Masks, method to inspect and adjust mask position, and method to pattern pixels of organic light-emitting display device utilizing the masks

Patent metadata

Field	Value
Publication number	US-10916703-B2
Application number	US-202016792581-A
Country	US
Kind code	B2
Filing date	Feb 17, 2020
Priority date	May 19, 2015
Publication date	Feb 9, 2021
Grant date	Feb 9, 2021

Abstract

A method for pixel patterning and pixel position inspection of an organic light-emitting display device includes: forming, on a substrate using a first mask, a thin film layer of a first color corresponding to a first pixel pattern and a first pixel positioning pattern for inspecting a position of a first pixel; shifting, by a determined pitch, the first mask from a position associated with forming the thin film layer of the first color; aligning the shifted first mask with respect to the substrate; and forming, on the substrate using the shifted first mask, a thin film layer of a second color corresponding to the first pixel pattern and another first pixel positioning pattern for inspecting a position of a second pixel.

First claim

What is claimed is:

1. A method of manufacturing an organic light-emitting display device, the method comprising:
forming a pixel electrode in an active area of the organic light-emitting display device;
forming a first layer on the pixel electrode using a first mask; and
shifting a position of the first mask by a predetermined distance to form a first color emission layer on the first layer using the first mask.

2. The method of claim 1 , wherein the first color emission layer is formed to comprise a red color emission layer.

3. The method of claim 1 , wherein the first color emission layer is formed to comprise a green color emission layer.

4. The method of claim 1 , wherein the first layer is formed as an auxiliary layer of the first color emission layer.

5. The method of claim 1 , wherein the first layer is formed between the first color emission layer and the pixel electrode.

6. The method of claim 1 , wherein the first layer is formed before forming the first color emission layer.

7. A method of manufacturing an organic light-emitting display device, the method comprising:
forming, on a substrate, a pixel electrode in an active area of the organic light-emitting display device;
forming a first layer on the pixel electrode using a first mask; and
modifying, after forming the first layer on the pixel electrode, an arrangement of the first mask relative to the substrate by a predetermined amount to form a first color emission layer on the first layer using the first mask.

8. An organic light-emitting display device comprising:
an active area comprising a first color emission layer;
a first auxiliary layer disposed under the first color emission layer;
a first thin film pattern for an inspection disposed outside the active area and comprising a same material as the first color emission layer; and
a second thin film pattern for an inspection disposed outside the active area, spaced apart from the first thin film pattern, and comprising a same material as the first auxiliary layer.

9. The organic light-emitting display device of claim 8 , further comprising:
a mark disposed outside the active area,
wherein the mark is disposed between the first thin film pattern and the second thin film pattern.

10. The organic light-emitting display device of claim 8 , further comprising:
a second color emission layer disposed in the active area and configured to emit a color different from a color of the first color emission layer; and
a third thin film pattern for an inspection disposed outside the active area, spaced apart from the first thin film pattern and the second thin film pattern, and comprising a same material as the second color emission layer.

11. The organic light-emitting display device of claim 10 , further comprising:
a mark disposed outside the active area,
wherein the mark is disposed between the second thin film pattern and the third thin film pattern.

12. The organic light-emitting display device of claim 10 , wherein the first color emission layer is a red color emission layer.

13. The organic light-emitting display device of claim 10 , wherein the second color emission layer is a green color emission layer.

14. The organic light-emitting display device of claim 10 , wherein the third color emission layer is a blue color emission layer.

15. The organic light-emitting display device of claim 10 , wherein a distance between the second thin film pattern and the third thin film pattern is greater than a distance between the first thin film pattern and the third thin film pattern.

16. An organic light-emitting display device comprising:
a substrate;
a first pixel electrode on the substrate;
a first color emission layer on the first pixel electrode;
a first auxiliary layer disposed between the first color emission layer and the first pixel electrode;
a second pixel electrode disposed on the substrate and spaced apart from the first pixel electrode;
a second color emission layer disposed on the first pixel electrode and configured to emit a color different from a color of the first color emission layer;
a first thin film pattern for an inspection spaced apart from the first pixel electrode and comprising a same material as the first color emission layer;
a second thin film pattern for an inspection spaced apart from the first pixel electrode and the first thin film pattern for an inspection, the second thin film pattern comprising a same material as the first auxiliary layer; and
a third thin film pattern for an inspection spaced apart from the second pixel electrode, the first thin film pattern, and the second thin film pattern, the third thin film pattern comprising a same material as the second color emission layer.

17. The organic light-emitting display device of claim 16 , further comprising:
a first mark disposed between the first thin film pattern and the second thin film pattern.

18. The organic light-emitting display device of claim 16 , further comprising:
a second mark disposed between disposed between the second thin film pattern and the third thin film pattern.

Assignees

• Samsung Display Co Ltd

Inventors

• Lee Sangshin
• Ha Dongjin
• Kang Mingoo
• Kwon Ohseob
• Yi Sangmin

Classifications

• H10K50/17

  Carrier injection layers · CPC title

• H10K71/166 Primary

  using selective deposition, e.g. using a mask · CPC title

• H10K59/88 Primary

  Dummy elements, i.e. elements having non-functional features · CPC title

• H10K71/70

  Testing, e.g. accelerated lifetime tests · CPC title

• H10K50/15

  Hole transporting layers · CPC title