Mask sheet and manufacturing method for the same

US10883165B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-10883165-B2
Application numberUS-201816169693-A
CountryUS
Kind codeB2
Filing dateOct 24, 2018
Priority dateDec 8, 2017
Publication dateJan 5, 2021
Grant dateJan 5, 2021

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

A mask sheet and a method for manufacturing the same are provided. A mask sheet includes one or more openings defined therein, and an alloy of nickel and iron, and a particle of the alloy has a single crystalline structure. A method for manufacturing a mask sheet includes preparing a base sheet including an alloy of nickel and iron, performing a heat treatment on the entire base sheet; and forming one or more openings in the heat-treated base sheet.

First claim

Opening claim text (preview).

What is claimed is: 1. A method for manufacturing a mask sheet, the method comprising: preparing a base sheet comprising an alloy of nickel and iron; performing a heat treatment on the entire base sheet; and forming one or more openings in the heat-treated base sheet, wherein the heat treatment is performed at a temperature in a range from about 520° C. to about 580° C. for about one hour to about two hours. 2. The method of claim 1 , wherein the heat treatment is performed under a nitrogen and hydrogen atmosphere, and a ratio of the nitrogen and the hydrogen is about 95:5 to about 99:1. 3. The method of claim 1 , wherein a content of the nickel in the alloy is in a range from about 33 wt % to about 37 wt %. 4. The method of claim 1 , wherein the preparing the base sheet comprises forming the base sheet by electroforming. 5. The method of claim 1 , wherein the forming the one or more openings is performed by laser radiation. 6. The method of claim 1 , wherein the preparing the base sheet comprises preparing the base sheet having a thickness of about 30 μm or less. 7. The method of claim 1 , wherein the preparing the base sheet comprises preparing the base sheet in which a crystal structure of the alloy comprises a polycrystalline structure. 8. The method of claim 1 , wherein a crystal structure of the alloy in the heat-treated base sheet comprises a single crystalline structure. 9. The method of claim 8 , wherein the single crystalline structure has only a face centered cubic structure. 10. The method of claim 1 , wherein a size of crystal grains in a crystal structure in the heat-treated base sheet is in micro-scale.

Assignees

Inventors

Classifications

  • C23C14/042Primary

    using masks · CPC title

  • with nickel · CPC title

  • using selective deposition, e.g. using a mask · CPC title

  • H10K71/00Primary

    Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

  • using masks · CPC title

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Frequently asked questions

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What does patent US10883165B2 cover?
A mask sheet and a method for manufacturing the same are provided. A mask sheet includes one or more openings defined therein, and an alloy of nickel and iron, and a particle of the alloy has a single crystalline structure. A method for manufacturing a mask sheet includes preparing a base sheet including an alloy of nickel and iron, performing a heat treatment on the entire base sheet; and form…
Who is the assignee on this patent?
Samsung Display Co Ltd
What technology area does this patent fall under?
Primary CPC classification C23C14/042. Mapped technology areas include Chemistry & Metallurgy.
When was this patent published?
Publication date Tue Jan 05 2021 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).