Methods of making semiconductor radiation detector

Patent metadata

Field	Value
Publication number	US-10833217-B2
Application number	US-201916565458-A
Country	US
Kind code	B2
Filing date	Sep 9, 2019
Priority date	Apr 21, 2017
Publication date	Nov 10, 2020
Grant date	Nov 10, 2020

Abstract

Disclosed herein is an apparatus and a method of making the apparatus. The method comprises obtaining a plurality of semiconductor single crystal chunks. Each of the plurality of semiconductor single crystal chunks may have a first surface and a second surface. The second surface may be opposite to the first surface. The method may further comprise bonding the plurality of semiconductor single crystal chunks by respective first surfaces to a first semiconductor wafer. The plurality of semiconductor single crystal chunks forming a radiation absorption layer. The method may further comprise forming a plurality of electrodes on respective second surfaces of each of the plurality of semiconductor single crystal chunks, depositing pillars on each of the plurality of semiconductor single crystal chunks and bonding the plurality of semiconductor single crystal chunks to a second semiconductor wafer by the pillars.

First claim

What is claimed is:

1. A method for making an apparatus suitable for detecting radiation, the method comprising:
obtaining a plurality of semiconductor single crystal chunks each having a first surface and a second surface, the second surface being opposite to the first surface;
bonding the plurality of semiconductor single crystal chunks by respective first surfaces to a first semiconductor wafer, the plurality of semiconductor single crystal chunks forming a radiation absorption layer;
forming a plurality of electrodes on respective second surfaces of each of the plurality of semiconductor single crystal chunks;
depositing pillars on each of the plurality of semiconductor single crystal chunks; and
bonding the plurality of semiconductor single crystal chunks to a second semiconductor wafer by the pillars.

2. The method of claim 1 , wherein the plurality of semiconductor single crystal chunks are cadmium zinc telluride (CdZnTe) chunks.

3. The method of claim 1 , wherein the plurality of semiconductor single crystal chunks are bonded to the first semiconductor wafer by glue or plastic molding.

4. The method of claim 1 , wherein the first semiconductor wafer is conductive and serve as a common electrode for the plurality of semiconductor single crystals chunks.

5. The method of claim 1 , wherein the plurality of electrodes on the plurality of semiconductor single crystal chunks are formed by semiconductor wafer processes.

6. The method of claim 1 , wherein the pillars are conductive pillar bumps.

7. The method of claim 6 , wherein the pillars are deposited using semiconductor wafer processes.

8. The method of claim 1 , further comprising polishing the second surfaces of the plurality of semiconductor single crystal chunks so that the plurality of semiconductor single crystal chunks are of the same thickness.

9. The method of claim 1 , wherein the first semiconductor wafer forms a common electrode for the plurality of semiconductor single crystal chunks.

10. The method of claim 9 , wherein the plurality of semiconductor single crystal chunks form resistors between the common electrode at the first surfaces and the plurality of electrodes on the second surfaces.

11. The method of claim 1 , wherein the radiation absorption layer is configured to detect one of electromagnetic radiation including ultraviolet (UV), X-ray, gamma ray.

12. The method of claim 1 , wherein the radiation absorption layer is configured to detect one of particle radiation including alpha particles, beta particles and neutron particles.

13. The method of claim 1 , wherein bonding of the plurality of semiconductor single crystal chunks to the second semiconductor wafer is performed by wafer level room temperature bonding.

14. The method of claim 1 , wherein the second semiconductor wafer comprises an electronics layer for processing signals generated in the radiation absorption layer.

15. The method of claim 14 , wherein the electronics layer comprises an electronics system connected to one of the plurality of electrodes of the plurality of semiconductor single crystal chunks, the electronics system comprises:
a first voltage comparator configured to compare a voltage of at least one of the electrodes to a first threshold;
a second voltage comparator configured to compare the voltage to a second threshold;
a counter configured to register a number of radiation photons or particles reaching the radiation absorption layer;
a controller;
wherein the controller is configured to start a time delay from a time at which the first voltage comparator determines that an absolute value of the voltage equals or exceeds an absolute value of the first threshold;
wherein the controller is configured to activate the second voltage comparator during the time delay;
wherein the controller is configured to cause the number registered by the counter to increase by one, if the second voltage comparator determines that an absolute value of the voltage equals or exceeds an absolute value of the second threshold.

16. The method of claim 15 , wherein the electronics system further comprises a capacitor module electrically connected to the electrode, wherein the capacitor module is configured to collect charge carriers from the electrode.

17. The method of claim 15 , wherein the controller is configured to activate the second voltage comparator at a beginning or expiration of the time delay.

18. The method of claim 15 , wherein the electronics system further comprises a voltmeter, wherein the controller is configured to cause the voltmeter to measure the voltage upon expiration of the time delay.

19. The method of claim 15 , wherein the controller is configured to determine a radiation particle energy based on a value of the voltage measured upon expiration of the time delay.

20. The method of claim 15 , wherein the controller is configured to connect the electrode to an electrical ground.

21. The method of claim 15 , wherein a rate of change of the voltage is substantially zero at expiration of the time delay.

22. The method of claim 15 , wherein a rate of change of the voltage is substantially non-zero at expiration of the time delay.

Assignees

• Shenzhen Xpectvision Tech Co Ltd

Inventors

• Cao Peiyan
• Liu Yurun

Classifications

• H10F77/1237

  having at least three elements, e.g. HgCdTe · CPC title

• H10F77/95

  Circuit arrangements · CPC title

• H10F77/93

  Interconnections · CPC title

• H10F77/20

  Electrodes · CPC title

• H10F71/00

  Manufacture or treatment of devices covered by this subclass (patterning processes to connect thin photovoltaic cells in integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/33; manufacture or treatment of encapsulations or containers for integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/80; manufacture or treatment of integrated devices, or assemblies of multiple devices, comprising at least one element in which radiation controls the flow of current H10F39/00) · CPC title