Capping structure to reduce dark current in image sensors

Patent metadata

Field	Value
Publication number	US-10861896-B2
Application number	US-201816047455-A
Country	US
Kind code	B2
Filing date	Jul 27, 2018
Priority date	Jul 27, 2018
Publication date	Dec 8, 2020
Grant date	Dec 8, 2020

Abstract

In some embodiments, a semiconductor device is provided. The semiconductor device includes an epitaxial structure having a group IV chemical element disposed in a semiconductor substrate, where the epitaxial structure extends into the semiconductor substrate from a first side of the semiconductor substrate. A photodetector is at least partially arranged in the epitaxial structure. A first capping structure having a first capping structure chemical element that is different than the first group IV chemical element covers the epitaxial structure on the first side of the semiconductor substrate. A second capping structure is arranged between the first capping structure and the epitaxial structure, where the second capping structure includes the group IV chemical element and the first capping structure chemical element.

First claim

What is claimed is:

1. A semiconductor device, comprising:
an epitaxial structure comprising a first group IV chemical element disposed in a semiconductor substrate, wherein the epitaxial structure extends into the semiconductor substrate from a first side of the semiconductor substrate;
a photodetector at least partially disposed in the epitaxial structure;
a first capping structure comprising a first capping structure chemical element different than the first group IV chemical element and covering the epitaxial structure on the first side of the semiconductor substrate;
a second capping structure disposed between the first capping structure and the epitaxial structure, wherein the second capping structure comprises the first group IV chemical element and the first capping structure chemical element, wherein the first capping structure chemical element comprises a second group IV chemical element different than the first group IV chemical element, and wherein the first group IV chemical element is germanium and the second group IV chemical element is silicon; and
a first patterned dielectric layer disposed on the semiconductor substrate, wherein the first patterned dielectric layer contacts opposing sidewalls of the epitaxial structure, and wherein a lower surface of the first patterned dielectric layer is disposed between a lower surface of the second capping structure and the first side of the semiconductor substrate.

2. The semiconductor device of claim 1 , wherein the second capping structure has a thickness between about 5 nanometer (nm) and about 25 nm.

3. The semiconductor device of claim 1 , wherein a concentration of the first group IV chemical element in the second capping structure is between about 20 percent and about 70 percent.

4. The semiconductor device of claim 3 , wherein the concentration of the first group IV chemical element in the second capping structure is substantially the same from the lower surface of the second capping structure to an upper surface of the second capping structure.

5. The semiconductor device of claim 1 , wherein a concentration of the first group IV chemical element in the second capping structure increases from the lower surface of the second capping structure to an upper surface of the second capping structure.

6. The semiconductor device of claim 5 , wherein near the lower surface of the second capping structure a first concentration of the first group IV chemical element is about 1 percent and near the upper surface of the second capping structure a second concentration of the first group IV chemical element is about 99 percent.

7. The semiconductor device of claim 6 , wherein the upper surface of the second capping structure contacts the epitaxial structure and the lower surface of the second capping structure contacts the first capping structure.

8. The semiconductor device of claim 1 , further comprising:
a second patterned dielectric layer disposed on the first capping structure, wherein the first capping structure separates the second patterned dielectric layer from the second capping structure.

9. A semiconductor device, comprising:
an epitaxial structure comprising a first group IV chemical element disposed in a semiconductor substrate, wherein the epitaxial structure extends into the semiconductor substrate from a front-side of the semiconductor substrate;
a photodetector at least partially disposed in the epitaxial structure, wherein the photodetector comprises a first doped region and a second doped region at least partially disposed in the epitaxial structure and laterally spaced, wherein the first doped region comprises a first doping type and the second doped region comprises a second doping type different than the first doping type;
a first capping structure comprising a first capping structure chemical element different than the first group IV chemical element and covering the epitaxial structure on the front-side of the semiconductor substrate;
a second capping structure disposed between the first capping structure and the epitaxial structure, wherein the second capping structure comprises the first group IV chemical element and the first capping structure chemical element; and
a first patterned dielectric layer disposed on the semiconductor substrate, wherein the first patterned dielectric layer contacts opposing sidewalls of the epitaxial structure, and wherein a lower surface of the first patterned dielectric layer is disposed between a lower surface of the second capping structure and the front-side of the semiconductor substrate.

10. The semiconductor device of claim 9 , wherein the first doped region and the second doped region both extend beneath the epitaxial structure into the second capping structure and the first capping structure.

11. The semiconductor device of claim 9 , further comprising:
a second patterned dielectric layer disposed on the first capping structure, wherein the first capping structure separates the second patterned dielectric layer from the second capping structure; and
a contact etch stop layer (CESL) disposed on the second patterned dielectric layer, wherein the second patterned dielectric layer separates the first capping structure from a first upper surface of the CESL, and wherein a second upper surface of the CESL is disposed between sides of the first doped region and disposed between the first upper surface of the CESL and the epitaxial structure.

12. The semiconductor device of claim 9 , further comprising:
a first silicide structure disposed on the first doped region;
a second silicide structure disposed on the second doped region;
a second patterned dielectric layer disposed on the first capping structure and between the first silicide structure and the second silicide structure, wherein an upper surface of the first silicide structure and an upper surface of the second silicide structure are both disposed between an upper surface of the second patterned dielectric layer and the epitaxial structure; and
a contact etch stop layer (CESL) disposed on the first silicide structure, the second silicide structure, and the second patterned dielectric layer, wherein the CESL contacts a lower surface of the first silicide structure, a lower surface of the second silicide structure, and a lower surface of the second patterned dielectric layer.

13. The semiconductor device of claim 9 , wherein sidewalls of the first capping structure are substantially aligned with sidewalls of the second capping structure.

14. The semiconductor device of claim 9 , wherein sidewalls of the second capping structure are substantially aligned with sidewalls of the epitaxial structure.

15. The semiconductor device of claim 14 , wherein sidewalls of the first capping structure are respectively disposed beyond the sidewalls of the second capping structure.

16. The semiconductor device of claim 9 , wherein the first capping structure chemical element comprises a second group IV chemical element different than the first group IV chemical element.

17. The semiconductor device of claim 16 , wherein the first group IV chemical element is germanium and the second group IV chemical element is silicon.

18. A method for forming a semiconductor device, the method comprising:
forming a trench in a semiconductor substrate, wherein the trench extends into the semiconductor substrate from a front-side of the semiconductor substrate;
forming an epitaxial structure in the trench, wherein the epitaxial structure comprises a group IV chemical element;
forming a first capping structure on the

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Liu Po-Chun
• Yu Chung-Yi
• Chen Eugene

Classifications

• H10F39/189

  X-ray, gamma-ray or corpuscular radiation imagers · CPC title

• H10F39/805

  Coatings · CPC title

• H10F39/024 Primary

  of coatings or optical elements · CPC title

• H10F39/811

  Interconnections · CPC title

• H10F39/018

  of hybrid image sensors · CPC title