Semiconductor device manufacturing method and semiconductor device manufactured using the same
US-2024395745-A1 · Nov 28, 2024 · US
US10837896B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10837896-B2 |
| Application number | US-201715589661-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 8, 2017 |
| Priority date | Nov 25, 2014 |
| Publication date | Nov 17, 2020 |
| Grant date | Nov 17, 2020 |
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An electronic prepared slide includes: an image sensor that has a light receiving surface and receives, on the light receiving surface, light that has passed through a specimen disposed above the light receiving surface; and a removable nonvolatile transparent film that is disposed on the light receiving surface and seals the light receiving surface.
Opening claim text (preview).
What is claimed is: 1. An electronic prepared slide, comprising: a solid state imaging element that has a light receiving surface and receives, on the light receiving surface, light that has passed through a specimen disposed above the light receiving surface; a transparent member that is removable and nonvolatile and is disposed on the light receiving surface to seal the light receiving surface, wherein the transparent member is a transparent film that seals the light receiving surface; and an encapsulating member that is volatile and is disposed on a surface of the transparent member that is on an opposite side to the light receiving surface of the solid state imaging element, the encapsulating member encapsulating the specimen disposed above the light receiving surface. 2. The electronic prepared slide according to claim 1 , wherein a difference in refractive index between the transparent member and the encapsulating member is 0.2 or less. 3. The electronic prepared slide according to claim 1 , wherein the transparent member is in contact with the encapsulating member without chemically reacting with the encapsulating member. 4. The electronic prepared slide according to claim 3 , wherein the transparent member comprises a material that is insoluble in a dilution/dissolution agent for the encapsulating member. 5. The electronic prepared slide according to claim 4 , wherein the transparent member comprises a material that is insoluble in a xylene or pinene compound-based solvent that is the dilution/dissolution agent. 6. The electronic prepared slide according to claim 1 , wherein the transparent member comprises a water-repellent oil material. 7. The electronic prepared slide according to claim 6 , wherein a space between the light receiving surface and the specimen is filled only with the transparent member. 8. The electronic prepared slide according to claim 1 , further comprising: a transparent substrate that has a first main surface and a second main surface, the first main surface and the second main surface being on opposite sides of the transparent substrate; and a fixing member that fixes the transparent substrate and the solid state imaging element such that the transparent substrate and the solid state imaging element are detachable from each other, wherein the solid state imaging element receives light on the light receiving surface via the transparent member, the light being incident on the first main surface from the second main surface side and passing through the specimen. 9. The electronic prepared slide according to claim 8 , wherein the fixing member includes: a first base member in which an electric interconnect that electrically connects a signal input terminal for transmitting an image signal generated by the solid state imaging element and an external connection terminal that outputs the image signal to outside the electronic prepared slide is formed; and a second base member that is provided with an opening for guiding incident light to the specimen, and the solid state imaging element, the transparent member, the specimen, and the transparent substrate are disposed in this order between the first base member and the second base member, and are fixed by one of the first base member and the second base member latching on the other. 10. An electronic prepared slide assembly method for assembling an electronic prepared slide in which a specimen and a solid state imaging element that images the specimen are fixedly disposed, the method comprising: preparing the specimen; disposing a transparent member between the specimen and a light receiving surface of the solid state imaging element so as to be in contact with the light receiving surface of the solid state imaging element, the transparent member being removable and nonvolatile; detachably fixing the specimen and the solid state imaging element; and disposing an encapsulating member to encapsulate the specimen during a period between the preparing of the specimen and the fixing of the specimen and the solid state imaging element, wherein, in disposing the transparent member, a transparent film that is the transparent member is disposed between (i) the specimen and the encapsulating member and (ii) the light receiving surface of the solid state imaging element so as to be in contact with the light receiving surface of the solid state imaging element. 11. The electronic prepared slide assembly method according to claim 10 , wherein in the preparing of the specimen, the specimen is disposed on a first main surface of a transparent substrate, in the disposing of the encapsulating member, the encapsulating member is disposed on the first main surface of the transparent substrate so as to cover the specimen, in the disposing of the transparent member, the transparent member is disposed on the first main surface of the transparent substrate such that the specimen and the encapsulating member are sandwiched between the transparent member and the transparent substrate, and in the fixing of the specimen and the solid state imaging element, the transparent substrate and the solid state imaging element are detachably fixed such that the transparent member is sandwiched between the light receiving surface of the solid state imaging element and the specimen. 12. The electronic prepared slide assembly method according to claim 11 , wherein in the disposing of the transparent member, a transparent sheet that is a preform for the transparent film is brought into close contact with a portion of the first main surface and the encapsulating member while the transparent film is stretched in a plane direction of the transparent substrate, and thereby the transparent film having a thickness smaller than the transparent sheet is disposed on the first main surface. 13. The electronic prepared slide assembly method according to claim 10 , wherein in the disposing of the transparent member, the transparent film is disposed on the light receiving surface of the solid state imaging element such that the light receiving surface of the solid state imaging element is sealed by a back surface of the transparent film, in the preparing of the specimen, the specimen is disposed on a front surface of the transparent film disposed on the light receiving surface of the solid state imaging element, and in the disposing of the encapsulating member, the encapsulating member is disposed on the front surface of the transparent film so as to cover the specimen. 14. The electronic prepared slide assembly method according to claim 10 , wherein in the disposing of the transparent member, the transparent member is disposed on the light receiving surface of the solid state imaging element such that the light receiving surface of the solid state imaging element is sealed by a back surface of the transparent member comprising a water-repellent oil material, and the specimen is disposed on a front surface of the transparent member.
Interconnections · CPC title
Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes · CPC title
Systems specially adapted for particular applications · CPC title
Arrangements or apparatus for facilitating the optical investigation · CPC title
Electricity · mapped topic
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