equiaxed grains, and wherein the high percentage is greater than about 80% by total number of grains.

2. The method according to claim 1 , wherein the performing of the RTA comprises:
ramping up heating of the amorphous silicon layer at a ramp-up rate above about 75 degrees Celsius per second until a high temperature above about 600 degrees Celsius is reached.

3. The method according to claim 2 , wherein the performing of the RTA comprises:
ramping down heating of the amorphous silicon layer after heating the amorphous silicon layer for a short period of time less than about 10 seconds.

4. The method according to claim 1 , further comprising:
forming a barrier oxide layer over the high-resistivity substrate, wherein the amorphous silicon layer is deposited over the barrier oxide layer by an epitaxy tool.

5. The method according to claim 1 , wherein the amorphous silicon layer is deposited on the high-resistivity substrate and multiple other high-resistivity substrates at the same time within a multi-substrate process tool.

6. The method according to claim 1 , wherein the forming of the insulating layer comprises:
depositing the insulating layer on the trap-rich layer; and
performing a planarization into the insulating layer.

7. The method according to claim 1 , wherein the forming of the device layer comprises:
depositing a second insulating layer on a device substrate;
implanting ions into the device substrate through the second insulating layer to form an ion-rich layer buried in the device substrate;
bonding the second insulating layer to the insulating layer, such that the insulating layer and the second insulating layer are between the device substrate and the trap-rich layer; and
cleaving the device substrate along the ion-rich layer to remove a portion of the device substrate, wherein a remaining portion of the device substrate defines the device layer.

8. The method according to claim 1 , further comprising:
forming a low-resistivity region in the high-resistivity substrate, along a top surface of the high-resistivity substrate, while forming the insulating layer, wherein the low-resistivity region has a low resistance compared to a bulk of the high-resistivity substrate, and wherein the low-resistivity region forms from the mobile carriers being attracted to the low-resistivity region by the fixed charge.

9. A semiconductor-on-insulator (SOI) substrate, comprising:
a high-resistivity substrate;
a trap-rich layer overlying the high-resistivity substrate, wherein the trap-rich layer comprises polysilicon in which a majority of grains are equiaxed, and wherein at least about 80% of polysilicon grains in the trap-rich layer are equiaxed grains;
an insulating layer over the trap-rich layer; and
a device layer over the insulating layer, wherein the device layer comprises a semiconductor material.

10. The SOI substrate according to claim 9 , wherein less than about 20% of polysilicon grains in the trap-rich layer are columnar grains.

11. The SOI substrate according to claim 9 , wherein the majority of grains have maximum dimensions less than about 100 nanometers.

12. The SOI substrate according to claim 9 , wherein the high-resistivity substrate comprises a low-resistivity region and a bulk semiconductor region, and wherein the bulk semiconductor region underlies the low-resistivity region and has a high resistance greater than that of the low-resistivity region.

13. The SOI substrate according to claim 12 , wherein the high-resistivity substrate has a high resistance greater than about 1 kilo-ohms/centimeter (kΩ/cm).

14. The SOI substrate according to claim 9 , further comprising:
a dielectric barrier layer between the high-resistivity substrate and the trap-rich layer.

15. A method for forming a semiconductor structure, the method comprising:
depositing an amorphous silicon layer over and directly contacting a high-resistance semiconductor substrate;
heating the amorphous silicon layer to crystallize the amorphous silicon layer into a trap-rich layer of polysilicon, wherein the heating follows a spiked temperature curve;
forming an insulating layer over the trap-rich layer; and
forming a device layer over the insulating layer, wherein the device layer comprises a semiconductor material;
wherein the heating forms the trap-rich layer with a high percentage of equiaxed grains and a low percentage of columnar grains, wherein the high percentage is greater than about 80% by total number of grains, and wherein the low percentage is less than about 20% by total number of grains.

16. The method according to claim 15 , wherein the heating comprises ramping up temperature at a ramp-up rate above about 75 degrees Celsius per second until a high temperature above about 600 degrees Celsius is reached.

17. The method according to claim 15 , further comprising:
forming a semiconductor device overlying and partially defined by the device layer; and
forming an interconnect structure covering the semiconductor device and the device layer, wherein the interconnect structure comprises an alternating stack of wires and vias.

18. The method according to claim 15 , wherein the heating ramps down after a short period of time less than about 10 seconds.

19. The method according to claim 15 , wherein the amorphous silicon layer is deposited on the high-resistivity semiconductor substrate and multiple other high resistivity semiconductor substrates at the same time within a multi-substrate process tool.

20. The method according to claim 15 , wherein the forming of the insulating layer comprises: depositing the insulating layer on the trap-rich layer; and performing a planarization into the insulating layer.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Cheng Yu-Hung
• Wu Cheng-Ta
• Tu Yeur-Luen
• Tsai Min-Ying
• Usenko Alex

Classifications

• H10W10/181

  Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers · CPC title

• H10P90/1916

  with separation or delamination along an ion implanted layer, e.g. Smart-cut · CPC title

• H10P14/3802

  Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth · CPC title

• H10P14/3454

  Amorphous · CPC title

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title