Patterning transition metals in integrated circuits
US-9299638-B2 · Mar 29, 2016 · US
US10793965B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10793965-B2 |
| Application number | US-201716327732-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 29, 2017 |
| Priority date | Aug 29, 2016 |
| Publication date | Oct 6, 2020 |
| Grant date | Oct 6, 2020 |
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A method creating a patterned film with cuprous oxide and light comprising the steps of electrodepositing copper from a solution onto a substrate; illuminating selected areas of said deposited copper with light having photon energies above the band gap energy of 2.0 eV to create selected illuminated sections and non-illuminated sections; and stripping non-illuminated sections leaving said illuminated sections on the substrate. An additional step may include galvanically replacing the copper with one or more noble metals.
Opening claim text (preview).
What is claimed is: 1. A method of creating a patterned film with cuprous oxide (Cu 2 O) and light comprising the steps of: (a) electrodepositing cuprous oxide from a solution comprising copper ions onto a substrate; (b) illuminating selected areas of said deposited cuprous oxide with light having photon energies above the band gap energy of 2.0 eV to create selected illuminated sections and non-illuminated sections; and (c) stripping cuprous oxide from said non-illuminated sections leaving said deposited cuprous oxide on said illuminated sections of the substrate. 2. The method of claim 1 wherein the substrate is a transparent, conductive substrate. 3. The method of claim 1 wherein the substrate is a non-transparent, conductive substrate. 4. The method of claim 1 wherein the pattern is made from Cu 2 O having chemically distinct phases. 5. The method of claim 1 wherein the pattern is a film having features including sub-millimeter features. 6. The method of claim 1 wherein Cu 2 O is galvanically replaced with a noble metal and said Cu 2 O is reduced back to soluble Cu ions. 7. The method of claim 6 wherein said noble metal is Au. 8. The method of claim 6 wherein said noble metal is Ag. 9. The method of claim 1 wherein stripping occurs after illumination. 10. The method of claim 1 wherein stripping occurs during illumination. 11. The method of claim 1 wherein stripping occurs in-between illumination. 12. The method of claim 1 wherein a projector is used to illuminate selected areas of said deposited cuprous oxide. 13. The method of claim 1 wherein a light source and a mask located a spaced distance from said deposited cuprous oxide are used to illuminate selected areas of said deposited cuprous oxide. 14. The method of claim 13 wherein the surface of the substrate on which the cuprous oxide is deposited is illuminated. 15. The method of claim 1 wherein a light source and a mask located on a transparent substrate are used to illuminate selected areas of said deposited cuprous oxide. 16. The method of claim 15 wherein an opposing located surface of the substrate on which the cuprous oxide is deposited is illuminated. 17. The method of claim 1 wherein steps (a)-(c) are repeated.
Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title
Electrolytic deposition, i.e. electroplating; Electroless plating · CPC title
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