Nanopatterned biosensor electrode for enhanced sensor signal and sensitivity

Patent metadata

Field	Value
Publication number	US-10775335-B2
Application number	US-201816169635-A
Country	US
Kind code	B2
Filing date	Oct 24, 2018
Priority date	Jan 30, 2017
Publication date	Sep 15, 2020
Grant date	Sep 15, 2020

Abstract

Methods for forming an electrode structure, which can be used as a biosensor, are provided in which the electrode structure has non-random topography located on one surface of an electrode base. In some embodiments, an electrode structure is obtained that contains no interface between the non-random topography of the electrode structure and the electrode base of the electrode structure. In other embodiments, electrode structures are obtained that have an interface between the non-random topography of the electrode structure and the electrode base of the electrode structure.

First claim

What is claimed is:

1. A method of forming an electrode structure, the method comprising:
providing an electrode base having an electrode base shape on a substrate;
forming a patterned material layer on and surrounding the electrode base, wherein the patterned material layer contains openings that physically expose the electrode base and define a nanotopography shape of the electrode structure;
forming a metallic seed layer on the physically exposed surfaces of the electrode base and within the openings;
electroplating a conductive metal-containing material on the metallic seed layer and within the openings to provide the electrode structure comprising the electrode base having the electrode base shape and the conductive metal-containing material having the nanotopography shape;
removing the patterned material layer; and
attaching a biological functionalization material to the electrode structure.

2. The method of claim 1 , wherein the patterned material layer is composed of a dielectric material, and the substrate is composed of a semiconductor material.

3. The method of claim 1 , wherein the patterned material layer is composed of a photoresist material, and the substrate is composed of a semiconductor material.

4. The method of claim 1 , further comprising: removing the substrate, wherein the removing of the substrate is performed between the removing of the patterned material layer and the attaching of the biological functionalization material to the electrode structure.

5. The method of claim 1 , wherein the metallic seed layer and the conductive metal-containing material comprise a same metal or metal alloy.

6. The method of claim 1 , wherein the biological functionalization material is composed of an oligonucleotide, a nucleic acid, a peptide, a ligand, a protein, an enzyme, or any other material apt to bind with a complementary target biomolecule.

7. The method of claim 6 , wherein the biological functionalization material is composed of glucose oxidase or glucose dehydrogenase.

8. The method of claim 1 , wherein an interface is present between the electrode base shape and the nanotopography shape.

9. The method of claim 1 , wherein the providing of the electrode base having the electrode base shape comprises:
depositing a conductive material on the substrate; and
patterning the conductive material.

10. The method of claim 9 , wherein the conductive material is a conductive metal-containing material selected from an elemental metal and an alloy containing one of more elemental metals.

11. The method of claim 10 , wherein the elemental metal is platinum, copper, silver, gold, tungsten, aluminum, iron, palladium, nickel, titanium or zirconium.

12. The method of claim 1 , wherein the forming of the metallic seed layer comprises a selective deposition process.

13. The method of claim 1 , wherein the conductive metal-containing material has a topmost surface that is coplanar with a topmost surface of the patterned material layer.

14. The method of claim 13 , wherein the electroplating of the conductive metal-containing material further comprises removing excess conductive metal-containing material that extends outside of the openings.

15. The method of claim 14 , wherein the removing of the excess conductive metal-containing material comprises a planarization process or an etch back process.

16. The method of claim 1 , wherein the removing of the patterned material layer comprises recessing the patterned material layer to physically expose a topmost surface of the electrode structure, while maintaining said patterned material layer along the sidewalls of the electrode structure.

17. The method of claim 1 , wherein the removing of the patterned material layer comprises a reactive ion etch or a chemical wet etch.

18. A method of forming an electrode structure, the method comprising:
providing an electrode base having an electrode base shape on a substrate;
forming a patterned material layer on and surrounding the electrode base, wherein the patterned material layer contains openings that physically expose the electrode base and define a nanotopography shape of the electrode structure;
electroplating a conductive metal-containing material within the openings to provide the electrode structure comprising the electrode base having the electrode base shape and the conductive metal-containing material having the nanotopography shape;
removing the patterned material layer; and
attaching a biological functionalization material to the electrode structure.

19. The method of claim 18 , further comprising: removing the substrate, wherein the removing of the substrate is performed between the removing of the patterned material layer and the attaching of the biological functionalization material to the electrode structure.

20. The method of claim 18 , wherein an interface is present between the electrode base shape and the nanotopography shape.

Assignees

• IBM

Inventors

• Kinser Emily R

Classifications

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• B81C1/00539

  Wet etching · CPC title

• B81C1/00531

  Dry etching · CPC title

• B81C1/00206

  Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties · CPC title

• B81C1/00111

  Tips, pillars, i.e. raised structures (microneedles A61M37/0015) · CPC title