Autofocus system and method

Patent metadata

Field	Value
Publication number	US-10794689-B2
Application number	US-201816212224-A
Country	US
Kind code	B2
Filing date	Dec 6, 2018
Priority date	Apr 23, 2010
Publication date	Oct 6, 2020
Grant date	Oct 6, 2020

Abstract

New and useful concepts for an autofocus system and method are provided. A basic concept uses fringe projection in an autofocus system and method. A further aspect provides spatial filtering concepts for the fringe projection concept. In yet another aspect, the fringe projection autofocus system and method is provided with temporal phase shifting using no moving parts. In a still further aspect, the fringe projection autofocus system and method is provided with unambiguous height measurement concepts.

First claim

What is claimed is:

1. A surface position detecting device configured to detect a position of a surface of a workpiece, the device comprising:
a light-sending system including:
a light divider disposed to receive an input that includes light from a light source and to produce an output that includes spatially-distinct from one another first light and second light,
a projection system configured to project the first light and the second light so as to form a first intensity distribution on the surface, and
a phase-difference imparting member configured to impart a first phase difference between the first light and the second light;

a light-receiving system including:
a light-condensing system configured to receive light from the surface of the workpiece and to spatially condense said light,
a phase-difference reducing member configured to reduce the first phase difference between the first light and the second light, and
a detector disposed to detect a second intensity distribution, formed by light received from the condensing system, and to generate an output signal in response to detecting the second intensity distribution, the second intensity distribution corresponding to the first intensity distribution; and

a data processor configured to calculate the position of the surface based on the output signal from the detector.

2. The device according to claim 1 , wherein the phase-difference reducing member includes a first optically-transmissive member disposed in a first optical-path portion of at least one of i) a first optical path of the first light and ii) a second optical path of the second light to define a first optical path length difference between the first and second optical paths in the light-receiving system, wherein the first optical-path portion passes through the light-receiving system.

3. The device according claim 2 , wherein the phase-difference imparting member comprises a second optically-transmissive member disposed in a second optical-path portion of at least one of the first and second optical paths to form a second optical path length difference between the first and second optical paths in the light-sending system, wherein said second optical-path portion passes through the light-sending system.

4. The device according claim 1 , wherein the phase-difference imparting member comprises an auxiliary optically-transmissive member disposed in an auxiliary optical-path portion of at least one of i) a first optical path of the first light and ii) a second optical path of the second light to form an auxiliary optical path length difference between the first and second optical paths in the light-sending system, wherein said second auxiliary optical-path portion passes through the light-sending system.

5. The device according to claim 1 , wherein the light divider comprises a diffractive member arranged at a position that is optically-conjugate to the surface of the workpiece.

6. The device according to claim 5 , wherein the projection system includes a spatial filter configured to receive and transmit diffracted light corresponding to positive and negative non-zero orders of diffraction formed at the diffraction member, and to block light representing the zeroth-order of diffraction formed at the diffraction member.

7. The device according to claim 6 , wherein the spatial filter is configured to receive, from the diffraction member, partial diffracted light representing positive and negative first orders of light diffracted at the diffraction member, and to transmit said partial diffracted light.

8. The device according to claim 1 , wherein the surface of the workpiece and a detecting surface of the detector are optically-conjugate surfaces.

9. A lithographic exposure apparatus configured to expose the workpiece, the apparatus comprising:
the device according to claim 1 , configured to generate a surface position output;
a substrate stage dimensioned to hold the workpiece and to change an orientation of the workpiece; and
a controller configured to control the orientation of the workpiece based on the surface position output.

10. A device manufacturing method comprising:
exposing a circuit pattern on the workpiece by using the lithographic exposure apparatus according to claim 9 to form a transferred pattern on the workpiece;
developing the workpiece that contains the transferred pattern to form a mask layer having a form corresponding to the circuit pattern; and
processing a surface of the workpiece via the mask layer.

11. The device of claim 1 , wherein
the projection system is configured to project the first light and the second light so as to form the first intensity distribution to have constant brightness.

12. The device according to claim 11 , wherein the phase-difference reducing member includes a first optically-transmissive member disposed in a first optical-path portion of at least one of i) a first optical path of the first light and ii) a second optical path of the second light to define a first optical path length difference between the first and second optical paths in the light receiving system, wherein the first optical-path portion passes through the light-receiving system.

13. The device according claim 12 , wherein the phase-difference imparting member comprises a second optically-transmissive member disposed in a second optical-path portion of at least one of the first and second optical paths to form a second optical path length difference between the first and second optical paths in the light-sending system, wherein said second optical-path portion passes through the light-sending system.

14. The device according claim 11 , wherein the phase-difference imparting member comprises an auxiliary optically-transmissive member disposed in an auxiliary optical-path portion of at least one of i) a first optical path of the first light and ii) a second optical path of the second light to form an auxiliary optical path length difference between the first and second optical paths in the light-sending system, wherein said second optical-path portion passes through the light-sending system.

15. A lithographic exposure apparatus configured to expose the substrate, the apparatus comprising:
the device according to claim 11 , configured to generate a surface position output;
a substrate stage dimensioned to hold the workpiece and to change an orientation of the workpiece; and
a controller configured to control the orientation of the workpiece based on the surface position output.

16. A device manufacturing method comprising:
exposing a circuit pattern on the workpiece by using the lithographic exposure apparatus according to claim 15 to form a transferred pattern on the workpiece;
developing the workpiece that contains the transferred pattern to form a mask layer having a form corresponding to the circuit pattern; and
processing a surface of the workpiece via the mask layer.

17. The device of claim 1 ,
wherein an optical axis of the projection system corresponds to a reflection of an optical axis of the light-condensing system.

18. The device according to claim 17 , wherein the phase-difference reducing member includes a first optically-transmissive member disposed in a first optical-path portion of at least one of i) a first optical path of the first light and ii) a second optical path of the second light to define a first optical path length difference between the first and second optical paths in the light receiving system, wherein the first optical-path portion passes through the light-receiving syst

Assignees

• Nikon Corp

Inventors

• Smith Daniel Gene
• Goodwin Eric Peter

Classifications

• G01B11/0608

  Height gauges · CPC title

• G01B11/25 Primary

  by projecting a pattern, e.g. {one or more lines,} moiré fringes on the object (G01B11/255 takes precedence {; image analysis for depth or shape recovery G06T7/50}) · CPC title

• G03F7/70641

  Focus · CPC title