Viscoelastic pad upon integrated circuit device contact for multipass electrical characterization probe testing

Patent metadata

Field	Value
Publication number	US-10901030-B2
Application number	US-201916278905-A
Country	US
Kind code	B2
Filing date	Feb 19, 2019
Priority date	Feb 19, 2019
Publication date	Jan 26, 2021
Grant date	Jan 26, 2021

Abstract

An integrated circuit (IC) device, such as a wafer, die, or the like, includes a viscoelastic pad upon a contact. The viscoelastic pad includes a viscoelastic material and an electrically conductive material within the viscoelastic material. The viscoelastic pad provides for a probe needle of an IC device tester to be electrically connected to the IC device contact without the probe needle directly contacting the IC device contact. The viscoelastic pad may be probed multiple instances by the probe needle and may be washed or otherwise removed from the IC device after testing is completed. The viscoelastic pad may be formed upon the IC device by forming the viscoelastic material within a mask, aligning the viscoelastic pad to the IC device contact, and ejecting the viscoelastic material from the mask upon the IC device contact.

First claim

What is claimed is:

1. A method of testing an integrated circuit (IC) device, the method comprising:
ejecting a viscoelastic pad from a recess of a mask onto a contact of the IC device;
inserting a probe needle into the viscoelastic pad without contacting the probe needle with the contact;
passing an incoming electrical signal from the probe needle though the viscoelastic pad to the contact;
receiving a return electrical signal from the contact though the viscoelastic pad to the probe needle;
removing the probe needle from the viscoelastic pad; and
removing the viscoelastic pad from the contact of the IC device.

2. The method of claim 1 , wherein the IC device is a wafer.

3. The method of claim 1 , wherein the IC device is a die.

4. The method of claim 1 , wherein the viscoelastic pad comprises a viscoelastic material and an electrically conductive material.

5. The method of claim 1 , wherein the viscoelastic pad comprises a wax with Carbon nanotubes therein.

6. A method of fabricating an integrated circuit (IC) device, the method comprising:
forming a viscoelastic pad within a recess of a mask;
aligning the viscoelastic pad within the mask with a contact of the IC device;
ejecting the viscoelastic pad from the recess of the mask and onto the aligned contact of the IC device;
inserting a probe needle into the ejected viscoelastic pad without contacting the probe needle with the contact;
passing an incoming electrical signal from the probe needle though the viscoelastic pad to the contact;
receiving a return electrical signal from the contact though the viscoelastic pad to the probe needle;
removing the probe needle from the viscoelastic pad; and
removing the viscoelastic pad from the contact of the IC device.

7. The method of claim 6 , further comprising:
curing or melting the viscoelastic material of the viscoelastic pad.

8. The method of claim 6 , wherein ejecting the viscoelastic pad from the recess of the mask and onto the aligned contact of the IC device comprises:
forcing a gas into the recess.

9. The method of claim 6 , wherein the IC device is a wafer.

10. The method of claim 9 , wherein the contact of the IC device is located within a kerf of the wafer.

11. The method of claim 6 , wherein the IC device is a die.

12. The method of claim 6 , wherein the viscoelastic pad comprises a viscoelastic material and an electrically conductive material.

13. The method of claim 6 , wherein the viscoelastic pad comprises a wax with Carbon nanotubes therein.

14. A system to test an integrated circuit (IC) device, the system comprising:
a mask comprising a recess and a viscoelastic pad within the recess, the mask configured to eject the viscoelastic pad from the recess onto a contact of an IC device;
the IC device comprising a contact and the viscoelastic pad directly upon the contact; and
a probe needle configured to insert into the viscoelastic pad without contacting the contact, configured to pass an incoming electrical signal though the viscoelastic pad to the contact, and configured to receive a return electrical signal from the contact though the viscoelastic pad.

15. The system of claim 14 , wherein the IC device is a wafer.

16. The system of claim 15 , wherein the contact of the IC device is located within a kerf of the wafer.

17. The system of claim 15 , wherein the contact of the IC device is located within an active region of the wafer.

18. The system of claim 14 , wherein the IC device is a die.

19. The system of claim 14 , wherein the viscoelastic pad comprises a viscoelastic material and an electrically conductive material.

20. The system of claim 14 , wherein the viscoelastic pad comprises a wax with Carbon nanotubes therein.

Assignees

• IBM

Inventors

• Cioban Max S
• Fry Jonathan
• Rizzolo Michael
• Sinha Tuhin

Classifications

• G01R31/2884

  using dedicated test connectors, test elements or test circuits on the IC under test (G01R31/2855 takes precedence) · CPC title

• G01R3/00

  Apparatus or processes specially adapted for the manufacture {or maintenance} of measuring instruments {, e.g. of probe tips} · CPC title

• G01R31/2889 Primary

  Interfaces, e.g. between probe and tester (G01R31/31905 and G01R1/07364 take precedence) · CPC title

• G01R1/07378 Primary

  using an intermediate adapter, e.g. space transformers (G01R1/07371 takes precedence) · CPC title