Temperature compensation and operational configuration for bulk acoustic wave resonator devices

Patent metadata

Field	Value
Publication number	US-10866216-B2
Application number	US-201615380482-A
Country	US
Kind code	B2
Filing date	Dec 15, 2016
Priority date	Dec 15, 2015
Publication date	Dec 15, 2020
Grant date	Dec 15, 2020

Abstract

Operational configuration and temperature compensation methods are provided for bulk acoustic wave (BAW) resonator devices suitable for operating with liquids. Temperature compensation methods dispense with a need for temperature sensing, instead utilizing a relationship between (i) change in frequency of a BAW resonator at a phase with adequate sensitivity and (ii) change in frequency of a phase that is correlated to temperature. Operational configuration methods include determination of an initial phase response of a BAW resonator in which temperature coefficient of frequency is zero, followed by comparison of sensitivity to a level of detection threshold for a phenomenon of interest.

First claim

What is claimed is:

1. A sensing method utilizing a bulk acoustic wave (BAW) resonator, the sensing method comprising:
applying an AC signal to the BAW resonator;
obtaining a raw S-parameter response signal from the BAW resonator, wherein the raw S-parameter response signal includes a first phase of measurement and a second phase of measurement; and
temperature correcting the raw S-parameter response signal, wherein the temperature correction utilizes a functional relationship between (i) a first change in frequency of the BAW resonator at the first phase of measurement and (ii) a second change in frequency of the BAW resonator at the second phase of measurement, wherein the second change in frequency is correlated to temperature, and wherein the temperature correction does not require use of a temperature measurement when the raw S-parameter response signal is obtained.

2. The sensing method of claim 1 , wherein each of the first phase of measurement and the second phase of measurement comprises at least one of: phase of S11, phase of admittance, or phase of impedance.

3. The sensing method of claim 1 , wherein the functional relationship comprises a ratio between (i) the first change in frequency of the BAW resonator at the first phase of measurement and (ii) the second change in frequency of the BAW resonator at the second phase of measurement.

4. The sensing method of claim 1 , wherein the first phase of measurement corresponds to a frequency of response of the BAW resonator in which a temperature coefficient of frequency is positive, and the second phase of measurement corresponds to a frequency of response of the BAW resonator in which the temperature coefficient of frequency is negative.

5. The sensing method of claim 1 , wherein the first phase of measurement is performed at a phase angle where the BAW resonator exhibits non-zero sensitivity to a phenomenon of interest.

6. The sensing method of claim 5 , wherein the phenomenon of interest comprises pressure in an environment containing an active region of the BAW resonator.

7. The sensing method of claim 5 , wherein the phenomenon of interest comprises binding of mass on or over an active region of the BAW resonator.

8. The sensing method of claim 5 , wherein the phenomenon of interest comprises density of a fluid medium arranged on or over an active region of the BAW resonator.

9. The sensing method of claim 5 , wherein the phenomenon of interest comprises viscosity of a fluid medium arranged on or over an active region of the BAW resonator.

10. The sensing method of claim 1 , further comprising supplying a fluid containing an analyte to a fluidic passage of a fluidic device containing an active region of the BAW resonator, wherein at least one functionalization material is arranged over at least a portion of the active region, and said supplying is configured to cause at least some of the analyte to bind to the at least one functionalization material.

11. The sensing method of claim 10 , wherein the applying of the AC signal to the BAW resonator induces a bulk acoustic wave in the active region, and the obtaining of the raw S-parameter response signal is used to sense at least one of an amplitude-magnitude property, a frequency property, or a phase property of the BAW resonator to indicate at least one of presence or quantity of analyte bound to the at least one functionalization material.

12. The sensing method of claim 10 , wherein the BAW resonator comprises a piezoelectric material including a c-axis having an orientation distribution that is predominantly non-parallel to normal of a face of a substrate, and the applying of the AC signal to the BAW resonator induces a bulk acoustic wave having dominant shear response in the active region.

13. The method of claim 1 , further comprising identifying a phase of measurement at which a change in frequency correlates to temperature and assigning the identified phase of measurement as the second phase of measurement.

14. A non-transitory computer readable medium containing program instructions for execution by at least one processor of a computer system to cause the computer system to perform the following steps:
obtaining, by the computer system, a raw S-parameter response signal from a bulk acoustic wave (BAW) resonator generated upon application of an AC signal to the BAW resonator, wherein the raw S-parameter response signal includes a first phase of measurement and a second phase of measurement; and
temperature correcting the raw S-parameter response signal, wherein the temperature correction utilizes a functional relationship between (i) a first change in frequency of the BAW resonator at the first phase of measurement and (ii) a second change in frequency of the BAW resonator at the second phase of measurement, wherein the second change in frequency is correlated to temperature, and wherein the temperature correction does not require use of a temperature measurement when the raw S-parameter response signal is obtained.

15. The non-transitory computer readable medium of claim 14 , wherein each of the first phase of measurement and the second phase of measurement comprises at least one of: phase of S11, phase of admittance, or phase of impedance.

16. The non-transitory computer readable medium of claim 14 , wherein the functional relationship comprises a ratio between (i) the first change in frequency of the BAW resonator at the first phase of measurement and (ii) the second change in frequency of the BAW resonator at the second phase of measurement.

17. The non-transitory computer readable medium of claim 14 , wherein the first phase of measurement corresponds to a frequency of response of the BAW resonator in which a temperature coefficient of frequency is positive, and the second phase of measurement corresponds to a frequency of response of the BAW resonator in which the temperature coefficient of frequency is negative.

18. The non-transitory computer readable medium of claim 14 , wherein the first phase of measurement is performed at a phase angle where the BAW resonator exhibits non-zero sensitivity to a phenomenon of interest.

19. The non-transitory computer readable medium of claim 14 , wherein the phenomenon of interest comprises at least one of: pressure in an environment containing an active region of the BAW resonator, binding of mass on or over an active region of the BAW resonator, density of a fluid medium arranged on or over an active region of the BAW resonator, or viscosity of a fluid medium arranged on or over an active region of the BAW resonator.

20. The non-transitory computer readable medium of claim 14 , wherein the program instructions further cause the computer system to identify a phase of measurement at which a change in frequency correlates to temperature and assigning the identified phase of measurement as the second phase of measurement.

Assignees

• Qorvo Us Inc
• Qorvo Biotechnologies Llc

Inventors

• Morton Rick
• Mccarron Kevin

Classifications

• B01L3/502761

  specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads or physically stretching molecules · CPC title

• H03H9/175

  Acoustic mirrors · CPC title

• G01N2291/0426

  Bulk waves, e.g. quartz crystal microbalance, torsional waves · CPC title

• H03H9/17

  having a single resonator (crystal tuning forks H03H9/21) · CPC title

• G01N29/024

  by measuring propagation velocity or propagation time of acoustic waves · CPC title