Prevent and remove organics from reservoir wells

Patent metadata

Field	Value
Publication number	US-10895017-B2
Application number	US-201816108545-A
Country	US
Kind code	B2
Filing date	Aug 22, 2018
Priority date	Oct 24, 2014
Publication date	Jan 19, 2021
Grant date	Jan 19, 2021

Abstract

Plating bath and well structures and methods are described to stop the organic compounds present in plating reservoir wells or bath solution from rising, i.e., climbing up the reservoir wall. An electroplating apparatus includes a vessel holding a liquid solution including metal plating material and an organic species, and a method of operating an electroplating apparatus. The apparatus is designed with plating bath and structures and methods to stop the organic compounds present in plating reservoir wells or bath solution from rising, i.e., climbing or wicking up the inner surfaces of reservoir walls, and to wash them back down on a continuous or cyclical basis in order to maintain a concentration of organic compounds in the plating solution within upper and lower specification limits.

First claim

What is claimed is:

1. A method for operating an electroplating vessel, the vessel having walls configured to hold a liquid solution of a metal plating material and including an organic species, the liquid solution contained within the vessel at a first level below a top rim of the vessel, wherein when a workpiece is immersed in the liquid solution to displace a volume of the liquid solution resulting in the liquid solution level rising within the vessel to a second level above the first level, and wherein a barrier material lining is located on the walls of the vessel and at, or above, the second level, the method comprising:
after immersing the workpiece, immersing a removable object in the liquid solution contained in the vessel; the removable object when immersed causing displacement of a volume of the liquid solution resulting in the liquid solution level rising within the vessel to the second level; and
removing the removable object from the liquid solution, wherein when the removable object is removed, the liquid level is lowered to the first level while simultaneously washing the organics back into the solution.

2. The method of claim 1 , wherein the removable object is a bladder.

3. The method of claim 2 , further comprising inputting air into the bladder for expanding the bladder within the solution.

4. The method of claim 1 , further comprising:
repeating of the immersing and removal of the workpiece in the liquid solution and afterward the immersing and removing the removable object in the liquid solution in alternating fashion.

5. The method of claim 1 , further comprising:
monitoring a concentration of the organic species in the liquid solution in the vessel; and
adding an amount of organic species back in the liquid solution to maintain a concentration of the organic species within an upper and lower limit.

6. The method of claim 1 , further comprising a control device configured with the vessel, wherein the control device controls the timing of the immersing.

7. The method of claim 2 , further comprising a control device configured with the vessel, wherein the control device controls expansion of the bladder.

8. The method of claim 2 , further comprising a control device configured with the vessel, wherein the control device controls the amount of expansion of the bladder when the bladder is immersed in the liquid solution.

9. The method of claim 2 , wherein the bladder is a balloon type structure and is composed of a material that is compatible to not compromise the liquid solution of the metal plating material.

10. The method of claim 2 , wherein the bladder is solid object structure and is composed of a material that is compatible to not compromise the liquid solution of the metal plating material.

11. The method of claim 1 , wherein the volume of the liquid solution resulting in the liquid solution level rising within the vessel to the second level caused by the removable object is less than the volume of the liquid solution resulting in the liquid solution level rising within the vessel to the second level caused by the workpiece.

12. The method of claim 1 , wherein the barrier material lining is a glass, glassy carbon, or a ceramic.

13. The method of claim 1 , wherein the barrier material lining is embedded in a groove that is cut into the walls of the vessel.

14. The method of claim 13 , wherein the barrier material lining has a surface contiguous with the walls of said vessel.

15. The method of claim 1 , wherein the metal plating material is nickel.

16. A method for operating an electroplating vessel, the vessel having walls configured to hold a liquid solution of a metal plating material and including an organic species, the liquid solution contained within the vessel at a first level below a top rim of the vessel, wherein when a workpiece is immersed in the liquid solution to displace a volume of the liquid solution resulting in the liquid solution level rising within the vessel to a second level above the first level, and wherein a removable liner is located on the walls of the vessel and at, or above, the second level, the method comprising:
after immersing the workpiece, immersing a removable object in the liquid solution contained in the vessel; the removable object when immersed causing displacement of a volume of the liquid solution resulting in the liquid solution level rising within the vessel to the second level; and
removing the removable object from the liquid solution, wherein when the removable object is removed, the liquid level is lowered to the first level while simultaneously washing the organics back into the solution.

17. The method of claim 16 , wherein the removable liner is configured to be removed, cleaned and reused after the removing of the removable object.

18. The method of claim 16 , wherein the removable liner is configured to be removed and discarded after the removing of the removable object.

Assignees

• IBM

Inventors

• Arvin Charles L
• Biggs Glen N
• Palmatier Phillip W
• Sorbello Joseph C
• Tong Tracy A
• Torres Freddie

Classifications

• C25D21/18 Primary

  of electrolytes (C25D21/22 takes precedence) · CPC title

• C25D21/10

  Agitating of electrolytes; Moving of racks · CPC title

• C25D17/02

  Tanks; Installations therefor · CPC title

• C25D21/08

  Rinsing · CPC title