Substrate treatment apparatus

Patent metadata

Field	Value
Publication number	US-10821483-B2
Application number	US-201715692018-A
Country	US
Kind code	B2
Filing date	Sep 13, 2017
Priority date	Sep 21, 2016
Publication date	Nov 3, 2020
Grant date	Nov 3, 2020

Abstract

A substrate treatment apparatus includes a brush moving mechanism which moves a shaft to which a cleaning brush is attached. The brush body includes a substrate contact portion of a pillar-shaped portion. The substrate treatment apparatus further includes a correcting member and a relatively-positioning mechanism. When the correcting member is placed in a target position, a contact portion of the correcting member overlaps an object portion which is a combination of a design contact portion and a belt-shaped annular portion in an outer surface of a design pillar-shaped portion of a design body of a design brush. The contact portion is formed to have an inverted shape of the object portion of the design brush, and a portion of the contact portion, which corresponds to the belt-shaped annular portion, is a center-axis facing surface which faces a center axis of the shaft.

First claim

What is claimed is:

1. A substrate treatment apparatus comprising:
a rotatable substrate holder configured to hold a substrate in a horizontal posture and rotate the substrate about a rotation axis which vertically passes through a center of said substrate;
a cleaning brush including a brush body which is elastically deformable;
a brush mover including a shaft to which said cleaning brush is attached, the shaft extending in a direction transverse to a main surface of said substrate, and the brush mover being configured to move said cleaning brush by moving said shaft,
a flat plate in a horizontal posture;
a pair of parallel flat plates that are erected from said flat plate to be movable in a horizontal direction;
a pair of brush shapers that are attached to each of opposite surfaces of said pair of flat plates so as to face each other;
a contact portion that is convex-shaped in a horizontal direction and provided on a side surface of said pair of brush shapers; and
a placer for placing the brush shapers configured to place said pair of brush shapers in a target position by moving said pair of parallel flat plates in a horizontal direction on said flat plate, wherein
said brush body includes a pillar-shaped portion extending in a direction in which said shaft extends, and includes a substrate contact portion which is configured to come into contact with said substrate, in a side surface of said pillar-shaped portion; and
said brush mover is capable of bringing said substrate contact portion of said brush body into contact with an outer edge portion of said substrate.

2. The substrate treatment apparatus according to claim 1 , wherein
said brush body has a spongy structure,
said substrate treatment apparatus further comprising:
a fluid feeder configured to feed a predetermined fluid to said brush body of said cleaning brush with said pair of brush shapers being placed in said target position, and form a flow of said fluid which goes toward said contact portion of said pair of brush shapers through an inside of said brush body.

3. The substrate treatment apparatus according to claim 1 , wherein
a suction flow path which opens to said contact portion is formed in said pair of brush shapers,
said substrate treatment apparatus further comprising:
a decompressor which communicates with said suction flow path and is configured to reduce a pressure in said suction flow path.

4. The substrate treatment apparatus according to claim 1 , further comprising:
a correcting-member cleaner configured to feed a cleaning liquid to said contact portion of said pair of brush shapers and clean said contact portion with pair of said brush shapers being at some distance from said target position.

5. The substrate treatment apparatus according to claim 4 , wherein
said correcting-member cleaner is configured to be capable of feed a cleaning liquid to said brush body of said cleaning brush and cleaning said brush body with said pair of brush shapers being placed in said target position.

6. The substrate treatment apparatus according to claim 1 , further comprising:
a brush cleaner configured to feed a cleaning liquid to said brush body of said cleaning brush and cleaning said brush body with said pair of brush shapers being placed in said target position.

7. The substrate treatment apparatus according to claim 1 , further comprising:
a size measuring device configured to measure an amount of deformation of said brush body of said cleaning brush.

8. A substrate treatment apparatus comprising:
a rotatable substrate holder configured to hold a substrate in a horizontal posture and rotate the substrate about a rotation axis which vertically passes through a center of said substrate;
a cleaning brush including a brush body which is elastically deformable;
a brush moving mechanism brush mover including a shaft to which said cleaning brush is attached, the shaft extending in a direction transverse to a main surface of said substrate, and the brush mover being configured to move said cleaning brush by moving said shaft,
a flat plate in a horizontal posture;
a pair of parallel flat plates that are erected from said flat plate to be movable in a horizontal direction;
a pair of brush shapers that are attached to each of opposite surfaces of said pair of flat plates so as to face each other;
a contact portion that is convex-shaped in a horizontal direction and provided on a side surface of said pair of brush shapers;
a correcting member placer configured to place said pair of brush shapers in a target position by moving said pair of parallel flat plates in a horizontal direction on said flat plate; and
a brush rotator configured to rotate said cleaning brush about a center axis of said shaft relatively to said pair of brush shapers, wherein
said brush body includes a pillar-shaped portion extending in a direction in which said shaft extends, and includes a substrate contact portion which is configured to come into contact with said substrate, in a side surface of said pillar-shaped portion;
said brush mover is capable of bringing said substrate contact portion of said brush body into contact with an outer edge portion of said substrate.

9. The substrate treatment apparatus according to claim 8 , wherein
said brush body has a spongy structure,
said substrate treatment apparatus further comprising:
a fluid feeder configured to feed a predetermined fluid to said brush body of said cleaning brush with said pair of brush shapers being placed in said target position, and form a flow of said fluid which goes toward said contact portion of said pair of brush shapers through an inside of said brush body.

10. The substrate treatment apparatus according to claim 8 , wherein
a suction flow path which opens to said contact portion is formed in said pair of brush shapers,
said substrate treatment apparatus further comprising:
a decompressor which communicates with said suction flow path and is configured to reduce a pressure in said suction flow path.

11. The substrate treatment apparatus according to claim 8 , further comprising:
a correcting-member cleaner configured to feed a cleaning liquid to said contact portion of said pair of brush shapers and clean said contact portion with said pair of brush shapers being at some distance from said target position.

12. The substrate treatment apparatus according to claim 11 , wherein
said correcting-member cleaner is configured to feed a cleaning liquid to said brush body of said cleaning brush and cleaning said brush body with said pair of brush shapers being placed in said target position.

13. The substrate treatment apparatus according to claim 8 , further comprising:
a brush cleaner configured to feed a cleaning liquid to said brush body of said cleaning brush and cleaning said brush body with said pair of brush shapers being placed in said target position.

14. The substrate treatment apparatus according to claim 8 , further comprising:
a size measuring device configured to measure an amount of deformation of said brush body of said cleaning brush.

Assignees

• Screen Holdings Co Ltd

Inventors

• Yano Wataru
• Hashizume Akio

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0412 Primary

  using mainly scrubbing means, e.g. brushes · CPC title

• H10P72/04 Primary

  Apparatus for manufacture or treatment · CPC title

• B08B1/36

  rotating about an axis orthogonal to the surface · CPC title

• B08B1/52

  using fluids · CPC title