Method for manufacturing a polarizer apparatus, polarizer apparatus, and display system having a polarizer apparatus

Patent metadata

Field	Value
Publication number	US-10877199-B2
Application number	US-201616333664-A
Country	US
Kind code	B2
Filing date	Oct 12, 2016
Priority date	Oct 12, 2016
Publication date	Dec 29, 2020
Grant date	Dec 29, 2020

Abstract

A method for manufacturing a polarizer apparatus is described. The method includes forming a patterned resist structure having lines with a top surface and two or more side surfaces; depositing a conductive material over the patterned resist structure, wherein the conductive material is provided at the top surface and the two or more side surfaces, and wherein a layer structure is formed; and etching the layer structure to remove the conductive material from the top surface of the lines to form conductive lines of the conductive material at the two or more side surfaces.

First claim

The invention claimed is:

1. A method for manufacturing a polarizer apparatus, the method comprising:
forming a patterned resist structure having lines with a top surface and two or more side surfaces;
depositing a conductive material over the patterned resist structure, wherein the conductive material is provided at the top surface and the two or more side surfaces, and wherein a layer structure is formed; and
etching the layer structure to remove the conductive material from the top surface of the lines to form conductive lines of the conductive material at the two or more side surfaces, wherein the conductive lines include at least a first conductive line and an adjacent second conductive line, wherein each of the first conductive line and the adjacent second conductive line have a first height of a first side surface and a second height of a second side surface, wherein the first height is smaller than the second height, wherein each of the first conductive line and the second conductive line have an asymmetrically curved top surface.

2. The method of claim 1 , further comprising:
electrically coupling the conductive lines.

3. The method of claim 1 , further comprising:
further removing the patterned resist structure.

4. The method of claim 1 , further comprising:
providing a planarization layer over and between the conductive lines.

5. The method of claim 1 , further comprising:
a second deposition of further conductive material over the conductive material and before etching the layer structure.

6. The method of claim 1 , further comprising:
aligning the conductive lines of the polarizer apparatus with a color filter of an LCD system.

7. The method of claim 1 , wherein the lines of the patterned resist structure form a line array having a resist pitch of 220 nm or above.

8. The method of claim 7 , wherein the conductive lines form a wire array having a wire pitch of 30% to 70% of the resist pitch.

9. The method of claim 1 , wherein the patterned resist structure is formed via imprint lithography.

10. The method of claim 2 , further comprising:
further removing the patterned resist structure.

11. The method of claim 4 , further comprising:
a second deposition of further conductive material over the conductive material and before etching the layer structure.

12. The method of claim 5 , further comprising:
aligning the conductive lines of the polarizer apparatus with a color filter of an LCD system.

13. The method of claim 6 , wherein the lines of the patterned resist structure form a line array having a resist pitch of 220 nm or above.

Assignees

• Applied Materials Inc

Inventors

• Cunningham Kevin
• Bencher Christopher

Classifications

• G02F1/133536

  Reflective polarizers (G02F1/13362 takes precedence) · CPC title

• G02B5/3058 Primary

  comprising electrically conductive elements, e.g. wire grids, conductive particles · CPC title

• G02F1/133548

  Wire-grid polarisers · CPC title

• G02B6/0055

  Reflecting element, sheet or layer · CPC title

• G02F1/133528

  Polarisers · CPC title