Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures

Patent metadata

Field	Value
Publication number	US-10850973-B2
Application number	US-201916698535-A
Country	US
Kind code	B2
Filing date	Nov 27, 2019
Priority date	Jun 27, 2011
Publication date	Dec 1, 2020
Grant date	Dec 1, 2020

Abstract

A Microelectromechanical systems (MEMS) structure comprises a MEMS wafer. A MEMS wafer includes a handle wafer with cavities bonded to a device wafer through a dielectric layer disposed between the handle and device wafers. The MEMS wafer also includes a moveable portion of the device wafer suspended over a cavity in the handle wafer. Four methods are described to create two or more enclosures having multiple gas pressure or compositions on a single substrate including, each enclosure containing a moveable portion. The methods include: A. Forming a secondary sealed enclosure, B. Creating multiple ambient enclosures during wafer bonding, C. Creating and breaching an internal gas reservoir, and D. Forming and subsequently sealing a controlled leak/breach into the enclosure.

First claim

What is claimed is:

1. A Microelectromechanical Systems (MEMS) structure associated with a MEMS substrate comprising:
a handle substrate of the MEMS substrate with cavities bonded to a device substrate of the MEMS substrate through a dielectric layer disposed between the handle substrate and the device substrate;
a first sealed reservoir having at least a first gas composition or pressure formed between the handle substrate and the device substrate; and
a second substrate bonded to the MEMS substrate via a seal-ring material, wherein at least one sealed enclosure is formed between the MEMS substrate, the second substrate, and the seal-ring material, wherein the at least one sealed enclosure has at least a second gas composition or pressure, and wherein a first sealed enclosure of the at least one sealed enclosure is separated from the first sealed reservoir by a first seal.

2. The MEMS structure of claim 1 , wherein at least a first equilibrium gas composition or pressure is configured to be achieved by connecting the first sealed reservoir with the first sealed enclosure when the first seal is breached.

3. The MEMS structure of claim 2 , further comprising:
a second sealed reservoir having at least a third gas composition or pressure and being separated from a second sealed enclosure of the at least one sealed enclosure by a second seal.

4. The MEMS structure of claim 3 , wherein the second sealed enclosure is located adjacent to the first sealed enclosure in the handle substrate.

5. The MEMS structure of claim 3 , wherein at least a second equilibrium gas composition or pressure is configured to be achieved by connecting the second sealed reservoir with the second sealed enclosure when the second seal is breached.

6. The MEMS structure of claim 1 , wherein the first seal comprises a silicon membrane.

7. The MEMS structure of claim 6 , wherein the first seal is located in a flow channel between the first sealed reservoir and the first sealed enclosure.

8. The MEMS structure of claim 6 , wherein the flow channel is located in at least one of the device substrate adjacent to the first sealed reservoir or the handle substrate between the first sealed reservoir and the first sealed enclosure.

9. The MEMS structure of claim 1 , wherein the second substrate comprises a complementary metal oxide semiconductor (CMOS) substrate.

10. The MEMS structure of claim 9 , wherein the CMOS substrate is bonded to the device substrate of the MEMS substrate via a eutectic bond.

11. The MEMS structure of claim 10 , wherein the CMOS substrate is bonded to the device substrate via the eutectic bond between a germanium layer of the device substrate and a top metal aluminum layer of the CMOS substrate.

12. The MEMS structure of claim 10 , wherein the seal-ring material is comprised of at least a portion of the eutectic bond between the germanium layer of the device substrate and the top metal aluminum layer of the CMOS substrate.

13. A method, comprising:
bonding a handle wafer with at least one reservoir and a plurality of cavities with a device wafer, thereby forming a Microelectromechanical Systems (MEMS) substrate with the at least one reservoir, wherein the at least one reservoir has at least a first gas composition or pressure;
bonding the MEMS substrate with a second substrate, thereby forming at least one enclosure, wherein the at least one enclosure is defined by the MEMS substrate, the second substrate, and a seal-ring between the MEMS substrate and the second substrate, and wherein the at least one enclosure has at least a second gas composition or pressure created during the bonding; and
achieving at least an equilibrium gas composition or pressure between the at least one reservoir and the at least one enclosure by breaching a seal between the at least one reservoir and the at least one enclosure.

14. The method of claim 13 , further comprising:
thinning a portion of the device wafer before bonding the MEMS substrate with the second substrate.

15. The method of claim 14 , further comprising:
sealing the portion of the device layer adjacent to the at least one reservoir where it is thinned to create the seal.

16. The method of claim 1 , further comprising:
sealing a portion of the handle wafer between the at least one reservoir and the at least one enclosure to create the seal.

17. The method of claim 13 , wherein the breaching the seal between the at least one reservoir and the at least one enclosure comprises at least one of laser ablation or Joule heating.

18. The method of claim 13 , wherein the bonding the MEMS substrate with the second substrate comprises bonding the MEMS substrate with a complementary metal oxide semiconductor (CMOS) substrate.

19. The method of claim 18 , wherein the bonding the MEMS substrate comprises at least one of eutectic bonding the MEMS substrate with the second substrate or eutectic bonding a germanium layer of the MEMS substrate to a top metal aluminum layer of the CMOS substrate.

Assignees

• Invensense Inc

Inventors

• Daneman Michael
• Lim Martin
• Huang Kegang
• Tchertkov Igor

Classifications

• B81B7/02 Primary

  containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] (B81B7/04 takes precedence) · CPC title

• B81C1/0023

  Packaging together an electronic processing unit die and a micromechanical structure die (MEMS packages B81B7/0032; MEMS packaging processes B81C1/00261) · CPC title

• B81C2203/019

  characterised by the material or arrangement of seals between parts · CPC title

• B81C2203/0145

  Hermetically sealing an opening in the lid · CPC title

• B81C1/00293

  maintaining a controlled atmosphere with processes not provided for in B81C1/00285 · CPC title