Substrate carrier

Patent metadata

Field	Value
Publication number	US-10790176-B2
Application number	US-201816012045-A
Country	US
Kind code	B2
Filing date	Jun 19, 2018
Priority date	Oct 30, 2017
Publication date	Sep 29, 2020
Grant date	Sep 29, 2020

Abstract

A substrate carrier may include a carrier body and a first sensor unit. The carrier body may include an internal space, an inlet port and an outlet port. The internal space may be configured to receive a substrate. A purge gas may be introduced into the internal space through the inlet port. A gas in the internal space may be exhausted through the outlet port. The first sensor unit may be at the outlet port and configured to detect environmental properties of the internal space in real time. Thus, a generation or cause of a contaminant in the carrier body may be accurately identified.

First claim

What is claimed is:

1. A substrate carrier comprising:
a carrier body including an internal space, an inlet port and an outlet port, the internal space configured to receive a substrate, the inlet port configured to introduce a purge gas into the internal space therethrough, and the outlet port configured to exhaust a gas from the internal space;
a first sensor unit in the outlet port and configured to detect environmental properties of the internal space in real time;
an outlet filter in the outlet port; and
an outlet filter housing in the outlet port,
wherein the first sensor unit and the outlet filter are in the outlet filter housing, and
the outlet filter is between the internal space and the first sensor unit.

2. The substrate carrier of claim 1 , wherein the outlet filter is configured to allow the gas in the internal space to pass to the first sensor unit and block a liquid in the internal space from reaching the first sensor unit.

3. The substrate carrier of claim 1 , further comprising an inlet filter in the inlet port and configured to allow the purge gas to be introduced into the internal space and block a liquid from reaching the internal space.

4. The substrate carrier of claim 1 , wherein the outlet port is at a bottom surface of the carrier body and protrudes upwardly from the bottom surface of the carrier body.

5. The substrate carrier of claim 1 , wherein the inlet port is at a bottom surface of the carrier body and protrudes upwardly from the bottom surface of the carrier body.

6. The substrate carrier of claim 1 , wherein the first sensor unit comprises:
a temperature sensor configured to detect a temperature of the internal space;
a contaminant sensor configured to detect a contaminant in the internal space; and
a humidity sensor configured to detect a humidity of the internal space.

7. The substrate carrier of claim 6 , wherein the first sensor unit further comprises a vibration sensor configured to detect a vibration of the carrier body.

8. The substrate carrier of claim 1 , further comprising a control unit configured to control operations of the first sensor unit and introduction of the purge gas through the inlet port in accordance with information relating to the environmental properties of the internal space detected by the first sensor unit.

9. The substrate carrier of claim 8 , wherein the control unit comprises:
a controller configured to control the operations of the first sensor unit;
a memory configured to store the information relating to the environmental properties of the internal space; and
a transmitter or transceiver configured to transmit the information relating to the environmental properties of the internal space to a main controller that is configured to control the introduction of the purge gas,
wherein the main controller is under a bottom surface of the carrier body.

10. The substrate carrier of claim 8 , wherein the control unit is connected to the carrier body and under a bottom surface of the carrier body.

11. The substrate carrier of claim 8 , further comprising a battery configured to supply power to the control unit, wherein the battery is optionally under a bottom surface of the carrier body.

12. The substrate carrier of claim 1 , further comprising:
a second sensor unit at a lower region of the internal space and configured to detect environmental properties of the lower region in real time; and
a third sensor unit at an upper region of the internal space and configured to detect environmental properties of the upper region in real time.

13. The substrate carrier of claim 12 , further comprising a fourth sensor unit at a central region of the internal space and configured to detect environmental properties of the central region in real time.

14. The substrate carrier of claim 13 , wherein the second sensor unit, the third sensor unit and the fourth sensor unit are connected to an inner surface of the carrier body.

15. The substrate carrier of claim 13 , wherein the second sensor unit, the third sensor unit and the fourth sensor unit are connected to a snorkel vertically arranged in the carrier body and connected to the inlet port.

16. A substrate carrier comprising:
a carrier body including an internal space, an inlet port and an outlet port, the internal space configured to receive a substrate, the inlet port at a bottom surface of the carrier body and configured to introduce a purge gas into the internal space therethrough, and the outlet port at the bottom surface of the carrier body and configured to exhaust a gas from the internal space;
a first sensor system in the outlet port and configured to detect environmental properties of the internal space in real time;
an outlet filter in the outlet port and configured to allow the gas exhausted from the internal space to reach the first sensor system and block a liquid in the internal space from reaching the first sensor system;
a control system under the bottom surface of the carrier body and configured to control operations of the first sensor system and introduction of the purge gas through the inlet port in accordance with information relating to the environmental properties of the internal space; and
a battery under the bottom surface of the carrier body and configured to supply power to the control system,
wherein the outlet port protrudes upwardly from the bottom surface of the carrier body,
an outlet filter housing is in the outlet port,
the first sensor system and the outlet filter are in the outlet filter housing, and
the outlet filter is between the internal space and the first sensor system.

17. The substrate carrier of claim 16 , wherein the first sensor system comprises:
a temperature sensor configured to detect a temperature of the internal space;
a contaminant sensor configured to detect a contaminant in the internal space;
a humidity sensor configured to detect a humidity of the internal space; and
a vibration sensor configured to detect a vibration of the carrier body.

18. The substrate carrier of claim 16 , wherein the control system comprises:
a controller configured to control the operations of the first sensor system;
a memory configured to store the information relating to the environmental properties of the internal space; and
a transmitter or transceiver configured to transmit the information relating to the environmental properties of the internal space to a main controller that is configured to control the introduction of the purge gas.

19. The substrate carrier of claim 16 , further comprising:
a second sensor system at a lower region of the internal space and configured to detect environmental properties of the lower region in real time;
a third sensor system an upper region of the internal space and configured to detect environmental properties of the upper region in real time; and
a fourth sensor system at a central region of the internal space and configured to detect environmental properties of the central region in real time.

20. A substrate carrier comprising:
a carrier body defining an internal space;
an inlet port at a lower wall of the carrier body, the inlet port configured to inject purge gas therethrough into the internal space;
an outlet port at the lower wall of the carrier body, the outlet port configured to exhaust the purge gas from the internal space;
a sensor system in the outlet port that is configured to detect at least one environmental property in or of the internal space;
an outlet filter in the outlet port

Assignees

• Samsung Electronics Co Ltd

Inventors

• Bae Du-Sik
• Lim Hang-Ryong
• Ko Se-Won
• Lee Yoon-Mi
• Kim Jin-Ho
• Park Jung-Dae
• Lee Min-Seon
• Lee Yeong-Cheol

Classifications

• H10P72/1926

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H10P72/1906

  specially adapted for containing masks, reticles or pellicles · CPC title

• H10P72/1902

  specially adapted for a single substrate · CPC title

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0604 Primary

  Process monitoring, e.g. flow or thickness monitoring · CPC title