Method and apparatus for load-locked printing

Patent metadata

Field	Value
Publication number	US-10851450-B2
Application number	US-201715409844-A
Country	US
Kind code	B2
Filing date	Jan 19, 2017
Priority date	Jun 13, 2008
Publication date	Dec 1, 2020
Grant date	Dec 1, 2020

Abstract

The disclosure relates to a method and apparatus for preventing oxidation or contamination during a circuit printing operation. The circuit printing operation can be directed to OLED-type printing. In an exemplary embodiment, the printing process is conducted at a load-locked printer housing having one or more of chambers. Each chamber is partitioned from the other chambers by physical gates or fluidic curtains. A controller coordinates transportation of a substrate through the system and purges the system by timely opening appropriate gates. The controller may also control the printing operation by energizing the print-head at a time when the substrate is positioned substantially thereunder.

First claim

What is claimed is:

1. A method for forming a film on a substrate, the method comprising:
receiving a substrate at a substrate-inlet region;
transporting the substrate to a substrate-printing region comprising an inert gas environment;
floating the substrate in the substrate-printing region, wherein the substrate is floated using a substrate floatation system comprising at least one gas inlet port and at least one gas outlet port;
while floating the substrate in the substrate-printing region:
moving the substrate in a first direction and moving the at least one print-head in a second direction, the first and second directions being orthogonal to to each other, and
printing a material on a surface of the substrate with at least one print-head having at least one nozzle,
wherein each of the first and second orthogonal directions is orthogonal to a direction normal to the surface of the substrate the material is printed on;

transporting the substrate away from the substrate-printing region; and
removing the substrate from a substrate-outlet region.

2. The method of claim 1 , wherein the substrate floatation system is configured to provide gas inflow from the at least one gas inlet port and gas outflow from the at least one gas outlet port.

3. The method of claim 1 , wherein the substrate floatation system is configured to float the substrate at a floating height that is a function of gas inflow from the at least one gas inlet port and gas outflow from the at least one gas outlet port.

4. The method of claim 1 , further comprising after receiving a substrate at a substrate-inlet region:
isolating the substrate-inlet region; and,
providing the substrate-inlet region with an inert-gas environment.

5. The method of claim 1 , further comprising after transporting the substrate to a substrate-printing region:
isolating the substrate-printing region.

6. The method of claim 1 , further comprising aligning the substrate along the first direction before printing the material on the substrate.

7. The method of claim 1 , further comprising after transporting the substrate away from the substrate-printing region:
moving the substrate to a substrate-outlet region; and
isolating the substrate-printing region from the substrate-outlet region.

8. The method of claim 1 , wherein the substrate-inlet region and the substrate-outlet region are the same region.

9. The method of claim 1 , wherein said inert-gas environment comprises a non- oxidizing environment.

10. The method of claim 1 , wherein said inert-gas environment comprises a nitrogen- gas environment.

11. The method of claim 1 , wherein a floatation gas used with the substrate floatation system comprises an inert gas.

12. The method of claim 11 , wherein the inert gas is nitrogen.

13. The method of claim 1 , wherein printing the material on the surface of the substrate comprises printing the material in a pattern on the surface of the substrate.

14. The method of claim 13 , wherein the material is printed in a pattern on the surface of the substrate to form an OLED display.

15. The method of claim 1 , wherein said material comprises an organic material.

16. The method of claim 15 , wherein the organic material comprises an OLED material.

17. The method of claim 1 , wherein the print-head comprises an ink chamber in flow communication with a nozzle.

18. The method of claim 1 , wherein the at least one print-head is an inkjet print-head.

19. The method of claim 1 , wherein:
the at least one print-head comprises an energizing element, and
in response to energizing of the energizing element, the at least one print-head is actuated to dispense a metered quantity of ink.

Assignees

• Kateeva Inc

Inventors

• Somekh Sass
• Vronsky Eliyahu
• Madigan Conor F

Classifications

• H10P72/0466

  characterised by the construction of the load-lock chamber · CPC title

• H10P72/36

  using air tracks · CPC title

• B41J2/16523

  Waste ink transport from caps or spittoons, e.g. by suction (Collecting or collectors of waste ink B41J2/1721) · CPC title

• B41J2/16508

  connected with the printer frame · CPC title

• C23C4/137 Primary

  Spraying in vacuum or in an inert atmosphere · CPC title