Film forming apparatus with cover which minimizes debris in the chamber
US-10793948-B2 · Oct 6, 2020 · US
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Patent family 60204635
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 60204635 |
| Family type | — |
| Earliest priority | Aug 29, 2017 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10793948B2 — Film forming apparatus with cover which minimizes debris in the chamber |
Representative publication
Best representative member for this family based on priority and filing country.
US10793948B2 — Film forming apparatus with cover which minimizes debris in the chamber (published Oct 6, 2020)
Member publications
Related publications in this family.
Film forming apparatus
US-2019062906-A1 · Feb 28, 2019 · US