Detector device with photoconductive body

Patent metadata

Field	Value
Publication number	US-10830696-B2
Application number	US-201816200352-A
Country	US
Kind code	B2
Filing date	Nov 26, 2018
Priority date	Dec 29, 2017
Publication date	Nov 10, 2020
Grant date	Nov 10, 2020

Abstract

A solid-state device for photo detection, in general, of terahertz radiation is disclosed. One aspect is a detector device comprising a body having a photoconductive material, a first antenna element connected to a first portion of the body, and a second antenna element connected to a second portion of the body. The first antenna element and the second antenna element are arranged to induce an electric field in the body in response to an incident signal. Further, the device has a waveguide arranged to couple light into the photoconductive material via a coupling interface between the waveguide and the body, where the coupling interface faces away from the first portion and the second portion of the body and is closer to the first portion than to the second portion.

First claim

What is claimed is:

1. A detector device of electromagnetic radiation, comprising:
a body comprising a photoconductive material;
a first antenna element connected to a first portion of the body and a second antenna element connected to a second portion of the body, wherein the first antenna element and the second antenna element are arranged to induce an electric field in the body in response to an incident signal;
a waveguide arranged to couple light into the photoconductive material via a coupling interface between the waveguide and the body, the coupling interface facing away from the first portion and the second portion of the body and being closer to the first portion than to the second portion; and
an electrode pair arranged to allow a photocurrent to be measured, the photocurrent resulting from the induced electrical field and the light coupled into the body.

2. The detector device according to claim 1 , wherein the first portion and the second portion form part of a top portion of the body, and wherein the coupling interface forms part of a side portion of the body.

3. The detector device according to claim 1 , wherein the first portion and the second portion are formed of a respective doped region of the body, and wherein an intrinsic region is arranged between the first portion and the second portion.

4. The detector device according to claim 3 , wherein the light is coupled into the intrinsic region at a position arranged off-center with respect to a center axis of the intrinsic region.

5. The detector device according to claim 4 , wherein the electrode pair is arranged to allow the photocurrent to be measured in a direction intersecting the center axis.

6. The detector device according to claim 1 , further comprising at least two waveguides arranged to couple light into the photoconductive material from opposing sides of the body.

7. The detector device according to claim 6 , wherein the at least two waveguides are arranged to couple light into the body along an axis intersecting a first side surface and a second side surface of the body.

8. The detector device according to claim 1 , wherein the waveguide has a tapered light confinement structure.

9. The detector device according to claim 1 , wherein the first antenna element and the second antenna element are indirectly connected to the first portion and the second portion, respectively, by via connections.

10. The detector device according to claim 1 , wherein the body comprises a photodiode.

11. The detector device according to claim 1 , wherein the received incident signal is a terahertz signal.

12. A detector device of electromagnetic radiation, comprising:
a body comprising a photoconductive material;
a first antenna element connected to a first portion of the body and a second antenna element connected to a second portion of the body, wherein the first portion and the second portion are formed of a respective doped region of the body, wherein an intrinsic region is arranged between the first portion and the second portion, and wherein the first antenna element and the second antenna element are arranged to induce an electric field in the body in response to an incident signal;
a waveguide arranged to couple light into the photoconductive material via a coupling interface between the waveguide and the body, the coupling interface facing away from the first portion and the second portion of the body and being closer to the first portion than to the second portion; and
an electrode pair arranged to allow a photocurrent to be measured, the photocurrent resulting from the induced electrical field and the light coupled into the body.

13. The detector device according to claim 12 , wherein the light is coupled into the intrinsic region at a position arranged off-center with respect to a center axis of the intrinsic region.

14. The detector device according to claim 12 , wherein the electrode pair is arranged to allow the photocurrent to be measured in a direction intersecting the center axis.

Assignees

• Imec Vzw
• Stichting Imec Nederland

Inventors

• Offermans Peter
• Van Campenhout Joris

Classifications

• H10F30/10

  the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors · CPC title

• G01J3/42 Primary

  Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry (beam switching arrangements G01J3/08) · CPC title

• G01J5/0837

  Microantennas, e.g. bow-tie · CPC title

• G01J5/28

  using photoemissive or photovoltaic cells · CPC title

• G02B6/12

  of the integrated circuit kind (electric integrated circuits H10B, H10D84/00 - H10D89/00, H10F19/00, H10F39/00, H10H29/00, H10K19/00, H10K39/00, H10K59/00, H10N19/00, H10N39/00, H10N59/00, H10N69/00, H10N79/00, H10N89/00) · CPC title