High speed rotary sorter

Patent metadata

Field	Value
Publication number	US-10777436-B2
Application number	US-201615307323-A
Country	US
Kind code	B2
Filing date	Apr 5, 2016
Priority date	Apr 29, 2015
Publication date	Sep 15, 2020
Grant date	Sep 15, 2020

Abstract

Embodiments of the present disclosure generally relate to expandable substrate inspection systems. The inspection system includes multiple metrology units adapted to inspect, detect, or measure one or more characteristics of a substrate, including thickness, resistivity, saw marks, geometry, stains, chips, micro cracks, and crystal fraction. The inspection systems may be utilized to identify defects on substrates and estimate cell efficiency prior to processing a substrate. Substrates may be transferred through the inspection system and/or between metrology units on a track or conveyor, and then sorted via at least one gripper coupled with the high speed rotatory sorting apparatus into respective bins based upon the inspection data. The rotary sorting apparatus maintains a sorting capability of at least 5,400 substrates per hour. Each bin may optionally have a gas support cushion for supporting the substrate as it falls from the rotary sorting apparatus into the respective bin.

First claim

What is claimed is:

1. An apparatus for inspecting and sorting a plurality of substrates, the apparatus comprising:
a sorting unit;
a rotatable support disposed within the sorting unit, the rotatable support rotatable about a rotational axis;
a plurality of arms, each arm having a first end coupled to the rotatable support and a second end extending radially outward from the rotatable support relative to the rotational axis;
at least one gripper coupled to the second end of each arm; and
a plurality of bins positioned within the sorting unit below a path along which the at least one gripper travels as the rotatable support rotates, wherein the bins are respectively associated with predefined substrate characteristics, and wherein the sorting unit is configured to sort the plurality of substrates into the plurality of bins according to substrate characteristics determined by testing the substrates, wherein the sorting unit is configured to release a first substrate of the plurality of substrates into a first bin of the plurality of bins associated with the substrate characteristics of the first substrate, wherein the sorting unit is configured to continue to rotate the first substrate when no bins of the plurality of bins disposed below the path are available to receive the first substrate until a bin associated with the tested substrate characteristics of the first substrate becomes available below the path, wherein the plurality of bins comprise a plurality of gas outlets operable to generate a gas support cushion within the plurality of bins.

2. The apparatus of claim 1 , wherein the at least one gripper is a Bernoulli picker.

3. The apparatus of claim 1 , wherein the at least one gripper is a contactless gripper.

4. The apparatus of claim 1 , further comprising a loading unit coupled with a metrology unit, wherein the metrology unit is coupled with the sorting unit.

5. The apparatus of claim 1 , wherein the plurality of bins are positioned to receive substrates released by the at least one gripper.

6. The apparatus of claim 1 , wherein the plurality of bins are individually removable from outside the sorting unit, and wherein the plurality of bins may be individually removed while sorting is occurring.

7. The apparatus of claim 1 , further comprising a controller, wherein the controller comprises a computer-readable medium storing instructions that, when executed by a processor, cause the controller to sort the plurality of substrates, by performing the steps of:
holding the substrate with at least one gripper of the sorting module;
rotating the substrate held by the at least one gripper about a center axis of the sorting unit to a location above the sorting bin assigned to the substrate; and
releasing the substrate from the at least one gripper into the assigned sorting bin.

8. An apparatus for inspecting and sorting a plurality of substrates, the apparatus comprising:
a sorting unit;
a rotatable support disposed within the sorting unit, the rotatable support rotatable about a rotational axis;
a plurality of arms, each arm having a first end coupled to the rotatable support and a second end extending radially outward from the rotatable support relative to the rotational axis;
at least one gripper coupled to the second end of each arm; and
a plurality of bins positioned within the sorting unit below a path along which the at least one gripper travels as the rotatable support rotates, wherein at least one bin of the plurality of bins comprises a plurality of gas outlets operable to generate a gas support cushion within the at least one bin.

9. An apparatus adapted to inspect and sort a plurality of substrates, comprising:
a loading unit;
a metrology unit coupled with the loading unit; and
a sorting unit coupled with the metrology unit, wherein the sorting unit comprises:
a plurality of arms extending radially outward from an axis of rotation;
at least one gripper coupled to and end of each arm; and
a plurality of individually removable sorting bins positioned within the sorting unit, below a path along which the at least one gripper travels as the at least one gripper rotates, wherein the individually removable sorting bins are respectively associated with predefined substrate characteristics, and wherein the sorting unit is configured to sort the plurality of substrates into the plurality of individually removable sorting bins according to substrate characteristics determined by testing the substrates in the metrology unit, wherein the sorting unit is configured to release a first substrate of the plurality of substrates into a first bin of the plurality of individually removable sorting bins associated with the substrate characteristics of the first substrate, wherein the sorting unit is configured to continue to rotate the first substrate when no bins of the plurality of individually removable sorting bins disposed below the path are available to receive the first substrate until a bin associated with the tested substrate characteristics of the first substrate becomes available below the path, wherein at least one bin of the plurality of individually removable sorting bins comprises a plurality of gas outlets operable to generate a gas support cushion within the at least one bin.

10. The apparatus of claim 9 , further comprising a controller, wherein the controller comprises a computer-readable medium storing instructions that, when executed by a processor, cause the controller to sort the substrates, by performing the steps of:
holding the substrate with at least one gripper of the sorting module;
rotating the substrate held by the at least one gripper about a center axis of the sorting unit to a location above the sorting bin assigned to the substrate; and
releasing the substrate from the at least one gripper into the assigned sorting bin.

11. The apparatus of claim 9 , wherein the at least one gripper is a Bernoulli picker.

12. The apparatus of claim 9 , wherein the at least one gripper is a contactless gripper.

13. The apparatus of claim 9 , wherein the plurality of individually removable sorting bins are positioned to receive substrates released by the at least one gripper.

14. The apparatus of claim 9 , wherein each of the plurality of individually removable sorting bins are removable from outside the sorting unit.

15. An apparatus adapted to inspect and sort substrates, comprising:
a loading unit;
a metrology unit coupled with the loading unit; and
a sorting unit coupled with the metrology unit, wherein the sorting unit comprises:
a plurality of arms extending radially outward from an axis of rotation;
at least one gripper coupled to and end of each arm; and
a plurality of individually removable sorting bins positioned within the sorting unit, below a path along which the at least one gripper travels as the at least one gripper rotates, wherein each individually removable sorting bin comprises a plurality of gas outlets operable to generate a pressurized gas support cushion within the individually removable sorting bin.

16. A method of operating an apparatus for inspecting and sorting a plurality of substrates in an enclosure, the method comprising:
loading a substrate into a loading unit of the enclosure;
transferring the substrate into a metrology unit of the enclosure;
performing a metrology process on the substrate in the metrology unit;
assigning the substrate to a sorting bin based on a result of the metrology process performed; and
transferring the substrate to a sorting unit, wherein in the transferring comprises:
holding the substrate w

Assignees

• Applied Materials Inc

Inventors

• Stopper Markus J
• Schlezinger Asaf

Classifications

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P72/3404

  Storage means · CPC title

• H10P72/3402

  Mechanical parts of transfer devices · CPC title

• H10P72/78

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/0611 Primary

  Sorting devices · CPC title