Film forming apparatus with cover which minimizes debris in the chamber

Patent metadata

Field	Value
Publication number	US-10793948-B2
Application number	US-201815975976-A
Country	US
Kind code	B2
Filing date	May 10, 2018
Priority date	Aug 29, 2017
Publication date	Oct 6, 2020
Grant date	Oct 6, 2020

Abstract

A film forming apparatus, including a base having a first chamber, an upper cover for at least covering an opening of the first chamber, and a first seal ring between the upper cover and the base, wherein the upper cover has an inclined slope, an orthographic projection of the slope in a plane where a bottom surface of the base is located overlaps with a region surrounded by an orthographic projection of the first seal ring in the plane where the bottom surface of the base is located, the orthographic projection of the slope is located is outside an orthogonal projection of the first chamber, and a portion of the slope close to the first chamber is away from the bottom surface of the base with respect to a portion of the slope away from the first chamber.

First claim

What is claimed is:

1. A film forming apparatus, comprising:
a base having a first chamber;
an upper cover for at least covering an opening of the first chamber; and
a first seal ring between the upper cover and the base,
wherein the upper cover has an inclined slope, an orthographic projection of the inclined slope in a plane where a bottom surface of the base is located overlaps with a region surrounded by an orthographic projection of the first seal ring in the plane where the bottom surface of the base is located, the orthographic projection of the inclined slope in the plane where the bottom surface of the base is located is outside an orthogonal projection of the first chamber in the plane where the bottom surface of the base is located, and a portion of the inclined slope close to the first chamber is away from the bottom surface of the base with respect to a portion of the inclined slope away from the first chamber,
wherein the orthographic projection of the first seal ring in the plane where the bottom surface of the base is located is outside a region surrounded by the orthographic projection of the inclined slope in the place where the bottom surface of the base is located, the film forming apparatus further comprises: a second seal ring located between the upper cover and the base, and the orthographic projection of the inclined slope in the plane where the bottom surface of the base is located completely covers an orthogonal projection of the second seal ring in the plane where the bottom surface of the base is located, and
wherein an edge of the upper cover is provided with at least one first electromagnet, and an edge of the base is provided with a second electromagnet in one-to-one correspondence to the first electromagnet, wherein the first electromagnet and the second electromagnet are attracted mutually after being energized for connecting the upper cover and the base.

2. The film forming apparatus according to claim 1 , wherein both the first seal ring and the second seal ring are O-shape seal rings.

3. The film forming apparatus according to claim 2 , wherein a cross-sectional diameter of the second seal ring is greater than that of the first seal ring.

4. The film forming apparatus according to claim 1 , wherein an included angle between the inclined slope and the plane where the bottom surface of the base is located is greater than or equal to 1 degree and less than or equal to 5 degrees.

5. The film forming apparatus according to claim 1 , wherein both the first seal ring and the second seal ring are located on the base.

6. The film forming apparatus according to claim 5 , further comprising:
a vacuum adsorption device;
a dust suction groove arranged on the base, wherein the dust suction groove is located between the first seal ring and the second seal ring; and
a transmission channel provided on the base, wherein one end of the transmission channel is communicated with a groove bottom of the dust suction groove and the other end of the transmission channel is communicated with the vacuum adsorption device.

7. The film forming apparatus according to claim 1 , further comprising:
a first power supply device, for supplying a current to the first electromagnet; and
a second power supply device, for supplying a current to the second electromagnet.

8. The film forming apparatus according to claim 1 , wherein the second electromagnet is located between the first seal ring and the second seal ring.

Assignees

• Boe Technology Group Co Ltd

Inventors

• Zhao Lihao
• Tian Biao

Classifications

• H01J37/32807

  Construction (includes replacing parts of the apparatus) · CPC title

• C23C16/4409 Primary

  characterised by sealing means · CPC title

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• H01J37/32513

  Sealing means, e.g. sealing between different parts of the vessel · CPC title

• F16K3/186

  by means of cams of wedge from · CPC title