Method of preparing an isolation region in a high resistivity silicon-on-insulator substrate

Patent metadata

Field	Value
Publication number	US-10825718-B2
Application number	US-201916352203-A
Country	US
Kind code	B2
Filing date	Mar 13, 2019
Priority date	Jun 22, 2016
Publication date	Nov 3, 2020
Grant date	Nov 3, 2020

Abstract

A multilayer composite structure and a method of preparing a multilayer composite structure are provided. The multilayer composite structure comprises a semiconductor handle substrate having a minimum bulk region resistivity of at least about 500 ohm-cm and an isolation region that impedes the transfer of charge carriers along the surface of the handle substrate and reduces parasitic coupling between RF devices.

First claim

What is claimed is:

1. A method of preparing a multilayer structure, the method comprising:
implanting oxygen ions selected from the group consisting of O + ions, O 2 + ions, and a combination thereof at a dosage between about 5×10 14 atoms/cm 2 and about 5×10 17 atoms/cm 2 and an implant energy between about 5 keV and about 50 keV through a front surface of a single crystal semiconductor handle substrate to thereby form an isolation region comprising semiconductor oxide, wherein the single crystal semiconductor handle substrate comprises two major, generally parallel surfaces, one of which is the front surface of the single crystal semiconductor handle substrate and the other of which is a back surface of the single crystal semiconductor handle substrate, a circumferential edge of the single crystal semiconductor handle substrate joining the front and back surfaces of the single crystal semiconductor handle substrate, a central plane of the single crystal semiconductor handle substrate between the front surface and the back surface of the single crystal semiconductor handle substrate, and a bulk region between the front and back surfaces of the single crystal semiconductor handle substrate, wherein the single crystal semiconductor handle substrate has a bulk resistivity of at least about 500 Ohm-cm;
depositing a dielectric layer on the front surface of the single crystal semiconductor handle substrate; and
bonding a front surface of a single crystal semiconductor donor substrate to the dielectric layer of the single crystal semiconductor handle substrate to thereby form a bonded multilayer structure comprising the single crystal semiconductor handle substrate, the isolation region, the dielectric layer, and the single crystal semiconductor donor substrate, wherein the single crystal semiconductor donor substrate comprises two major, generally parallel surfaces, one of which is the front surface of the single crystal semiconductor donor substrate and the other of which is a back surface of the single crystal semiconductor donor substrate, a circumferential edge of the single crystal semiconductor donor substrate joining the front and back surfaces of the single crystal semiconductor donor substrate, and a central plane of the single crystal semiconductor donor substrate between the front and back surfaces of the single crystal semiconductor donor substrate, and further wherein the single crystal semiconductor donor substrate comprises a cleave plane.

2. The method of claim 1 wherein the single crystal semiconductor handle substrate comprises silicon, and the isolation region comprises silicon dioxide.

3. The method of claim 1 wherein the single crystal semiconductor handle substrate comprises a silicon wafer sliced from a single crystal silicon ingot grown by the Czochralski method or the float zone method.

4. The method of claim 1 wherein the bulk resistivity of the single crystal semiconductor handle substrate is between about 500 Ohm-cm and about 100,000 Ohm-cm.

5. The method of claim 1 wherein the bulk resistivity of the single crystal semiconductor handle substrate is between about 2000 Ohm-cm and about 10,000 Ohm-cm.

6. The method of claim 1 wherein the bulk resistivity of the single crystal semiconductor handle substrate is between about 3000 Ohm-cm and about 10,000 Ohm-cm.

7. The method of claim 1 wherein the bulk resistivity of the single crystal semiconductor handle substrate is between about 3000 Ohm-cm and about 5,000 Ohm-cm.

8. The method of claim 1 wherein the single crystal semiconductor handle substrate is p-type and the bulk resistivity of the single crystal semiconductor handle substrate is between about 1000 Ohm-cm and about 6000 Ohm-cm.

9. The method of claim 1 wherein the oxygen ions are implanted at a dosage between about 5×10 14 atoms/cm 2 to about 5×10′ 7 atoms/cm 2 and an implant energy between about 5 keV to about 20 keV 1 keV.

10. The method of claim 1 wherein the oxygen ions are implanted at a dosage between about 1×10 15 atoms/cm 2 to about 1×10 17 atoms/cm 2 and an implant energy between about 5 keV to about 50 keV.

11. The method of claim 1 wherein the oxygen ions are implanted to a depth of between about 20 angstroms and about 400 angstroms as measured from the front surface of the single crystal semiconductor handle substrate toward the central plane of the single crystal semiconductor handle substrate.

12. The method of claim 1 wherein the oxygen ions are implanted to a depth of between about 50 angstroms and about 200 angstroms as measured from the front surface of the single crystal semiconductor handle substrate toward the central plane of the single crystal semiconductor handle substrate.

13. The method of claim 1 wherein the isolation region has a thickness between about 200 angstroms and about 10,000 angstroms.

14. The method of claim 1 wherein the isolation region has a resistivity between about 0.25×10 6 Ohm-cm and about 1×10 14 Ohm-cm.

15. The method of claim 1 wherein the isolation region has a resistivity between about 1×10 12 Ohm-cm and about 1×10 14 Ohm-cm.

16. The method of claim 1 wherein the dielectric layer comprises a material selected from the group consisting of silicon dioxide, silicon nitride, silicon oxynitride, hafnium oxide, titanium oxide, zirconium oxide, lanthanum oxide, barium oxide, and a combination thereof.

17. The method of claim 1 wherein the dielectric layer comprises at least two insulating layers, each insulating layer selected from the group consisting of silicon dioxide, silicon nitride, and silicon oxynitride.

18. The method of claim 1 wherein the dielectric layer has a thickness of at least about 10 nanometer.

19. The method of claim 1 wherein the dielectric layer has a thickness between about between about 100 nanometers and about 400 nanometers.

20. The method of claim 1 wherein the front surface of the single crystal semiconductor donor substrate comprises a semiconductor oxide layer.

21. The method of claim 1 further comprising mechanically cleaving the bonded structure at the cleave plane of the single crystal semiconductor donor substrate to thereby prepare a cleaved multilayer structure comprising the single crystal semiconductor handle substrate, the isolation region comprising semiconductor oxide, the dielectric layer, and a single crystal semiconductor device layer.

22. The method of claim 21 further comprising heating the cleaved multilayer structure at a temperature between about 1000° C. and about 1200° C. and for a duration between about 0.5 hours and about 8 hours to strengthen the bond between the single crystal semiconductor device layer and the single crystal semiconductor handle substrate.

Assignees

• Globalwafers Co Ltd

Inventors

• Peidous Igor
• Libbert Jeffrey L

Classifications

• H10P30/209

  in silicon to make buried insulating layers · CPC title

• H10P30/204

  into Group IV semiconductors · CPC title

• H10P30/21

  of electrically active species · CPC title

• H10P14/69433

  the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz · CPC title

• H10P14/69396

  the material containing at least one rare earth metal element, e.g. oxides of lanthanides, scandium or yttrium · CPC title