Capacitive fingerprint sensor including an electrostatic lens
US-9460332-B1 · Oct 4, 2016 · US
US10891459B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10891459-B2 |
| Application number | US-201816621302-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 11, 2018 |
| Priority date | Jun 16, 2017 |
| Publication date | Jan 12, 2021 |
| Grant date | Jan 12, 2021 |
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There is provided a fingerprint sensor module comprising a fingerprint sensor device comprising a sensing array and at least one connection pad for electrically connecting the fingerprint sensor device to external circuitry, the sensing array and connection pad being located on a first side of the fingerprint sensing device; at least one electrically conductive via connection arranged adjacent to the fingerprint sensor device and in electrical contact with the connection pad via at least one conductive trace located in the same plane as the connection pad; a mold layer arranged to cover a backside of the fingerprint sensor device and to fill a volume between the fingerprint sensor device and the via connection, wherein an end portion of the via connection is exposed for connecting the fingerprint sensor module to external circuitry. There is also provided a method for manufacturing such a fingerprint sensor module.
Opening claim text (preview).
What is claimed is: 1. A fingerprint sensor module comprising: a fingerprint sensor device comprising a sensing array and at least one connection pad for electrically connecting the fingerprint sensor device to external circuitry, said sensing array and connection pad being located on a first side of the fingerprint sensor device; a plurality of electrically conductive via connections arranged adjacent to the fingerprint sensor device and in electrical contact with the connection pad via at least one conductive trace located in the same plane as said connection pad, wherein via connections are arranged on at least two opposing sides of the fingerprint sensor device; a mold layer arranged to cover a backside of said fingerprint sensor device and to fill a volume between the fingerprint sensor device and the via connection and enclosing the via connection, wherein an end portion of said via connection is exposed for connecting said fingerprint sensor module to external circuitry, wherein a height of said at least one electrically conductive via connection is lower than a combined thickness of the sensor device and the mold layer located on the backside of the sensor device such that said fingerprint sensor module exhibits a T-shaped profile. 2. The fingerprint sensor module according to claim 1 , wherein a height of said electrically conductive via connections is equal to a thickness of said fingerprint sensor device. 3. The fingerprint sensor module according to claim 1 , wherein said conductive trace is formed in a redistribution layer, RDL. 4. The fingerprint sensor module according to claim 1 , wherein said electrically conductive via connections comprises copper. 5. The fingerprint sensor module according to claim 1 , wherein said electrically conductive via connections are formed by means of electroplating. 6. The fingerprint sensor module according to claim 1 , wherein said electrically conductive via connections are integrated in a pre-fabricated substrate. 7. The fingerprint sensor module according to claim 6 , wherein the substrate is a PCB-substrate. 8. The fingerprint sensor module according to claim 1 , wherein said electrically conductive via connections are pre-formed metal structures. 9. The fingerprint sensor module according to claim 1 , wherein a cross section area of said electrically conductive via connections is larger than a surface area of said at least one connection pad of said fingerprint sensor device. 10. The fingerprint sensor module according to claim 1 , wherein said mold layer comprises a mechanically flexible material. 11. The fingerprint sensor module according to claim 1 , further comprising a protective plate arranged to cover the fingerprint sensor device and to form a sensing surface of the fingerprint sensor module. 12. A smart card comprising: a fingerprint sensor module, comprising: a fingerprint sensor device comprising a sensing array and at least one connection pad for electrically connecting the fingerprint sensor device to external circuitry, said sensing array and connection pad being located on a first side of the fingerprint sensor device; a plurality of electrically conductive via connections arranged adjacent to the fingerprint sensor device and in electrical contact with the connection pad via at least one conductive trace located in the same plane as said connection pad, wherein via connections are arranged on at least two opposing sides of the fingerprint sensor device; and a mold layer arranged to cover a backside of said fingerprint sensor device and to fill a volume between the fingerprint sensor device and the via connection and enclosing the via connection, wherein an end portion of said via connection is exposed for connecting said fingerprint sensor module to external circuitry, wherein a height of said at least one electrically conductive via connection is lower than a combined thickness of the sensor device and the mold layer located on the backside of the sensor device such that said fingerprint sensor module exhibits a T-shaped profile, wherein the fingerprint sensor module is arranged in an opening of the smart card and electrically connected to smart card circuitry by means of said at least one electrically conductive via connection. 13. A method for manufacturing a fingerprint sensor module, the method comprising: providing a carrier; providing a fingerprint sensor device comprising a sensing array and at least one connection pad for electrically connecting the fingerprint sensor device to external circuitry, said sensing array and connection pad being located on a first side of the fingerprint sensing device; arranging the fingerprint sensor device on the carrier with the sensing array facing the carrier; providing a plurality of electrically conductive via connections on the carrier adjacent to the fingerprint sensor device, wherein the via connections are arranged on at least two opposing sides of the fingerprint sensor device; providing a mold layer to cover a backside of the fingerprint sensor device and to enclose the at least one electrically conductive via connection while leaving an end portion of the at least one electrically conductive via connection exposed, wherein a height of said at least one electrically conductive via connection is lower than a combined thickness of the sensor device and the mold layer located on the backside of the sensor device such that said fingerprint sensor module exhibits a T-shaped profile; removing said carrier; and forming an electrical connection between said at least one connection pad and said at least one at least one electrically conductive via connection. 14. The method according to claim 13 , further comprising forming the electrically conducive via connections by electroplating. 15. The method according to claim 13 , wherein the electrically conducive via connections are provided on the carrier prior to arranging the fingerprint sensor device on the carrier. 16. The method according to claim 13 , wherein arranging a mold layer comprises: depositing a mold layer to cover a backside of the fingerprint sensor and the electrically conductive via connections; and removing a portion of the mold layer to expose at least an end portion of the electrically conductive via connections. 17. The method according to claim 16 , wherein said portion of said mold layer is removed by means of laser ablation. 18. The method according to claim 13 , further comprising arranging a mold layer by means of a patterned molding tool having a pattern such that a resulting mold does not cover the end portion of the electrically conductive via connections. 19. The method according to claim 13 , wherein forming an electrical connection between said at least one connection pad and said electrically conductive via connections is performed by deposition of an electrically conductive redistribution layer, RDL.
Details of sensors, e.g. sensor lenses (fingerprint or palmprint sensors G06V40/13; vascular sensors G06V40/145; eye sensors G06V40/19) · CPC title
non-optical, e.g. ultrasonic or capacitive sensing · CPC title
used to support a device or a wafer when forming electrical connections thereto · CPC title
using temporarily an auxiliary support · CPC title
of the portions that connect to chips, wafers or package parts · CPC title
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