Wafer producing apparatus and carrying tray

Patent metadata

Field	Value
Publication number	US-10910241-B2
Application number	US-201816209285-A
Country	US
Kind code	B2
Filing date	Dec 4, 2018
Priority date	Dec 12, 2017
Publication date	Feb 2, 2021
Grant date	Feb 2, 2021

Abstract

A wafer producing apparatus includes: an ingot grinding unit configured to grind and planarize an upper surface of an ingot held by a first holding table; a laser applying unit configured to apply a laser beam of such a wavelength as to be transmitted through the ingot to the ingot, with a focal point of the laser beam positioned at a depth corresponding to the thickness of a wafer to be produced from an upper surface of the ingot held by a second holding table, to form a peel-off layer; a wafer peeling unit configured to hold the upper surface of the ingot held by a third holding table and peel off the wafer from the peel-off layer; and a carrying tray having an ingot support section configured to support the ingot and a wafer support section configured to support the wafer.

First claim

What is claimed is:

1. A wafer producing apparatus for producing a wafer from a hexagonal single crystal ingot, the wafer producing apparatus comprising:
an ingot grinding unit configured to include (i) a first holding table adapted to hold the hexagonal single crystal ingot, and (ii) grinding means grinding and planarizing an upper surface of the ingot held by the first holding table;
a laser applying unit configured to include (i) a second holding table adapted to hold the hexagonal single crystal ingot, and (ii) laser applying means applying a laser beam of such a wavelength as to be transmitted into the hexagonal single crystal ingot held by the second holding table with a focal point of the laser beam positioned at a depth from the upper surface of the hexagonal single crystal ingot corresponding to a thickness of the wafer to be produced to form a peel-off layer;
a wafer peeling unit configured to include (i) a third holding table adapted to hold the hexagonal single crystal ingot, and (ii) wafer peeling means holding the upper surface of the hexagonal single crystal ingot held by the third holding table and peeling off the wafer from the peel-off layer;
a carrying tray including (i) an ingot support section configured to support the hexagonal single crystal ingot, and (ii) a wafer support section adapted to support the peeled wafer;
a belt conveyor unit configured to carry the hexagonal single crystal ingot supported by the carrying tray between the ingot grinding unit and the laser applying unit and the wafer peeling unit;
a cassette stocker in which a cassette adapted to accommodate the peeled wafer is accommodated; and
accommodating means transferring the wafer supported by the wafer support section of the carrying tray into the cassette accommodated in the cassette stocker.

2. The wafer producing apparatus according to claim 1 , further comprising an ingot stocker adapted to accommodate the hexagonal single crystal ingot.

3. The wafer producing apparatus according to claim 2 , wherein the accommodating means carries the hexagonal single crystal ingot accommodated in the ingot stocker to the belt conveyor unit.

4. The wafer producing apparatus according to claim 2 , wherein the hexagonal single crystal ingot is accommodated in the ingot stocker in a state of being supported by the carrying tray.

5. The wafer producing apparatus of claim 1 ,
wherein the carrying tray includes a casing having an upper wall, a lower wall, a pair of side walls connecting the upper wall and the lower wall, and a cavity penetrating between the pair of side walls, and
one of the upper wall and the lower wall of the casing is provided with the ingot support section, and other of the lower wall or the upper wall is provided with the wafer support section.

6. The wafer producing apparatus of claim 1 , wherein the ingot support section has concentric recesses corresponding to ingots of two or more sizes, and the wafer support section has concentric recesses corresponding to wafers of two or more sizes.

7. A wafer producing apparatus for producing a wafer from a hexagonal single crystal ingot, the wafer producing apparatus comprising:
an ingot grinding unit comprising (i) a first holding table adapted to hold the hexagonal single crystal ingot, and (ii) grinding means for grinding and planarizing an upper surface of the ingot held by the first holding table;
a laser applying unit configured to include (i) a second holding table adapted to hold the ingot, and (ii) a laser applying a laser beam of such a wavelength as to be transmitted into the ingot held by the second holding table with a focal point of the laser beam positioned at a depth from the upper surface of the ingot corresponding to a thickness of the wafer to be produced to form a peel-off layer;
a wafer peeling unit configured to include (i) a third holding table adapted to hold the ingot, and (ii) wafer peeling means holding the upper surface of the ingot held by the third holding table and peeling off the wafer from the peel-off layer;
a carrying tray including (i) an ingot support section configured to support the ingot, and (ii) a wafer support section adapted to support the peeled wafer;
a belt conveyor unit configured to carry the ingot supported by the carrying tray between the ingot grinding unit and the laser applying unit and the wafer peeling unit;
a cassette stocker in which a cassette adapted to accommodate the peeled wafer is accommodated; and
accommodating means transferring the wafer supported by the wafer support section of the carrying tray into the cassette accommodated in the cassette stocker.

Assignees

• Disco Corp

Inventors

• Iizuka Kentaro
• Omiya Naoki

Classifications

• H10P72/3404

  Storage means · CPC title

• H10P72/3402

  Mechanical parts of transfer devices · CPC title

• H10P72/3218

  Conveying cassettes, containers or carriers · CPC title

• H10P72/3202

  Mechanical details, e.g. rollers or belts · CPC title

• H10P72/0472

  comprising at least one polishing chamber · CPC title