Multimodal microstructure material and methods of forming same

Patent metadata

Field	Value
Publication number	US-10801100-B2
Application number	US-201916568064-A
Country	US
Kind code	B2
Filing date	Sep 11, 2019
Priority date	Sep 11, 2018
Publication date	Oct 13, 2020
Grant date	Oct 13, 2020

Abstract

Metallic materials with multimodal microstructure and methods of forming the metallic materials are disclosed. Exemplary methods allow for tuning of desired properties of the metallic materials and of devices including the metallic materials.

First claim

We claim:

1. A method of forming a metallic material with multimodal microstructure, the method comprising the steps of:
providing a substrate having a patterned surface comprising a first material and a second material; and
depositing a metallic material directly over the first material and the second material to form a multimodal metallic material,
wherein a microstructure of the first material and a microstructure of the second material are different, and
wherein a microstructure of the metallic material deposited directly over the first material and a microstructure of the metallic material deposited directly over the second material are different.

2. The method of claim 1 , wherein the first material is crystalline.

3. The method of claim 2 , wherein the microstructure of the metallic material deposited directly over the first material is crystalline.

4. The method of claim 2 , wherein the metallic material deposited directly over the first material is epitaxially grown.

5. The method of claim 1 , wherein the second material is not monocrystalline.

6. The method of claim 5 , wherein the microstructure of the metallic material deposited directly over the second material is one or more of nanocrystalline structures and ultra-fine grained structures.

7. The method of claim 6 , wherein an average cross-sectional dimension of the nanocrystalline structures ranges from about 5 nm to about 100 nm and an average cross-sectional dimension of the ultra-fine grain structures ranges from about 100 nm to about 1000 nm.

8. The method of claim 1 , wherein the metallic material comprises elemental metal.

9. The method of claim 8 , wherein the elemental metal is selected from the group consisting of aluminum, copper, iron, nickel, silver, chromium, vanadium, titanium, and cobalt.

10. The method of claim 1 , wherein the metallic material comprises an alloy.

11. The method of claim 10 , wherein the alloy is selected from the group consisting of dilute alloys of aluminum, copper, iron, silver, nickel, titanium, and chromium.

12. The method of claim 1 , wherein the first material comprises a material selected from the group consisting of buffer material, silicon, germanium, silicon germanium, quartz, zinc oxide, and rock salt (NaCl).

13. The method of claim 1 , wherein the second material comprises a material selected from the group consisting of silicon nitride, silicon oxynitride, aluminum, titanium nitride, and aluminum oxide.

14. The method of claim 1 , wherein a ratio of a surface area of the first material to a surface area of the second material ranges from about 1:0.02 to about 1:50, about 1:0.75 to about 1:1.25, or about 1:0.8 to about 1:1.2.

15. The method of claim 1 , wherein the patterned surface comprises a plurality of islands of the first material, the plurality of islands having an average cross-sectional dimensions of about 500 nm to about 50000 nm.

16. The method of claim 1 , wherein the patterned surface comprises a plurality of islands of the second material, the plurality of islands having an average cross-sectional dimensions of about 500 nm to about 50000 nm.

17. The method of claim 1 , wherein the patterned surface comprises co-continuous or bi continuous or random patterns of the first material and the second material, with cross-sectional dimensions of about 500 nm to about 50000 nm.

18. The method of claim 1 , wherein the step of depositing comprises physical vapor deposition.

19. The method of claim 1 , wherein a surface of the first material and a surface of the second material are coplanar.

Assignees

• Rajagopalan Jagannathan
• Berlia Rohit
• Univ Arizona State

Inventors

• Rajagopalan Jagannathan
• Berlia Rohit

Classifications

• C23C28/042

  including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides · CPC title

• C23C28/023

  only coatings of metal elements only · CPC title

• C23C30/005

  on hard metal substrates · CPC title

• C23C14/025 Primary

  Metallic sublayers · CPC title

• C23C14/18

  on other inorganic substrates · CPC title