Alloy metal foil for use as deposition mask, deposition mask, methods of preparing the same, and method of manufacturing organic light-emitting device using the same
US-2019259950-A1 · Aug 22, 2019 · US
US10883165B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10883165-B2 |
| Application number | US-201816169693-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 24, 2018 |
| Priority date | Dec 8, 2017 |
| Publication date | Jan 5, 2021 |
| Grant date | Jan 5, 2021 |
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A mask sheet and a method for manufacturing the same are provided. A mask sheet includes one or more openings defined therein, and an alloy of nickel and iron, and a particle of the alloy has a single crystalline structure. A method for manufacturing a mask sheet includes preparing a base sheet including an alloy of nickel and iron, performing a heat treatment on the entire base sheet; and forming one or more openings in the heat-treated base sheet.
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What is claimed is: 1. A method for manufacturing a mask sheet, the method comprising: preparing a base sheet comprising an alloy of nickel and iron; performing a heat treatment on the entire base sheet; and forming one or more openings in the heat-treated base sheet, wherein the heat treatment is performed at a temperature in a range from about 520° C. to about 580° C. for about one hour to about two hours. 2. The method of claim 1 , wherein the heat treatment is performed under a nitrogen and hydrogen atmosphere, and a ratio of the nitrogen and the hydrogen is about 95:5 to about 99:1. 3. The method of claim 1 , wherein a content of the nickel in the alloy is in a range from about 33 wt % to about 37 wt %. 4. The method of claim 1 , wherein the preparing the base sheet comprises forming the base sheet by electroforming. 5. The method of claim 1 , wherein the forming the one or more openings is performed by laser radiation. 6. The method of claim 1 , wherein the preparing the base sheet comprises preparing the base sheet having a thickness of about 30 μm or less. 7. The method of claim 1 , wherein the preparing the base sheet comprises preparing the base sheet in which a crystal structure of the alloy comprises a polycrystalline structure. 8. The method of claim 1 , wherein a crystal structure of the alloy in the heat-treated base sheet comprises a single crystalline structure. 9. The method of claim 8 , wherein the single crystalline structure has only a face centered cubic structure. 10. The method of claim 1 , wherein a size of crystal grains in a crystal structure in the heat-treated base sheet is in micro-scale.
using masks · CPC title
with nickel · CPC title
using selective deposition, e.g. using a mask · CPC title
Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title
using masks · CPC title
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