Pressure-type flow control device and flow control method
US-2020033895-A1 · Jan 30, 2020 · US
Pressure-type flow rate control device
US10838435B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10838435-B2 |
| Application number | US-201716317692-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 25, 2017 |
| Priority date | Jul 28, 2016 |
| Publication date | Nov 17, 2020 |
| Grant date | Nov 17, 2020 |
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- Title
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Abstract
Official abstract text for this publication.
A pressure-type flow rate control device includes a control valve; a pressure sensor provided downstream of the control valve; an orifice-built-in valve provided downstream of the pressure sensor; and a control unit connected to the control valve and pressure sensor. The built-in orifice valve has a valve mechanism comprising a valve seat body and a valve element for opening/closing a flow path; a drive mechanism for driving the valve mechanism, and an orifice member provided in the vicinity of the valve mechanism. The pressure-type flow rate control device further includes an opening/closing-detection mechanism for detecting the open/closed state of the valve mechanism, the control unit being configured to receive a detection signal from the opening/closing-detection mechanism.
First claim
Opening claim text (preview).
The invention claimed is: 1. A pressure-type flow rate control device comprising: a control valve; a pressure sensor provided downstream of the control valve; an orifice-built-in valve provided downstream of the pressure sensor; and a control unit connected to the control valve and the pressure sensor, the pressure-type flow rate control device being configured to control the control valve in accordance with an output from the pressure sensor; wherein, the orifice-built-in valve has a valve mechanism comprising a valve seat body and a valve element for opening/closing a flow path; a drive mechanism for driving the valve mechanism; and an orifice member provided in a vicinity of the valve mechanism; wherein the pressure-type flow rate control device comprises an opening/closing-detection mechanism for detecting an open/closed state of the valve mechanism, the control unit being configured to receive a detection signal from the opening/closing-detection mechanism; and wherein the control unit outputs a flow rate of zero, regardless of an output value of the pressure sensor, when the detection signal from the opening/closing-detection mechanism indicates the orifice-built-in valve is in a closed state. 2. The pressure-type flow rate control device according to claim 1 , wherein the valve mechanism comprises a fluid-operated valve; and the drive mechanism comprises an electromagnetic valve for controlling a supply of a fluid to the fluid-operated valve. 3. The pressure-type flow rate control device according to claim 1 , wherein the opening/closing-detection mechanism comprises a limit switch, and the limit switch can generate an on/off signal in response to a movement of the valve element. 4. The pressure-type flow rate control device according to claim 1 , wherein the control unit detects a gas flow rate passing through the orifice-built-in valve, in accordance with the detection signal from the opening/closing-detection mechanism and an output signal from the pressure sensor.
Assignees
Inventors
Classifications
- G05D7/0635Primary
by action on throttling means (G05D7/0688, G05D7/0694 take precedence) · CPC title
characterised by the use of electric means · CPC title
- G05D7/06Primary
characterised by the use of electric means {(G05D7/005 takes precedence)} · CPC title
Control of liquid pressure · CPC title
with electrical or electro-mechanical indication (G01F1/37 and G01F1/38 take precedence) · CPC title
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Frequently asked questions
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- What does patent US10838435B2 cover?
- A pressure-type flow rate control device includes a control valve; a pressure sensor provided downstream of the control valve; an orifice-built-in valve provided downstream of the pressure sensor; and a control unit connected to the control valve and pressure sensor. The built-in orifice valve has a valve mechanism comprising a valve seat body and a valve element for opening/closing a flow path…
- Who is the assignee on this patent?
- Fujikin Kk
- What technology area does this patent fall under?
- Primary CPC classification G05D7/0635. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Nov 17 2020 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 7 related publications on this page (citations in our corpus or others sharing the same primary CPC).