Method for capturing dynamic vibrations of a roughness sensor, method for measuring a roughness of a workpiece surface, computer program product and measuring device configured to carry out the methods

Patent metadata

Field	Value
Publication number	US-10837752-B2
Application number	US-201715816921-A
Country	US
Kind code	B2
Filing date	Nov 17, 2017
Priority date	May 20, 2015
Publication date	Nov 17, 2020
Grant date	Nov 17, 2020

Abstract

A method for capturing dynamic vibrations of a roughness sensor of a roughness measuring apparatus is provided. The movement of the roughness sensor relative to the roughness measuring apparatus and/or relative to a surface of a workpiece is captured by a measuring system in the frequency range below 100 Hz with a data capturing rate of greater than 100 Hz. The captured data of the relative movement are made available for further data processing in and/or stored. Moreover, a method for measuring the roughness of a workpiece surface is provided, in which the method for capturing the dynamic vibrations of a roughness sensor is used. In addition, a computer program product for controlling a roughness sensor of a roughness measuring apparatus in accordance with one of the methods is provided, and a roughness measuring device that is configured to carry out one of the methods.

First claim

What is claimed is:

1. A method for capturing dynamic vibrations of a roughness sensor of a roughness measuring apparatus, the method comprising:
(a) capturing data representing a movement of the roughness sensor relative to at least one of the roughness measuring apparatus and relative to a surface of a workpiece to be measured by at least one measuring system with a data capturing rate larger than 100 Hz, and the movement of the roughness sensor being in a frequency range below 100 Hz;
(b) making the captured data of the movement of the roughness sensor available for further data processing; and
(c) storing the data representing the movement of the roughness sensor.

2. The method of claim 1 , wherein the movement of the roughness sensor is captured in a frequency range below 20 Hz with a data capturing rate of greater than 200 Hz.

3. The method of claim 2 , further comprising:
(d) ascertaining characteristics for the movement of the roughness sensor based on a statistical evaluation of the captured data of the movement of the roughness sensor.

4. The method of claim 3 , further comprising:
(e) comparing the ascertained characteristics to predetermined threshold values for the movement of the roughness sensor, and
(f) generating a fault signal if the threshold values are exceeded.

5. A method for measuring a roughness of a workpiece surface by a roughness sensor of a roughness measuring apparatus, the method comprising:
the method for capturing the dynamic vibrations of the roughness sensor of the roughness measuring apparatus according to claim 3 ;
measuring the roughness of a surface portion of the workpiece surface by the roughness sensor; and
subsequently correcting data captured during the measuring of the roughness of the surface portion of the workpiece surface based on the characteristics ascertained simultaneously when capturing the dynamic vibrations of the roughness sensor to generate averaging-corrected roughness measurement values.

6. The method of claim 1 , further comprising:
(d) ascertaining characteristics for the movement of the roughness sensor based on a statistical evaluation of the captured data of the movement of the roughness sensor.

7. The method of claim 6 , further comprising:
(e) comparing the ascertained characteristics to predetermined threshold values for the movement of the roughness sensor, and
(f) generating a fault signal if the threshold values are exceeded.

8. A method for measuring a roughness of a workpiece surface by a roughness sensor of a roughness measuring apparatus, the method comprising:
the method for capturing the dynamic vibrations of the roughness sensor of the roughness measuring apparatus according to claim 6 ;
measuring the roughness of a surface portion of the workpiece surface by the roughness sensor; and
subsequently correcting data captured during the measuring of the roughness of the surface portion of the workpiece surface based on the characteristics ascertained simultaneously when capturing the dynamic vibrations of the roughness sensor to generate averaging-corrected roughness measurement values.

9. The method of claim 8 , further comprising:
ascertaining user information about the roughness of the workpiece surface based on the averaging-corrected roughness measurement values; and
outputting the ascertained user information about the roughness of the workpiece surface.

10. A method for measuring a roughness of a workpiece surface by a roughness sensor of a roughness measuring apparatus, the method comprising:
the method for capturing dynamic vibrations of the roughness sensor of the roughness measuring apparatus according to claim 1 ;
measuring a roughness of a surface portion of the workpiece surface by the roughness sensor; and
subsequently correcting data captured during the measuring of the roughness of the surface portion of the workpiece surface based on the captured data of the movement of the roughness sensor obtained simultaneously when capturing the dynamic vibrations of the roughness sensor to generate corrected roughness measurement values.

11. The method of claim 10 , further comprising:
ascertaining user information about the roughness of the workpiece surface based on the corrected roughness measurement values; and
outputting the ascertained user information about the roughness of the workpiece surface.

12. A non-transitory computer readable storage medium encoded with program code comprising computer executable instructions for controlling a roughness sensor of a roughness measuring apparatus and when executed operable to:
(a) capture data representing a movement of the roughness sensor relative to at least one of the roughness measuring apparatus and a surface of a workpiece to be measured by at least one measuring system with a data capturing rate larger than 100 Hz, and the movement of the roughness sensor being in a frequency range below 100 Hz;
(b) make the captured data of the movement of the roughness sensor available for further data processing; and
(c) store the data representing the movement of the roughness sensor.

13. A roughness measuring apparatus comprising:
a roughness sensor,
at least one measuring system configured to capture dynamic vibrations of the roughness sensor,
at least one of a control unit and an evaluation unit configured to:
(a) capture data representing a movement of the roughness sensor relative to at least one of the roughness measuring apparatus and surface of a workpiece to be measured by the at least one measuring system with a data capturing rate larger than 100 Hz, and the movement of the roughness sensor being in a frequency range below 100 Hz;
(b) make the captured data of the movement of the roughness sensor available for further data processing; and
(c) store the captured data of the movement of the roughness sensor.

14. The roughness measuring apparatus of claim 13 , wherein the at least one measuring system for capturing the dynamic vibrations of the roughness sensor includes at least one distance measuring sensor that operates contactlessly or at least one dynamic tactile sensor.

Assignees

• Zeiss Carl Industrielle Messtechnik Gmbh

Inventors

• Mayinger Philipp

Classifications

• G01B11/30

  for measuring roughness or irregularity of surfaces · CPC title

• G01B5/28 Primary

  for measuring roughness or irregularity of surfaces · CPC title

• G01B5/008

  using coordinate measuring machines · CPC title