Dielectric film forming composition

Patent metadata

Field	Value
Publication number	US-10875965-B2
Application number	US-201815907323-A
Country	US
Kind code	B2
Filing date	Feb 28, 2018
Priority date	Sep 11, 2017
Publication date	Dec 29, 2020
Grant date	Dec 29, 2020

Abstract

This disclosure relates to dielectric film forming compositions containing a) at least one fully imidized polyimide polymer; b) at least one metal-containing (meth)acrylates; c) at least one catalyst; and d) at least one solvent, as well as related processes and related products. The compositions can form a dielectric film that generates substantially no debris when the dielectric film is patterned by laser ablation process.

First claim

What is claimed is:

1. A dielectric film forming composition, comprising:
a) at least one fully imidized polyimide polymer;
b) at least one metal-containing (meth)acrylate;
c) at least one catalyst; and
d) at least one solvent;
wherein the at least one metal-containing (meth)acrylate is in an amount of from about 0.5 wt % to about 20 wt % of the composition.

2. The composition of claim 1 , wherein the metal atom of the at least one metal-containing (meth)acrylate is selected from the group consisting of titanium, zirconium, hafnium, and germanium.

3. The composition of claim 1 , wherein the at least one metal-containing (meth)acrylate comprises at least one metal atom and at least one (meth)acrylate group.

4. The composition of claim 1 , wherein the at least one metal-containing (meth)acrylate comprises titanium tetra(meth)acrylate, zirconium tetra(meth)acrylate, hafnium tetra(meth)acrylate, titanium butoxide tri(meth)acrylate, titanium dibutoxide di(meth)acrylate, titanium tributoxide (meth)acrylate, zirconium butoxide tri(meth)acrylate, zirconium dibutoxide di(meth)acrylate, zirconium tributoxide (meth)acrylate, hafnium butoxide tri(meth)acrylate, hafnium dibutoxide di(meth)acrylate, hafnium tributoxide (meth)acrylate, titanium tetra(carboxyethyl (meth)acrylate), zirconium tetra(carboxyethyl (meth)acrylate), hafnium tetra(carboxyethyl (meth)acrylate), titanium butoxide tri(carboxyethyl (meth)acrylate), titanium dibutoxide di(carboxyethyl (meth)acrylate), titanium tributoxide (carboxyethyl (meth)acrylate), zirconium butoxide tri(carboxyethyl (meth)acrylate), zirconium dibutoxide di(carboxyethyl (meth)acrylate), zirconium tributoxide (carboxyethyl (meth)acrylate), hafnium butoxide tri(carboxyethyl (meth)acrylate), hafnium dibutoxide di(carboxyethyl (meth)acrylate), or hafnium tributoxide (carboxyethyl (meth)acrylate).

5. The composition of claim 1 , wherein the at least one metal-containing (meth)acrylate is in an amount of from about 1 wt % to about 20 wt % of the composition.

6. The composition of claim 1 , wherein the at least one fully imidized polyimide polymer is in an amount of from about 3 wt % to about 40 wt % of the composition.

7. The composition of claim 1 , wherein the at least one catalyst comprises a photoinitiator or a thermal initiator.

8. The composition of claim 1 , wherein the at least one catalyst is in an amount of from about 0.25 wt % to about 4 wt % of the composition.

9. The composition of claim 1 , wherein the at least one solvent is in an amount of from about 35 wt % to about 98 wt % of the composition.

10. The composition of claim 1 , further comprising at least one crosslinker.

11. The composition of claim 10 , wherein the crosslinker comprises two or more alkenyl or alkynyl groups.

12. The composition of claim 1 , further comprising at least one filler.

13. The composition of claim 12 , wherein the at least one filler comprise an inorganic particle selected from the group consisting of silica, alumina, titania, zirconia, hafnium oxide, CdSe, CdS, CdTe, CuO, zinc oxide, lanthanum oxide, niobium oxide, tungsten oxide, strontium oxide, calcium titanium oxide, sodium titanate, barium sulfate, barium titanate, barium zirconate, and potassium niobate.

14. The composition of claim 1 , wherein the composition forms a dielectric film that generates substantially no debris when the dielectric film is patterned by laser ablation process.

15. A dielectric film formed by the composition of claim 1 .

16. A dielectric film, comprising:
a) at least one fully imidized polyimide polymer;
b) at least one metal-containing (meth)acrylates; and
c) at least one catalyst;
wherein the at least one metal-containing (meth)acrylate is in an amount of from about 1 wt % to about 25 wt % of the dielectric film.

17. The dielectric film of claim 16 , wherein the dielectric film is a free-standing dielectric film.

18. A process for depositing a conductive metal layer, comprising:
a) depositing the composition of claim 1 on a substrate to form a dielectric film;
b) exposing the dielectric film to a source of radiation or heat;
c) patterning the dielectric film to form a patterned dielectric film having openings;
d) depositing a seed layer on the patterned dielectric film; and
e) depositing a conductive metal layer in at least one opening in the patterned dielectric film.

19. The process of claim 18 , further comprising removing overburden of the conductive metal or removing the seed layer.

20. The process of claim 18 , wherein removing overburden of the conductive metal or removing the seed layer is performed by wet etching.

21. The process of claim 18 , wherein exposing the dielectric film to a source of radiation or heat comprises heating the dielectric film at a temperature from about 70° C. to about 250° C.

22. The process of claim 18 , wherein the patterning of the dielectric film is performed by a laser ablation process.

23. The process of claim 22 , wherein the laser ablation process results in substantially no debris.

24. The process of claim 18 , wherein the patterned dielectric film comprises at least one element having a feature size of at most about 3 microns.

25. The process of claim 18 , wherein the conductive metal layer comprises copper.

26. The process of claim 19 , wherein the overburden has a thickness of at most about 2 microns.

27. The process of claim 18 , wherein the seed layer is deposited without using a debris removal process or a pretreatment process.

28. The process of claim 18 , wherein the process is free of a chemical mechanical planarization process or a post chemical mechanical planarization cleaning process for treating a conductive metal overburden.

29. A three dimensional object formed by the process of claim 18 .

30. A semiconductor device, comprising the three dimensional object of claim 29 .

31. The semiconductor device of claim 30 , wherein the semiconductor device is an integrated circuit, a light emitting diode, a solar cell, or a transistor.

32. A process for preparing a dry film structure, comprising:
(A) coating a carrier substrate with a dielectric film forming composition of claim 1 to form a coated composition;
(B) drying the coated composition to form a dielectric film; and
(C) optionally applying a protective layer on the dielectric film.

33. A process for depositing a conductive metal layer, comprising:
a) forming the photosensitive dielectric film of claim 16 on a substrate;
b) exposing the dielectric film to a source of radiation or heat;
c) patterning the dielectric film to form a patterned dielectric film having openings;
d) depositing a seed layer on the patterned dielectric film; and
e) depositing a conductive metal layer in at least one opening in the patterned dielectric film, wherein depositing a conductive metal layer forms a conductive metal overburden having a thickness at most about 2 microns.

34. The process of claim 33 , further comprising removing the conductive metal overburden or removing the seed layer.

35. The process of claim 34 , wherein removing the conductive metal overburden or removing the seed layer is performed by wet etching.

36. The process of claim 33 , wherein exposing the dielectric fil

Assignees

• Fujifilm Electronic Mat Usa Inc

Inventors

• Malik Sanjay
• Reinerth William A
• Dimov Ognian
• Sakamuri Raj

Classifications

• H10P50/667

  by liquid etching only · CPC title

• H10P50/286

  of organic materials · CPC title

• H10P50/28

  of insulating materials · CPC title

• H10P34/42

  with electromagnetic radiation, e.g. laser annealing (laser cutting H10P54/20) · CPC title

• H10P14/6342

  Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating · CPC title