Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device
US-9841770-B2 · Dec 12, 2017 · US
Pressure-type flow rate control device
US2016349763A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016349763-A1 |
| Application number | US-201415034002-A |
| Country | US |
| Kind code | A1 |
| Filing date | Nov 25, 2014 |
| Priority date | Dec 5, 2013 |
| Publication date | Dec 1, 2016 |
| Grant date | — |
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Abstract
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A pressure-type flow rate controller includes a body provided with a fluid passage which communicates a fluid inlet and a fluid outlet, a control valve for pressure control fixed to the body to open and close the fluid passage, an orifice arranged in the course of the fluid passage on the downstream side of the control valve, and a pressure sensor fixed to the body to detect the internal pressure of the fluid passage between the control valve and the orifice, wherein the fluid passage comprises a first passage portion communicating the control valve and a pressure detection chamber provided on a pressure detection surface of the pressure sensor, and a second passage portion spaced away from the first passage portion and communicating the pressure detection chamber and the orifice.
First claim
Opening claim text (preview).
1 . A pressure-type flow rate control device comprising: a body provided with a fluid passage communicating a fluid inlet and a fluid outlet, a control valve for pressure control fixed to the body to open and close the fluid passage, an orifice arranged in the course of the fluid passage on the downstream side of the control valve for pressure control, and a pressure sensor fixed to the body to detect the internal pressure of the fluid passage between the control valve for pressure contro…
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Electricity · mapped topic
Electricity · mapped topic
- G05D7/0635Primary
Physics · mapped topic
Mechanical Engineering · mapped topic
Mechanical Engineering · mapped topic
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- What does patent US2016349763A1 cover?
- A pressure-type flow rate controller includes a body provided with a fluid passage which communicates a fluid inlet and a fluid outlet, a control valve for pressure control fixed to the body to open and close the fluid passage, an orifice arranged in the course of the fluid passage on the downstream side of the control valve, and a pressure sensor fixed to the body to detect the internal pressu…
- Who is the assignee on this patent?
- Fujikin Kk
- What technology area does this patent fall under?
- Primary CPC classification G05D7/0635. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Thu Dec 01 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 7 related publications on this page (citations in our corpus or others sharing the same primary CPC).