Masks, method to inspect and adjust mask positon, and method to pattern pixels of organic light-emitting display device utilizing the masks

Patent metadata

Field	Value
Publication number	US-10224482-B2
Application number	US-201715630877-A
Country	US
Kind code	B2
Filing date	Jun 22, 2017
Priority date	May 19, 2015
Publication date	Mar 5, 2019
Grant date	Mar 5, 2019

Abstract

A method for pixel patterning and pixel position inspection of an organic light-emitting display device includes: forming, on a substrate using a first mask, a thin film layer of a first color corresponding to a first pixel pattern and a first pixel positioning pattern for inspecting a position of a first pixel; shifting, by a determined pitch, the first mask from a position associated with forming the thin film layer of the first color; aligning the shifted first mask with respect to the substrate; and forming, on the substrate using the shifted first mask, a thin film layer of a second color corresponding to the first pixel pattern and another first pixel positioning pattern for inspecting a position of a second pixel.

First claim

What is claimed is:

1. An organic light-emitting display device comprising:
a substrate;
a first color emission layer on the substrate;
a second color emission layer on the substrate, the second color emission layer being spaced apart from the first color emission layer by a determined pitch,
a third color emission layer on the substrate, the third color emission layer being spaced apart from the first color emission layer and the second color emission layer,
wherein, in a plan view, patterns of the first color emission layer and the second color emission layer are equivalent; and
wherein, in a cross-sectional view, patterns of the first color emission layer and the second color emission layer are different from one another.

2. The organic light-emitting display device of claim 1 , wherein:
the substrate comprises:
an active area in a central portion; and
a dummy area outside the active area;

the first emission layer is arranged in the active area; and
the second emission layer is arranged in the active area and the dummy area.

3. The organic light-emitting display device of claim 1 , wherein the determined pitch is less than or equal to a width of the dummy area in a direction of the determined pitch.

4. The organic light-emitting display device of claim 3 , wherein, in the direction of the determined pitch, an end portion of the second emission layer is arranged in the dummy area.

5. The organic light-emitting display device of claim 1 , wherein the first color emission layer comprises a red emission layer, the second color emission layer comprises a blue emission layer, and the third color emission layer comprises a green emission layer.

6. The organic light-emitting display device of claim 1 , further comprising:
a first pixel electrode on the substrate; and
a second pixel electrode on the substrate,
wherein, in a direction normal to the substrate, a distance between the first pixel electrode and the first color emission layer is greater than a distance between the second pixel electrode and the second color emission layer.

7. The organic light-emitting display device of claim 1 , further comprising:
a first alignment mark on the substrate;
a second alignment mark on the substrate; and
a third alignment mark on the substrate,
wherein:
a first imaginary line extends, in a plan view, through the first color emission layer, the second color emission layer, and the first alignment mark;
a second imaginary line crossing the first imaginary line extends, in the plan view, through the first color emission layer; and
a third imaginary line crossing the first imaginary line extends, in the plan view, through the second color emission layer.

8. The organic light-emitting display device of claim 7 , further comprising:
a fourth alignment mark on the substrate,
wherein:
a fourth imaginary line extends, in the plan view, through the second alignment mark, the third alignment mark, and the fourth alignment mark; and
a fifth imaginary line crossing the fourth imaginary line extends, in the plan view, through the first alignment mark and the fourth alignment mark.

9. The organic light-emitting display device of claim 8 , wherein:
shapes of the first alignment mark, the second alignment mark, and the third alignment mark are equivalent; and
shapes of the first alignment mark and the fourth alignment mark are different.

10. An electroluminescent display device comprising:
a substrate comprising:
an active area in a central portion; and
a dummy area outside the active area;

a first color emission layer on the substrate in the active area;
a second color emission layer on the substrate in the active area and the dummy area, the second color emission layer being spaced apart from the first color emission layer,
wherein patterns of the first color emission layer and the second color emission layer are equivalent.

11. The electroluminescent display device of claim 10 , wherein the patterns of the first color emission layer and the second color emission layer are equivalent in a plan view.

12. The electroluminescent display device of claim 10 , wherein a pitch between the first color emission layer and the second color emission layer is less than or equal to a width of the dummy area in a direction of the pitch.

13. The electroluminescent display device of claim 12 , wherein, in the direction of the pitch, an end portion of the second emission layer is arranged in the dummy area.

14. The electroluminescent display device of claim 10 , further comprising:
a third color emission layer on the substrate, the third color emission layer being spaced apart from the first color emission layer and the second color emission layer.

15. The electroluminescent display device of claim 14 , wherein the first color emission layer comprises a red emission layer, the second color emission layer comprises a blue emission layer, and the third color emission layer comprises a green emission layer.

16. The electroluminescent display device of claim 10 , further comprising:
a first alignment mark on the substrate;
a second alignment mark on the substrate; and
a third alignment mark on the substrate,
wherein:
a first imaginary line extends, in a view normal to the substrate, through the first color emission layer, the second color emission layer, and the first alignment mark;
a second imaginary line crossing the first imaginary line extends, in the view, through the first color emission layer; and
a third imaginary line crossing the first imaginary line extends, in the view, through the second color emission layer.

17. The electroluminescent display device of claim 16 , further comprising:
a fourth alignment mark on the substrate,
wherein:
a fourth imaginary line extends, in the view, through the second alignment mark, the third alignment mark, and the fourth alignment mark; and
a fifth imaginary line crossing the fourth imaginary line extends, in the view, through the first alignment mark and the fourth alignment mark.

Assignees

• Samsung Display Co Ltd

Inventors

• Lee Sangshin
• Ha Dongjin
• Kang Mingoo
• Kwon Ohseob
• Yi Sangmin

Classifications

• H01L27/3223

  Electricity · mapped topic

• H01L51/0011 Primary

  Electricity · mapped topic

• H01L27/3211

  Electricity · mapped topic

• H01L51/56

  Electricity · mapped topic

• H01L51/5088

  Electricity · mapped topic