Piezoelectric thin film resonator and method of fabricating the same
US-2016353221-A1 · Dec 1, 2016 · US
US10856086B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10856086-B2 |
| Application number | US-201816499553-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 29, 2018 |
| Priority date | Apr 3, 2017 |
| Publication date | Dec 1, 2020 |
| Grant date | Dec 1, 2020 |
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A piezoelectric sounding element includes a diaphragm made of metal and a piezoelectric element provided on at least one surface of the diaphragm. A non-fixed portion of the diaphragm includes the pair of long sides facing each other, a pair of short sides, shorter than the long sides, that face each other, and a pair of recesses, provided in the pair of long sides, that protrude so as to approach each other. The piezoelectric element is provided in a region between the pair of recesses of the diaphragm and the contour shapes of the non-fixed portion of the diaphragm and the piezoelectric element are defined so as to be symmetric with respect to a first imaginary line that bisects the pair of short sides and symmetric with respect to a second imaginary line that bisects the pair of long sides.
Opening claim text (preview).
The invention claimed is: 1. A piezoelectric acoustic component comprising: a piezoelectric sounding element including a diaphragm made of metal and a piezoelectric element provided on at least one surface of the diaphragm; and a case that fixes an outer peripheral portion of the diaphragm of the piezoelectric sounding element across an entire circumference, forms a first space and a second space on both sides of the piezoelectric sounding element, and configures a resonator by a volume of the first space and one or more sound emission holes formed in a wall portion facing the first space, wherein a non-fixed portion located inside the outer peripheral portion of the diaphragm includes a pair of long sides that face each other, a pair of short sides, shorter than the long sides, that face each other, and a pair of recesses, provided in the pair of long sides, that protrude in a direction approaching each other, the piezoelectric element is provided in a region between the pair of recesses of the non-fixed portion of the diaphragm, both a contour shape of the diaphragm and a contour shape of the piezoelectric element are defined so as to be symmetric with respect to a first imaginary line that bisects the pair of short sides and symmetric with respect to a second imaginary line that bisects the pair of long sides, ratio L1/W1 of length L1 of the long sides to length W1 of the short sides of the non-fixed portion of the diaphragm is defined so as to fall within a range from 1.25 to 1.75, and the resonator is configured such that sound pressures at a primary resonance frequency, a tertiary resonance frequency, and an intermediate frequency between the primary resonance frequency and the tertiary resonance frequency when a sine wave signal is input as an input signal are 80 dB or more. 2. The piezoelectric acoustic component according to claim 1 , wherein the resonator is configured such that the sound pressure at the intermediate frequency is equal to or higher than the sound pressure at the primary resonance frequency and the sound pressure at the tertiary resonance frequency. 3. The piezoelectric acoustic component according to claim 1 , wherein the resonator is configured such that a minimum sound pressure between the primary resonance frequency and the intermediate frequency and a minimum sound pressure between the intermediate frequency and the tertiary resonance frequency are 80 dB or more. 4. The piezoelectric acoustic component according to claim 1 , wherein the case includes a sounding element holder having an opening with the same shape as a contour shape of the non-fixed portion of the diaphragm and fixes the outer peripheral portion of the diaphragm. 5. The piezoelectric acoustic component according to claim 1 , wherein each of the pair of short sides has, in both end portions, a pair of inclined portions inclined so as to approach each other. 6. The piezoelectric acoustic component according to claim 1 , wherein the piezoelectric element is provided on a back surface of the diaphragm. 7. The piezoelectric acoustic component according to claim 1 , wherein each of the recesses of the non-fixed portion of the diaphragm includes a parallel straight line portion extending in parallel with the first imaginary line and a pair of inclined straight line portions extending away from both end portions of the parallel straight line portion to corresponding remaining portions of one of the long sides and an outline of the piezoelectric element includes a pair of straight line portions along the parallel straight line portions of each of the pair of recesses and a pair of curved portions each of which is curved so as to protrude toward the pair of the short sides in a region sandwiched between the two inclined straight line portions of the pair of recesses facing each other in a direction in which the second imaginary line extends. 8. The piezoelectric acoustic component according to claim 1 , wherein each of the recesses of the non-fixed portion of the diaphragm includes a parallel straight line portion extending in parallel with the second imaginary line and a pair of protruding curved portions that extend away from both end portions of the parallel straight line portion and are curved so as to protrude toward the recess, and an outline of the piezoelectric element includes a pair of straight line portions along the parallel straight line portions of the pair of recesses and curved portions each of which is curved so as to protrude toward the pair of the short sides in a region sandwiched between the two protruding curved portions of the pair of recesses facing each other in a direction in which the second imaginary line extends. 9. The piezoelectric acoustic component according to claim 1 , wherein each of the recesses of the non-fixed portion of the diaphragm is a curved recess curved so as to protrude toward the first imaginary line and an outline of the piezoelectric element has curved portions curved so as to protrude toward the pair of short sides in a region sandwiched between the pair of curved recesses along the pair of curved recesses. 10. The piezoelectric acoustic component according to claim 2 , wherein the non-fixed portion of the diaphragm is formed by an alloy plate having a thickness of 10 μm to 150 μm in which nickel is mixed with iron, the piezoelectric element has a structure in which a plurality of PZT ceramic layers each having a thickness of 10 μm to 35 μm is stacked, and an acrylic adhesive for bonding the piezoelectric element to the diaphragm has a Shore D hardness of 75 to 85 and a thickness of 1 μm to 10 μm. 11. A piezoelectric acoustic component comprising: a piezoelectric sounding element including a diaphragm made of metal and a piezoelectric element provided on at least one surface of the diaphragm; and a case that fixes an outer peripheral portion of the diaphragm of the piezoelectric sounding element across an entire circumference, forms a first space and a second space on both sides of the piezoelectric sounding element, and configures a resonator in which one or more sound emission holes are formed in a wall portion facing the first space, wherein a non-fixed portion located inside the outer peripheral portion of the diaphragm includes a pair of long sides that face each other, a pair of short sides, shorter than the long sides, that face each other, and a pair of recesses, provided in the pair of long sides, that protrude so as to approach each other, the piezoelectric element is provided in a region between the pair of recesses of the non-fixed portion of the diaphragm, both a contour shape of the diaphragm and a contour shape of the piezoelectric element are defined so as to be symmetric with respect to a first imaginary line that bisects the pair of short sides and symmetric with respect to a second imaginary line that bisects the pair of long sides, ratio L1/W1 of length L1 of the long sides to length W1 of the short sides is defined so as to fall within a range from 1.25 to 1.75, ratio L2/L1 of length L2 of an opening opened in the long sides of the recesses of the non-fixed portion of the diaphragm to length L1 of the long sides is 0.4 to 0.7 and ratio W2/W1 of dimension W2 between the pair of recesses in the direction toward the second imaginary line to the length W1 of the short sides is 0.4 to 0.95, and a total opening area of the one or more sound emission holes and an air chamber capacity of the resonator are defined such that sound pressures at a primary resonance frequency, a tertiary resonance frequency, and an intermediate frequency between the primary resonance frequency and the tertiary resonance frequency when a
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