Switch circuit, method for operating a switch circuit and an automated test equipment

Patent metadata

Field	Value
Publication number	US-10830820-B2
Application number	US-201715793939-A
Country	US
Kind code	B2
Filing date	Oct 25, 2017
Priority date	Apr 27, 2015
Publication date	Nov 10, 2020
Grant date	Nov 10, 2020

Abstract

A switch circuit includes at least a first and a second switch element connected in series and a switch control configured for providing control signals for switching the first and the second switch element, such that the control signals have a different timing and such that the first and the second switch element perform one joint switch function.

First claim

The invention claimed is:

1. A switch circuit, comprising:
at least a first switch element and a second switch element coupled in series, wherein the second switch element is downstream of the first switch element and the second switch element comprises a better isolation property relative to the first switch element, wherein an electrical current is received by the first switch element and when in a closed state the first switch element allows the current to flow downstream directly to the second switch element; and
a switch control configured to provide a first control signal and a second control signal to switch the first switch element and the second switch element, respectively, wherein the first control signal is operable to switch a state of the first switch element at a different time relative to a time at which the second control signal is operable to switch a state of the second switch element, wherein the first switch element, the second switch element and switch control are configured to participate in a joint switch operation in which:
the second switch element is closed prior to the first switch element if the first
and the second switch elements are open, and
the second switch element is opened after the first switch element if the first and
the second switch elements are closed.

2. An automated test equipment comprising:
a signal path between a device under test connection and an instrument; and
a switch positioned in the signal path, wherein the switch comprises:
a first switch element and a second switch element coupled in series along a direct portion of the signal path without a parallel branch in between the first switch element and second switch element, wherein the second switch element comprises a better isolation property relative to the first switch element and the first switch element is upstream of the second switch element, wherein an electrical current is received by the first switch element and when in a closed state the first switch element allows the current to flow downstream directly to the second switch element; and

a switch control operable to provide a first control signal and a second control signal to switch the first switch element and the second switch element, respectively.

3. The automated test equipment according to claim 2 , wherein the second switch element comprises a different switch type relative to the first switch element, wherein the first switch element and second switch element perform a joint switch function and the first control signal is operable to switch a state of the first switch element at a different time relative to a time at which the second control signal is operable to switch a state of the second switch element.

4. The automated test equipment according to claim 2 , further comprising:
a third switch coupled to the signal path; and
a phase measurement circuit coupled to the third switch, the phase measurement circuit operable to perform measurements on the device under test.

5. A switch circuit, comprising:
a plurality of switch elements that perform a joint switch function, wherein the plurality of switch elements includes a first switch element and second switch element, wherein the first switch element is more upstream than others of the plurality of switch elements with less robust hot switching characteristics than the first switch element, including wherein the first switch element is more upstream and has more robust hot switching characteristics than the second switch element, wherein an electrical current is received by the first switch element and when in a closed state the first switch element allows the current to flow downstream directly to the second switch element; and
a switch control configured to provide a first control signal and a second control signal to switch the first switch element and the second switch element, respectively, wherein the first control signal is operable to switch a state of the first switch element at a different time relative to a time at which the second control signal is operable to switch a state of the second switch element.

6. The switch circuit according to claim 5 , wherein the second switch element comprises a different switch type relative to the first switch element, and wherein the first and second switch elements together operate as a switch.

7. The switch circuit according to claim 5 , wherein the first switch element is configured for robustly hot-switching an analogue signal as part of testing operations.

8. The switch circuit according to claim 5 , wherein the first switch element is a metal oxide semiconductor (MOS) switch.

9. The switch circuit according to claim 5 , wherein the first switch element is a Photo MOS switch.

10. The switch circuit according to claim 5 , wherein the second switch element is a microelectromechanical (MEMS) switch.

11. The switch circuit according to claim 5 , wherein the switch control is configured to close the second switch element prior to the first switch element if the first switch element and the second switch elements are open.

12. The switch circuit according to claim 5 , wherein the switch control is configured to open the second switch element after the first switch element if the first switch element and the second switch elements are closed.

13. The switch circuit according to claim 5 , wherein the switch control is configured to switch the first switch element to control a current flow through the second switch element and the switch circuit is included in automated test equipment.

14. A method for operating a switch circuit, the method comprising:
switching a state of a first switch element in accordance with first control signal; and
switching a state of a second switch element at a different time than the switching of the state of the first element in accordance with a second control signal; including opening the second switch element after the first switch element if the first switch element and the second switch elements are closed, including wherein the first switch element is more upstream and has more robust hot switching characteristics than the second switch element, wherein an electrical current is received by the first switch element and when in a closed state the first switch element allows the current to flow downstream directly to the second switch element.

15. The method according to claim 14 , wherein the switching the state of the first switch element and switching the state of the second switch element are part of executing a joint switch function.

16. The method according to claim 14 , wherein switching the state of the second switch element includes closing the second switch element prior to the first switch element if the first switch element and the second switch elements are opened.

17. The method according to claim 14 wherein switching the state of the second switch element includes closing the second switch element after the first switch element in operations to close the first switch element and the second switch elements.

18. A switch circuit, comprising:
at least a first switch element configured to switch between an open switch state and a closed switch state that are part of a joint switch function; and
at least a second switch element configured to switch between an open switch state and a closed switch state that are part of the joint switch function,
wherein a state of the first switch element switches at a different time relative to a time at which the state of the second switch element switches,
wherein the first switch element and the sec

Assignees

• Advantest Corp

Inventors

• Müller Detlef
• Rottacker Markus
• Mayer Bernhard

Classifications

• H01H1/0036 Primary

  Switches making use of microelectromechanical systems [MEMS] (for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009) · CPC title

• H03K17/0812

  by measures taken in the control circuit · CPC title

• H01H50/005

  using micromechanics · CPC title

• H01H9/548

  Electromechanical and static switch connected in series · CPC title

• H03K17/0814

  by measures taken in the output circuit · CPC title