Package structure and method of fabricating package structure

Patent metadata

Field	Value
Publication number	US-10879197-B2
Application number	US-201715690287-A
Country	US
Kind code	B2
Filing date	Aug 30, 2017
Priority date	Aug 30, 2017
Publication date	Dec 29, 2020
Grant date	Dec 29, 2020

Abstract

A package structure in accordance with some embodiments may include an RFIC chip, a redistribution circuit structure, a backside redistribution circuit structure, an isolation film, a die attach film, and an insulating encapsulation. The redistribution circuit structure and the backside redistribution circuit structure are disposed at two opposite sides of the RFIC chip and electrically connected to the RFIC chip. The isolation film is disposed between the backside redistribution circuit structure and the RFIC chip. The die attach film is disposed between the RFIC chip and the isolation film. The insulating encapsulation encapsulates the RFIC chip and the isolation film between the redistribution circuit structure and the backside redistribution circuit structure. The isolation film may have a coefficient of thermal expansion lower than the insulating encapsulation and the die attach film.

First claim

What is claimed is:

1. A package structure comprising:
a radio frequency integrated circuit (RFIC) chip;
a redistribution circuit structure disposed at a first side of the RFIC chip and electrically connected to the RFIC chip;
an antenna structure disposed at a second side of the RFIC chip and electrically connected to the RFIC chip through the redistribution circuit structure, wherein the first side is opposite to the second side, and the antenna structure comprises a backside redistribution circuit structure, a plurality of antenna patches and an isolation molding layer disposed between the backside redistribution circuit structure and the antenna patches, and wherein the isolation molding layer separates the backside redistribution circuit structure and the antenna patches by a dielectric gap;
an isolation film disposed between the antenna structure and the RFIC chip;
a die attach film disposed between the RFIC chip and the isolation film; and
an insulating encapsulation encapsulating the RFIC chip and the isolation film between the redistribution circuit structure and the antenna structure, wherein the backside redistribution circuit structure is embedded in the insulating encapsulation.

2. The package structure of claim 1 , wherein the isolation film has a dissipation factor lower than the insulating encapsulation and the die attach film.

3. The package structure of claim 1 , wherein the isolation film has a thickness greater than the die attach film.

4. The package structure of claim 1 , wherein an area of the isolation film exceeds an area of the RFIC chip.

5. The package structure of claim 1 , wherein the backside redistribution circuit structure comprises a metal layer in contact with the isolation molding layer.

6. The package structure of claim 5 , wherein the metal layer is in contact with the isolation film.

7. The package structure of claim 6 , wherein an area of the metal layer further exceeds an area of the isolation film.

8. The package structure of claim 1 , further comprising a lateral antenna structure located at a lateral side of the RFIC chip, encapsulated by the insulating encapsulation, and electrically connected to the RFIP chip through the redistribution circuit structure.

9. The package structure of claim 1 , wherein a material of the isolation film comprises a pre-preg material.

10. The package structure of claim 1 , wherein a material of the isolation film comprises at least one of fused quartz, polycarbonate, polystyrene, Teflon, and Tefzel.

11. The package structure of claim 1 , further comprising a conductive bump disposed on and electrically connected to the redistribution circuit structure.

12. The package structure of claim 11 , wherein the redistribution circuit structure comprises a metal layer and a dielectric layer, the dielectric layer is disposed between the metal layer and the conductive bump, the dielectric layer has an opening, and the conductive bump is in contact with the metal layer in the opening.

13. The package structure of claim 1 , wherein-the backside redistribution circuit structure is electrically connected to the RFIC chip through the redistribution circuit structure.

14. The package structure of claim 1 , further comprising a through via connected between the backside redistribution circuit structure and the redistribution circuit structure.

15. The package structure of claim 14 , wherein the through via is encapsulated by the insulating encapsulation.

16. A method of fabricating a package structure comprising:
forming a backside redistribution circuit structure on a carrier;
laminating an isolation film on the backside redistribution circuit structure;
attaching an RFIC chip on the isolation film through a die attach film, wherein the isolation film has a dissipation factor lower than the die attach film and the isolation film is disposed between the backside redistribution circuit structure and the RFIC chip;
forming an insulating encapsulation encapsulating the RFIC chip, the die attach film and the isolation film, wherein the backside redistribution circuit structure is embedded in the insulating encapsulation;
forming a front redistribution circuit structure on the RFIC chip attached on the isolation film, wherein the front redistribution circuit structure and the backside redistribution circuit structure are disposed at opposite sides of the RFIC chip;
separating the carrier from the backside redistribution circuit structure;
forming a plurality of antenna patches over the backside redistribution circuit structure, wherein the antenna patches and the backside redistribution circuit structure construct an antenna structure; and
forming an isolation molding layer separating the backside redistribution circuit structure and the antenna patches by a dielectric gap.

17. The method of claim 16 , wherein the method of forming the backside redistribution circuit structure on the carrier comprises immediately forming a metal layer on the carrier.

18. A package structure comprising:
a radio frequency integrated circuit (RFIC) chip;
a redistribution circuit structure disposed at a first side of the RFIC chip and electrically connected to the RFIC chip;
an antenna structure disposed at a second side of the RFIC chip and electrically connected to the redistribution circuit structure, wherein the first side is opposite to the second side, and the antenna structure comprises a backside redistribution circuit structure, a plurality of antenna patches and an isolation molding layer, and wherein the isolation molding layer separates the backside redistribution circuit structure and the antenna patches by a dielectric gap;
an isolation film disposed between the antenna structure and the RFIC chip; and
an insulating encapsulation encapsulating the RFIC chip and the isolation film between the redistribution circuit structure and the backside redistribution circuit structure.

19. The package structure of claim 18 , wherein the backside redistribution circuit structure comprises a metal layer in contact with the isolation film.

20. The package structure of claim 19 , wherein an area of the metal layer further exceeds an area of the isolation film.

21. The package structure of claim 18 , further comprising a lateral antenna structure located at a lateral side of the RFIC chip, encapsulated by the insulating encapsulation, and electrically connected to the RFIP chip through the redistribution circuit structure.

22. The package structure of claim 18 , further comprising a through via connected between the backside redistribution circuit structure and the redistribution circuit structure.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Wan Albert
• Liu Chung-Shi
• Shih Chao-Wen
• Pu Han-Ping
• Hwang Chien-Ling

Classifications

• H10W70/099

  Connecting interconnections to insulating or insulated package substrates, interposers or redistribution layers · CPC title

• H10W72/073

  of die-attach connectors · CPC title

• H10W72/874

  On different surfaces · CPC title

• H10W72/9413

  on encapsulations · CPC title

• H10W72/983

  Reinforcing structures, e.g. collars · CPC title