Method of manufacturing phase-change material (PCM) radio frequency (RF) switch using a chemically protective and thermally conductive layer

Patent metadata

Field	Value
Publication number	US-10833259-B2
Application number	US-201916554492-A
Country	US
Kind code	B2
Filing date	Aug 28, 2019
Priority date	Aug 14, 2018
Publication date	Nov 10, 2020
Grant date	Nov 10, 2020

Abstract

A radio frequency (RF) switch includes a heating element, an aluminum nitride layer situated over the heating element, and a phase-change material (PCM) situated over the aluminum nitride layer. An inside segment of the heating element underlies an active segment of the PCM, and an intermediate segment of the heating element is situated between a terminal segment of the heating element and the inside segment of the heating element. The aluminum nitride layer situated over the inside segment of the heating element provides thermal conductivity and electrical insulation between the heating element and the active segment of the PCM. The aluminum, nitride layer extends into the intermediate segment of the heating element and provides chemical protection to the intermediate segment of the heating element, such that the intermediate segment of the heating element remains substantially unetched and with substantially same thickness as the inside segment.

First claim

The invention claimed is:

1. A method of manufacturing a radio frequency (RF) switch, the method comprising:
providing a heating element;
forming an aluminum nitride layer over said heating element;
forming a phase-change material (PCM) over said aluminum nitride layer such that said PCM defines an inside segment of said heating element underlying said PCM, and an intermediate segment of said heating element not underlying said PCM, said intermediate segment of said heating element situated between a terminal segment of said heating element and said inside segment of said heating element;
wherein said aluminum nitride layer at least partially extends over said intermediate segment of said heating element for providing chemical protection to said intermediate segment of said heating element;
forming a heating element contact situated over said terminal segment of said heating element, wherein said forming said heating element contact comprises using said aluminum nitride layer as an etch stop during an etching action.

2. The method of claim 1 , further comprising forming a PCM contact situated over a passive segment of said PCM.

3. The method of claim 1 , wherein said aluminum nitride layer prevents stringers at an edge of said PCM from coupling to said heating element.

4. The method of claim 1 , wherein said aluminum nitride layer is planar.

5. The method of claim 1 , wherein said aluminum nitride layer is further formed over a lower dielectric, has a first thermal conductivity over said lower dielectric, and has a second thermal conductivity over said inside segment of said heating element;
said second thermal conductivity being higher than said first thermal conductivity, such that said aluminum nitride layer increases heat flow from said heating element in a direction toward an active segment of said PCM.

6. The method of claim 1 , wherein said heating element comprises material selected from the group consisting of tungsten (W), molybdenum (Mo), titanium (Ti), titanium nitride (TiN), titanium tungsten (TiW), tantalum (Ta), nickel chromium (NiCr), and nickel chromium silicon (NiCrSi).

7. The method of claim 1 , wherein said phase-change material is selected from the group consisting of germanium telluride (Ge X Te Y ), germanium antimony telluride (Ge X Sb Y Te Z ), germanium selenide (Ge X Se Y ), and any other chalcogenide.

8. The method of claim 1 , wherein said aluminum nitride layer has a thickness greater than or approximately equal to five hundred angstroms and less than or approximately equal to five thousand angstroms (500 Å-5,000 Å).

9. A method of manufacturing a radio frequency (RF) switch, the method comprising:
providing a heating element;
forming a chemically protective and thermally conductive layer over said heating element;
forming a phase-change material (PCM) over said chemically protective and thermally conductive layer such that said PCM defines an inside segment of said heating element underlying said PCM, and an intermediate segment of said heating element not underlying said PCM, wherein said intermediate segment of said heating element is situated between a terminal segment of said heating element and said inside segment of said heating element;
wherein said chemically protective and thermally conductive layer at least partially extends over said intermediate segment;
forming a heating element contact situated over said terminal segment of said heating element, wherein said forming said heating element contact comprises using said chemically protective and thermally conductive layer as an etch stop during an etching action.

10. The method of claim 9 , wherein said chemically protective and thermally conductive layer provides chemical protection to said intermediate segment of said heating element.

11. The method of claim 9 , wherein said chemically protective and thermally conductive layer comprises a material selected from the group consisting of aluminum nitride, aluminum oxide, beryllium oxide, silicon carbide, diamond, and diamond-like carbon.

12. The method of claim 9 , further comprising forming a PCM contact situated over a passive segment of said PCM.

13. The method of claim 9 , wherein said chemically protective and thermally conductive layer is further formed over a lower dielectric, has a first thermal conductivity over said lower dielectric, and has a second thermal conductivity over said inside segment of said heating element, wherein said second thermal conductivity is higher than said first thermal conductivity.

14. The method of claim 9 , wherein said heating element comprises material selected from the group consisting of tungsten (W), molybdenum (Mo), titanium (Ti), titanium nitride (TiN), titanium tungsten (TiW), tantalum (Ta), nickel chromium (NiCr), and nickel chromium silicon (NiCrSi).

15. The method of claim 9 , wherein said phase-change material is selected from the group consisting of germanium telluride (Ge X Te Y ), germanium antimony telluride (Ge X Sb Y Te Z ), germanium selenide (Ge Z Se Y ) and any other chalcogenide.

16. The method of claim 9 , wherein said chemically protective and thermally conductive layer prevents stringers at an edge of said PCM from coupling to said heating element.

Assignees

• Newport Fab Llc

Inventors

• Slovin Gregory P
• El-Hinnawy Nabil
• Howard David J
• Rose Jefferson E

Classifications

• H01L45/06 Primary

  Electricity · mapped topic

• H01L45/1286

  Electricity · mapped topic

• H01L45/1608

  Electricity · mapped topic

• H01L45/1293

  Electricity · mapped topic

• H01L45/141

  Electricity · mapped topic