Wafer boat cooldown device

Patent metadata

Field	Value
Publication number	US-10858738-B2
Application number	US-201916366202-A
Country	US
Kind code	B2
Filing date	Mar 27, 2019
Priority date	Mar 29, 2018
Publication date	Dec 8, 2020
Grant date	Dec 8, 2020

Abstract

A wafer boat cooldown device comprising a bottom plate and a rotatable table that is rotatable between a number of index positions. The rotatable table comprises at least two wafer boat positions for supporting a wafer boat. A vertically extending wall structure is mounted on the rotatable table and creates, at each wafer boat position, a wafer boat chamber having a gas supply area and a gas discharge area. The wafer boat cooldown device further comprises a plenum chamber which extends under the bottom plate. The plenum chamber accommodates at least one gas/liquid heat exchanger.

First claim

The invention claimed is:

1. A wafer boat cooldown device, configured to be positioned under a process chamber of a vertical batch furnace for processing wafers accommodated in a wafer boat, wherein the wafer boat cooldown device comprises:
a bottom plate;
a rotatable table comprising at least two wafer boat positions for supporting the wafer boat, the rotatable table being rotatable above the bottom plate around a central vertical axis; and
a vertically extending wall structure mounted on the rotatable table and creating, at each wafer boat position, a vertically extending wafer boat chamber,
wherein the vertically extending wall structure comprises:
a gas supply area comprising a plurality of gas supply openings; and
a gas discharge area comprising a plurality of gas discharge openings,
wherein the wafer boat cooldown device further comprises:
a duct which extends through a central gas opening in the bottom plate and is in fluid communication with the plurality of gas supply openings or the plurality of discharge openings,
wherein the bottom plate has a number of bottom plate openings which, when the rotatable table is in one of a number of index positions, are in fluid communication with the plurality of gas supply openings or the plurality of discharge openings,
wherein the wafer boat cooldown device further comprises:
a plenum chamber housing having plenum chamber walls which create a plenum chamber which extends under the bottom plate, at least partially around the duct, wherein the number of bottom plate openings in the bottom plate are in fluid communication with the plenum chamber, and wherein the plenum chamber has at least one plenum chamber opening;
a recirculation channel extending from the at least one plenum chamber opening to the duct and comprising at least one gas blower; and
at least one gas/liquid heat exchanger positioned in the plenum chamber.

2. The wafer boat cooldown device according to claim 1 , wherein the at least one gas/liquid heat exchanger is configured for cooling gas which is discharged from at least one of the vertically extending wafer boat chambers.

3. The wafer boat cooldown device according to claim 1 , wherein the plenum chamber housing includes at least one heat exchanger housing, wherein the at least one gas/liquid heat exchanger is accommodated in an associated one of the at least one heat exchanger housing, and wherein the at least one plenum chamber opening is provided in the at least one heat exchanger housing, so that gas which is discharged from at least one of the vertically extending wafer boat chambers flows along the at least one gas/liquid heat exchanger when flowing to the recirculation channel or to the number of bottom plate openings.

4. The wafer boat cooldown device according to claim 3 , wherein the the at least one heat exchanger housing includes two heat exchanger housings, wherein each of the two heat exchanger housings accommodates a gas/liquid heat exchanger, and wherein each of the two heat exchanger housings is provided with one of said at least one plenum chamber openings.

5. The wafer boat cooldown device according to claim 1 , wherein the plurality of gas supply openings are distributed in the vertically extending wall structure at least along a vertical direction over substantially an entire height of the vertically extending wall structure.

6. The wafer boat cooldown device according to claim 1 , wherein the plurality of gas discharge openings are distributed in the vertically extending wall structure at least along a vertical direction over substantially an entire height of the vertically extending wall structure.

7. The wafer boat cooldown device according to claim 1 , wherein for each wafer boat chamber the gas supply area is opposite the gas discharge area, so that gas supplied via the plurality of gas supply openings to the respective wafer boat chamber substantially horizontally crosses the wafer boat chamber when flowing to the plurality of gas discharge openings of the associated wafer boat chamber.

8. The wafer boat cooldown device according to claim 1 , further comprising:
a gas supply duct, which fluidly connects either the duct or the bottom plate openings with the plurality of gas supply openings, the plurality of gas supply openings fluidly connecting the associated gas supply duct with the respective vertically extending wafer boat chamber; and
a gas discharge duct, which fluidly connects the other one of either the duct and the bottom plate openings with the plurality of gas discharge openings, the plurality of gas discharge openings fluidly connecting the associated gas discharge duct with the respective vertically extending wafer boat chamber.

9. The wafer boat cooldown device according to claim 8 , wherein the vertically extending wall structure additionally bounds at least one vertically extending gas supply channel thus forming the gas supply duct, and wherein the vertically extending wall structure bounds at least one vertically extending gas discharge channel thus forming the gas discharge duct.

10. The wafer boat cooldown device according to claim 1 , wherein one of the vertically extending wafer boat chambers is associated with a wafer boat lift having a vertically moveable lift support member, wherein the rotatable table has a lift support opening at each wafer boat position through which the lift support member can pass the rotatable table for accommodating the lift support member in a space between a lower side of the rotatable table and an upper side of the bottom plate.

11. The wafer boat cooldown device according to claim 1 , further comprising:
a stationary support frame; and
a rotatable table bearing having an inner race which is fixedly connected to the duct, and having an outer race which is fixedly connected to the stationary support frame,
wherein the duct is fixedly connected to the rotatable table and forms a support for the rotatable table.

12. The wafer boat cooldown device according to claim 1 , further comprising a main housing having a circumferential wall and a top wall, wherein the bottom plate forms a bottom wall of the main housing.

13. The wafer boat cooldown device according to claim 12 , wherein the main housing further comprises at least one transfer opening for transferring wafers to and from a wafer boat within one of the vertically extending wafer boat chambers.

14. The wafer boat cooldown device according to claim 1 , wherein the duct is fixedly connected to the rotatable table, wherein a first gas seal is provided between the duct and the bottom plate, and wherein a second gas seal is provided between the duct and the recirculation channel.

15. The wafer boat cooldown device according to claim 14 , wherein the first gas seal and the second gas seal are the only two gas seals present in the wafer boat cooldown device for creating a gas tight connection between rotating parts of the wafer boat cooldown device and stationary parts of the wafer boat cooldown device.

16. The wafer boat cooldown device according to claim 1 , wherein the gas supply area of each vertically extending wafer boat chamber is provided with a filter assembly so that gas supplied via the plurality of gas supply openings to the respective vertically extending wafer boat chamber must pass said filter assembly.

17. The wafer boat cooldown device according to claim 1 , wherein the rotatable table has three wafer boat positions with corresponding vertically extending wafer boat chambers, wherein the rotatable table is indexable over angles of 120°,
wherein a first index positi

Assignees

• Asm Int Nv

Inventors

• De Ridder Chris G M
• Jdira Lucian C
• Lindeboom Bartholomeus Hans Louis

Classifications

• H10P72/14

  Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls · CPC title

• H10P72/12

  Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements · CPC title

• H10P72/0434 Primary

  mainly by convection · CPC title

• H10P72/04 Primary

  Apparatus for manufacture or treatment · CPC title

• C23C16/4588

  the substrate being rotated · CPC title