Crucible, evaporation source and evaporation device

Patent metadata

Field	Value
Publication number	US-10883167-B2
Application number	US-201815983071-A
Country	US
Kind code	B2
Filing date	May 17, 2018
Priority date	Jul 3, 2017
Publication date	Jan 5, 2021
Grant date	Jan 5, 2021

Abstract

A crucible, an evaporation source and an evaporation device are disclosed. The crucible includes a crucible body. The crucible body includes: an inner heating layer with a first heater assembly and an outer heating layer with a second heater assembly. The outer heating layer is at a periphery of the inner heating layer, and surrounds the inner heating layer, and a space between the outer heating layer and the inner heating layer defines an accommodation space for a to-be-evaporated material.

First claim

What is claimed is:

1. A crucible, comprising:
a crucible body, wherein the crucible body includes:
an inner heating layer with a first heater assembly; and
an outer heating layer with a second heater assembly;

wherein the outer heating layer is at a periphery of the inner heating layer and surrounds the inner heating layer, and a space between the outer heating layer and the inner heating layer defines an accommodation space for a to-be-evaporated material,
the crucible body includes an opening in a first end surface of the crucible body for evaporated material of the to-be-evaporated material to escape from the crucible body;
the inner heating layer extends from a second end surface opposite to the first end surface towards the first end surface; and
an end of the inner heating layer away from the second end surface is spaced from the first end surface,
the crucible further comprises a guide cover and a linkage structure, wherein:
the guide cover includes several blades;
the guide cover has a first state and a second state, wherein in the first state, the blades are folded and stacked in a space between the inner heating layer and the first end surface, and an airflow path is defined between the accommodation space and the opening, and in the second state, the blades are unfolded within the crucible body and blocks a part of the airflow path; and
the linkage structure is connected with the guide cover, and is configured to drive the guide cover to switch between the first state and the second state.

2. The crucible of claim 1 , wherein:
the crucible body further includes a housing having an inner chamber;
the outer heating layer is connected with the housing; and
the inner heating layer is at a central position of the inner chamber.

3. The crucible of claim 2 , wherein the outer heating layer is in the inner chamber, mounted to an inner wall of the housing, and surrounds the inner heating layer.

4. The crucible of claim 1 , wherein the second heater assembly of the outer heating layer includes a first heater and a second heater spaced from the first heater, the first heater and the second heater being arranged sequentially in a direction from the second end surface to the first end surface.

5. The crucible of claim 4 , wherein each of the first heater and the second heater is a heating wire that is wound around the inner heating layer with the inner heating layer as a center.

6. The crucible of claim 4 , wherein the first heater and the second heater are independently controlled.

7. The crucible of claim 4 , wherein the first heater assembly of the inner heating layer includes a third heater and a fourth heater separated from the third heater, the third heater and the fourth heater being arranged sequentially in a direction from the second end surface to the first end surface.

8. The crucible of claim 7 , wherein each of the third heater and the fourth heater has a cylindrical shape.

9. The crucible of claim 7 , wherein the third heater and the fourth heater are independently controlled.

10. The crucible of claim 1 , wherein the unfolded blades are in an identical plane within the crucible body with an interval defined between adjacent blades.

11. The crucible of claim 1 , wherein an outer periphery of each blade at the unfolded state abuts against an inner wall of the housing of the crucible body.

12. The crucible of claim 1 , wherein the linkage structure includes:
a blade seat between the inner heating layer and the first end surface;
a shaft fixed to the blade seat and extending towards the first end surface;
a shaft sleeve disposed around the shaft and movable relative to the shaft in a direction towards or away from the first end surface, wherein the shaft sleeve is connected with each blade, and the blades are driven by the shaft sleeve to move in a direction towards or away from the first end surface, thereby enabling the guide cover to switch between the first state and the second state; and
a driving member connected with the shaft sleeve;
wherein the driving member drives the shaft sleeve to move relative to the shaft in the direction towards or away from the first end surface.

13. The crucible of claim 12 , wherein the blade seat is on an end of the inner heating layer away from the second end surface.

14. The crucible of claim 12 , wherein each blade is pivotally connected to the shaft sleeve.

15. The crucible of claim 12 , wherein the driving member includes a pneumatic driver or a hydraulic driver.

16. The crucible of claim 12 , wherein the linkage structure further includes a blocking bar on the blade seat with an inserting space defined between the blocking bars and the blade seat; and
wherein each blade is inserted into the inserting space when the guide cover switches between the first state and the second state.

17. An evaporation source, comprising the crucible of claim 1 .

18. An evaporation device, comprising the evaporation source of claim 17 .

Assignees

• Boe Technology Group Co Ltd

Inventors

• Zhao Dejiang
• Yuan Guangcai

Classifications

• C23C14/542

  Controlling the film thickness or evaporation rate · CPC title

• F27B2014/0843

  Lining or casing · CPC title

• F27B14/12

  Covers therefor · CPC title

• F27B2014/102

  Form of the crucibles · CPC title

• C23C14/243 Primary

  Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title