Nitride catalyst and method for manufacturing the same

Patent metadata

Field	Value
Publication number	US-10900133-B2
Application number	US-201816205349-A
Country	US
Kind code	B2
Filing date	Nov 30, 2018
Priority date	Nov 30, 2018
Publication date	Jan 26, 2021
Grant date	Jan 26, 2021

Abstract

A method for manufacturing nitride catalyst is provided, which includes putting a Ru target and an M target into a nitrogen-containing atmosphere, in which M is Ni, Co, Fe, Mn, Cr, V, Ti, Cu, or Zn. The method also includes providing powers to the Ru target and the M target, respectively. The method also includes providing ions to bombard the Ru target and the M target for depositing MxRuyN2 on a substrate by sputtering, wherein 0<x<1.3, 0.7<y<2, and x+y=2, wherein MxRuyZ2 is cubic crystal system or amorphous.

First claim

What is claimed is:

1. A nitride catalyst, having a chemical formula of
M x Ru y N 2 ,
wherein M is Ni, Co, Fe, Mn, Cr, V, Ti, Cu, or Zn;
0<x<1.3, 0.7<y<2, and x+y=2,
wherein the nitride catalyst is a cubic crystal system or amorphous.

2. The nitride catalyst as claimed in claim 1 , wherein M is Ni, 0.069<x<1.086, and 0.914<y<1.931.

3. The nitride catalyst as claimed in claim 1 , wherein M is Mn, 0.01<x<0.8, and 1.2<y<1.99.

4. The nitride catalyst as claimed in claim 1 , having a surface morphology of a tetrahedron or a pyramid.

Assignees

• Ind Tech Res Inst

Inventors

• Lin Kuo-Hsin
• Tsai Li-Duan
• Chao Wen-Hsuan
• Huang Chiu-Ping
• Yang Pin-Hsin
• Huang Hsiao-Chun
• Lin Jiunn-Nan
• Lin Yu-Ming

Classifications

• C25B1/04

  by electrolysis of water · CPC title

• C30B25/06

  by reactive sputtering · CPC title

• C25B11/075 Primary

  consisting of a single catalytic element or catalytic compound · CPC title

• C01B21/0622

  with iron, cobalt or nickel · CPC title

• C01B21/0615 Primary

  with transition metals other than titanium, zirconium or hafnium · CPC title