Deposition substance monitoring device and vacuum pump

Patent metadata

Field	Value
Publication number	US-10415577-B2
Application number	US-201715694815-A
Country	US
Kind code	B2
Filing date	Sep 3, 2017
Priority date	Sep 6, 2016
Publication date	Sep 17, 2019
Grant date	Sep 17, 2019

Abstract

A deposition substance monitoring device of a vacuum pump for rotatably driving a rotor by a motor to exhaust gas, comprises: a state determination section configured to determine whether or not the vacuum pump is in a predetermined exhaust state; and a deposition amount determination section configured to receive a deposition amount indicator for an amount of a deposition substance in the pump to determine as excessive deposition when the deposition amount indicator in the predetermined exhaust state is equal to or greater than an acceptable deposition threshold.

First claim

What is claimed is:

1. A deposition substance monitoring device of a vacuum pump for rotatably driving a rotor by a motor to exhaust gas, comprising:
a state determination section configured to determine each particular exhaust state, among a plurality of different exhaust states, the vacuum pump is in; and
a deposition amount determination section configured to receive a deposition amount indicator for an amount of a deposition substance in the pump to determine as excessive deposition when the deposition amount indicator in the determined each particular exhaust state is equal to or greater than an acceptable deposition threshold.

2. The deposition substance monitoring device according to claim 1 , wherein
the plurality of different exhaust states include a gas supply state in which gas flows into the vacuum pump and a gas non-supply state in which no gas flows into the vacuum pump.

3. A deposition substance monitoring device of a vacuum pump for rotatably driving a rotor by a motor to exhaust gas, comprising:
a state determination section configured to determine whether or not the vacuum pump is in a predetermined exhaust state; and
a deposition amount determination section configured to receive a deposition amount indicator for an amount of a deposition substance in the pump to determine as excessive deposition when the deposition amount indicator in the predetermined exhaust state is equal to or greater than an acceptable deposition threshold,
wherein
the predetermined exhaust state is any one of a gas supply state in which gas flows into the vacuum pump and a gas non-supply state in which no gas flows into the vacuum pump,
any one of a motor current value of the motor and an opening degree of a valve provided on a suction port side of the vacuum pump is used as the deposition amount indicator, and
the state determination section determines the gas supply state and the gas non-supply state based on any one of the motor current value and the opening degree of the valve.

4. A deposition substance monitoring device of a vacuum pump for rotatably driving a rotor by a motor to exhaust gas, comprising:
an acquiring section configured to acquire a first motor current value in a predetermined gas supply state in which gas flows into the vacuum pump and a second motor current value in a gas non-supply state right before or after the predetermined gas supply state; and
a determination section configured to determine that a deposition amount of a deposition substance in the vacuum pump is excessive when a difference between the first motor current value and the second motor current value is equal to or greater than a predetermined threshold.

5. A vacuum pump comprising:
a rotor;
a motor configured to rotatably drive the rotor; and
the deposition substance monitoring device according to claim 1 .

6. A vacuum pump comprising:
a rotor;
a motor configured to rotatably drive the rotor; and
the deposition substance monitoring device according to claim 4 .

Assignees

• Shimadzu Corp

Inventors

• Tsubokawa Tetsuya

Classifications

• F04D19/042

  Turbomolecular vacuum pumps · CPC title

• F04D19/04 Primary

  specially adapted to the production of a high vacuum, e.g. molecular pumps · CPC title

• F04D17/12

  Multi-stage pumps · CPC title

• F04D17/168

  Pumps specially adapted to produce a vacuum · CPC title

• G01R19/16533

  characterised by the application · CPC title