Mirror, in particular for a microlithographic projection exposure apparatus

Patent metadata

Field	Value
Publication number	US-10908509-B2
Application number	US-201916587974-A
Country	US
Kind code	B2
Filing date	Sep 30, 2019
Priority date	Mar 30, 2017
Publication date	Feb 2, 2021
Grant date	Feb 2, 2021

Abstract

A mirror, in particular for a microlithographic projection exposure apparatus, has an optical effective surface and includes a substrate ( 11, 61, 71, 81, 91 ), a reflection layer system ( 16, 66, 76, 86, 96 ) for reflecting electromagnetic radiation impinging on the optical effective surface ( 10 a, 60 a, 70 a, 80 a, 90 a ), an electrode arrangement ( 13, 63, 73, 83 ) composed of a first material having a first electrical conductivity, the electrode arrangement being provided on the substrate, and a mediator layer ( 12, 62, 72, 82, 92 ) composed of a second material having a second electrical conductivity. The ratio between the first electrical conductivity and the second electrical conductivity is at least 100. The mirror also includes at least one compensation layer ( 88 ) which at least partly compensates for the influence of a thermal expansion of the electrode arrangement ( 83 ) on the deformation of the optical effective surface ( 80 a ).

First claim

What is claimed is:

1. A mirror having an optical effective surface, comprising:
a substrate;
a reflection layer system for reflecting electromagnetic radiation impinging on the optical effective surface;
an electrode arrangement provided on the substrate and composed of a first material having a first electrical conductivity;
a mediator layer composed of a second material having a second electrical conductivity; wherein a ratio between the first electrical conductivity and the second electrical conductivity is at least 100; and
at least one compensation layer which at least partly compensates for a thermal expansion of the electrode arrangement on deformation of the optical effective surface;
wherein the electrode arrangement and the mediator layer are formed such that by electrical driving of the electrode arrangement, heat required for providing a temperature field that varies laterally over the optical effective surface is generated in the mediator layer, and
wherein the electrode arrangement and the mediator layer are configured to produce current that flows transversely with respect to the optical effective surface through the mediator layer between at least two electrodes of the electrode arrangement.

2. The mirror as claimed in claim 1 , wherein the electrode arrangement is configured to be electrically driven and thereby thermally induce deformation of the optical effective surface, in order to manipulate a wavefront of the electromagnetic radiation impinging on the optical effective surface of the mirror.

3. The mirror as claimed in claim 1 , wherein, the electrical driving of the electrode arrangement sets the surface temperature of the mirror such that, across the optical effective surface, a maximum local deviation —occurring during operation of the mirror —of the surface temperature from a zero crossing temperature of the coefficient of thermal expansion is less than 5 kelvins (K).

4. The mirror as claimed in claim 1 , wherein the ratio between the first electrical conductivity and the second electrical conductivity is at least 1000.

5. The mirror as claimed in claim 1 , wherein the mediator layer has an electrical conductivity of less than 10 000 siemens/meter (S/m).

6. The mirror as claimed in claim 5 , wherein the electrical conductivity of the mediator layer is less 200 siemens/meter (S/m).

7. The mirror as claimed in claim 1 , wherein the first material is selected from the group consisting essentially of platinum (Pt), palladium (Pd), silver (Ag), copper (Cu), Gold (Au), aluminum (Al), zinc (Zn), tin (Sn), nickel (Ni), tungsten (W), magnesium (Mg), and alloys thereof.

8. The mirror as claimed in claim 1 , wherein the second material is selected from the group consisting essentially of electrically conductive oxides, electrically conductive carbides, electrically conductive borides, electrically conductive nitrides and metallic semiconductors.

9. The mirror as claimed in claim 8 , wherein the electrically conductive oxides are selected from LaNiO 3 , SrCoO 3 , SrRuO 3 , SrTiO 3 , and CaMnO 3 , and wherein the metallic semiconductors are selected from germanium (Ge) and silicon (Si).

10. The mirror as claimed in claim 1 , further comprising an insulation layer, which electrically insulates mutually different electrodes of the electrode arrangement from one another.

11. The mirror as claimed in claim 10 , wherein the insulation layer is produced from quartz glass (SiO 2 ).

12. The mirror as claimed in claim 1 , further comprising at least one cooling element.

13. The mirror as claimed in claim 1 , wherein the compensation layer has an area occupation substantially complementary to the electrode arrangement.

14. The mirror as claimed in claim 1 , wherein the compensation layer comprises a material having a coefficient of thermal expansion having an opposite sign to a coefficient of thermal expansion of the first material.

15. The mirror as claimed in claim 1 , wherein the electrode arrangement comprises a plurality of electrodes arranged offset with respect to one another along an azimuthal direction relative to an optical element axis of the mirror.

16. The mirror as claimed in claim 1 , further comprising an absorption layer arranged between the reflection layer system and the electrode arrangement.

17. The mirror as claimed in claim 1 and configured for an operating wavelength of less than 200 nm.

18. The mirror as claimed in claim 1 and configured for an operating wavelength of less than 30 nm.

19. An optical system of a microlithographic projection exposure apparatus configured as an illumination device or a projection lens, and comprising at least one mirror embodied as claimed in claim 1 .

20. A microlithographic projection exposure apparatus comprising an illumination device and a projection lens, wherein the projection exposure apparatus comprises a mirror embodied as claimed in claim 1 .

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Lippert Johannes
• Gruner Toralf
• Hild Kerstin

Classifications

• G21K2201/067

  Construction details · CPC title

• G21K2201/065

  provided with cooling means · CPC title

• G21K1/062

  Devices having a multilayer structure · CPC title

• G03F7/70316 Primary

  Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements · CPC title

• G03F7/70266 Primary

  Adaptive optics, e.g. deformable optical elements for wavefront control, e.g. for aberration adjustment or correction · CPC title