Fabrication of low defectivity electrochromic devices
US-2016327846-A1 · Nov 10, 2016 · US
US10385440B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10385440-B2 |
| Application number | US-201715458693-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 14, 2017 |
| Priority date | Nov 11, 2014 |
| Publication date | Aug 20, 2019 |
| Grant date | Aug 20, 2019 |
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Methods for controlled microstructure creation utilize seeding of amorphous layers prior to annealing. Seed crystals are formed on an amorphous layer or layers. The material, size, and spacing of the seed crystals may be varied, and multiple seed layers and/or amorphous layers may be utilized. Thereafter, the resulting assembly is annealed to generate a crystalline microstructure. Via use of these methods, devices having desirable microstructural properties are enabled.
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What is claimed is: 1. A device, comprising: a TiAl layer having a crystalline microstructure, wherein the average grain size of the microstructure is less than 200 nm, and wherein the microstructure was formed by: depositing a first layer of amorphous TiAl material on a substrate; forming a series of seed crystals on the first layer of amorphous material; and annealing the amorphous material and the seed crystals. 2. The device of claim 1 , wherein the microstructure was further formed by, prior to the annealing, depositing a second layer of amorphous material to enclose the seed crystals between the first layer of amorphous material and the second layer of amorphous material. 3. The device of claim 1 , wherein annealing is performed at a temperature between about 573 Kelvin and about 973 Kelvin. 4. A device, comprising: a first layer of amorphous TiAl material; a first series of seed crystals disposed on the first layer; and a second layer of amorphous TiAl material disposed on the first layer and enclosing the first series of seed crystals between the first layer and the second layer. 5. The device of claim 4 , further comprising: a second series of seed crystals disposed on the second layer; and a third layer of amorphous TiAl material disposed on the second layer and enclosing the second series of seed crystals between the second layer and the third layer. 6. The device of claim 5 , wherein the first series of seed crystals differs from the second series of seed crystals in at least one of: the material of the seed crystals, the size of the seed crystals, or the spacing of the seed crystals. 7. The device of claim 4 , wherein the first series of seed crystals comprises at least one of crystalline Ti or crystalline Al, and wherein the series of seed crystals is configured with an average layer thickness of between 1.0 nm and 2.5 nm.
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