Deposition substance monitoring device and vacuum pump
US-10415577-B2 · Sep 17, 2019 · US
US10875192B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10875192-B2 |
| Application number | US-201815899789-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 20, 2018 |
| Priority date | Jul 25, 2017 |
| Publication date | Dec 29, 2020 |
| Grant date | Dec 29, 2020 |
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According to one embodiment, transfer equipment includes: a first negative-pressure generation source; a plurality of first vacuum suction parts; a sensor part; and a first determination circuit. The sensor part configured to acquire a plurality of measured values corresponding to the negative pressure of each of the first vacuum suction parts. The first determination circuit configured to set a first threshold value based on the measured values and determine a vacuum suction state of the first vacuum suction parts corresponding to the measured valued based on the first threshold value and the measured values.
Opening claim text (preview).
The invention claimed is: 1. A determination method comprising: setting an average value of a plurality of measured values corresponding to negative pressures of internal spaces of a plurality of first vacuum suction parts as a first threshold value; comparing the first threshold value and the measured values; determining a vacuum suction state in which the first vacuum suction parts corresponding to the measured values are adsorbed on an article when the measured values are smaller than the first threshold value; and determining a non-vacuum suction state in which the first vacuum suction parts corresponding to the measured value are not adsorbed on the article when the measured values are larger than the first threshold value. 2. The determination method according to claim 1 , wherein: the measured values include a maximum value and a minimum value in the measured values; and the average value is a weighted average value in which one of the measured values closer to the maximum value has a larger weight and one of the measured values closer to the minimum value has a smaller weight. 3. The determination method according to claim 1 , further comprising the step of determining that the first vacuum suction parts are all in the vacuum suction state or the non-vacuum suction state when an index of variations in the measured values is smaller than a preset second threshold value. 4. The determination method according to claim 1 , wherein the measured values are obtained by previously acquiring the measured values corresponding to the internal spaces of the first vacuum suction parts in the non-vacuum suction state as a plurality of reference values and subtracting the reference values from a plurality of actual measured values corresponding to the internal spaces of the first vacuum suction parts in the vacuum suction state. 5. The determination method according to claim 1 , wherein the measured values are acquired from the first vacuum suction parts located within a target area corresponding to the article. 6. The determination method according to claim 3 , further comprising the step of determining an all non-vacuum suction state in which the first vacuum suction parts are all in the non-vacuum suction state when all the measured values are larger than a preset third threshold value. 7. The determination method according to claim 3 , wherein the step of determining that the first vacuum suction parts are all in the vacuum suction state or the non-vacuum suction state when an index of variations in the measured values is smaller than a preset second threshold value, is performed prior to the step of setting an average value of a plurality of measured values corresponding to negative pressures of internal spaces of a plurality of first vacuum suction parts as a first threshold value, comparing the first threshold value and the measured values, determining a vacuum suction state in which the first vacuum suction parts corresponding to the measured values are adsorbed on an article when the measured values are smaller than the first threshold value, and determining a non-vacuum suction state in which the first vacuum suction imparts corresponding to the measured value are not adsorbed on the article when the measured values are larger than the first threshold value. 8. The determination method according to claim 6 , further comprising the step of determining an all-vacuum suction state in which the first vacuum suction parts are all in the vacuum suction state when all the measured values are smaller than a preset fourth threshold value.
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