Piezoelectric resonator device

Patent metadata

Field	Value
Publication number	US-10771037-B2
Application number	US-201615561037-A
Country	US
Kind code	B2
Filing date	Feb 5, 2016
Priority date	Mar 27, 2015
Publication date	Sep 8, 2020
Grant date	Sep 8, 2020

Abstract

A piezoelectric resonator device having a sandwich structure is provided, which is stably bonded to an external element. In the piezoelectric resonator device 1, at least a vibrating part 21 of a piezoelectric substrate 2 is sealed by a first sealing member 3 and a second sealing member 4. The piezoelectric substrate 2 includes: the vibrating part 21; and an external frame part 23 that is thicker than the vibrating part 21 and that surrounds the outer periphery of the vibrating part 21. External electrodes 31 to be connected to an external element 5 are provided on at least one of the first sealing member 3 and the second sealing member 4. The external element 5 is connected to the external electrodes 31 at least on the external frame part 23 of the piezoelectric substrate 2.

First claim

The invention claimed is:

1. A piezoelectric resonator device, comprising:
a piezoelectric substrate including a vibrating part configured to piezoelectrically vibrate by application of a voltage and an external frame part thicker than the vibrating part and which surrounds an outer periphery of the vibrating part;
a first sealing member covering a first main surface of the piezoelectric substrate so as to seal the vibrating part;
a second sealing member covering a second main surface of the piezoelectric substrate so as to seal the vibrating part;
a first excitation electrode and a second excitation electrode on the vibrating part of the piezoelectric substrate; and
external electrodes on at least one of the first sealing member and the second sealing member, the external electrodes being connected to an external element, and wherein the external element is connected to the external electrodes at least on the external frame part of the piezoelectric substrate,
wherein a first external electrode is connected to the first excitation electrode and a second external electrode is connected to the second excitation electrode in the absence of castellation,
wherein the external electrodes are connected to the external element via metal bumps,
wherein the external electrodes include at least an external electrode for a first excitation electrode and an external electrode for a second excitation electrode connected respectively to a pair of first excitation electrode and second excitation electrode formed on the vibrating part of the piezoelectric substrate,
wherein only the metal bump connecting the external electrode for the first excitation electrode to the external element is disposed at a position superimposed to a first wiring connecting the first excitation electrode to the external electrode for the first excitation electrode in plan view, and
wherein only the metal bump connecting the external electrode for the second excitation electrode to the external element is disposed at a position superimposed to a wiring connecting the second excitation electrode to the external electrode for the second excitation electrode in plan view.

2. The piezoelectric resonator device according to claim 1 ,
further comprising other external electrodes not connected to the first excitation electrode and the second excitation electrode, and
wherein the other external electrodes are disposed at positions not superimposed, in plan view, to: a first wiring connecting the first excitation electrode to the external electrode for the first excitation electrode; and a second wiring connecting the second excitation electrode to the external electrode for the second excitation electrode.

3. The piezoelectric resonator device according to claim 2 ,
wherein the external electrode for the first excitation electrode is disposed at a position not superimposed to the second wiring in plan view, and
wherein the external electrode for the second excitation electrode is disposed at a position not superimposed to the first wiring in plan view.

4. The piezoelectric resonator device according to claim 1 ,
wherein the external electrode for the first excitation electrode and the external electrode for the second excitation electrode are formed at respective positions corresponding to the external frame part of the piezoelectric substrate in plan view, and
wherein the external electrode for the first excitation electrode and the external electrode for the second excitation electrode are used as test terminals for the vibrating part of the piezoelectric substrate.

5. The piezoelectric resonator device according to claim 1 ,
wherein the external electrode for the first excitation electrode and the external electrode for the second excitation electrode are formed at respective positions corresponding to the external frame part of the piezoelectric substrate in plan view, and
wherein the external electrode for the first excitation electrode and the external electrode for the second excitation electrode are used as test terminals for the vibrating part of the piezoelectric substrate.

6. The piezoelectric resonator device according to claim 1 ,
wherein the external electrodes are formed on the first sealing member, and the external element is an IC.

7. A piezoelectric resonator device, comprising:
a piezoelectric substrate including a vibrating part configured to piezoelectrically vibrate by application of a voltage;
a first sealing member covering a first main surface of the piezoelectric substrate so as to seal the vibrating part; and
a second sealing member covering a second main surface of the piezoelectric substrate so as to seal the vibrating part,
the piezoelectric resonator device being configured to seal at least the vibrating part of the piezoelectric substrate by the first sealing member and the second sealing member,
wherein the piezoelectric substrate includes: the vibrating part; and an external frame part configured to be thicker than the vibrating part and to surround an outer periphery of the vibrating part, wherein external electrodes are provided on at least one of the first sealing member and the second sealing member, the external electrodes being connected to an external element via metal bumps at least on the external frame part of the piezoelectric substrate,
wherein the external electrodes include at least an external electrode for a first excitation electrode and an external electrode for a second excitation electrode connected respectively to a pair of first excitation electrode and second excitation electrode formed on the vibrating part of the piezoelectric substrate,
wherein only the metal bump connecting the external electrode for the first excitation electrode to the external element is disposed at a position superimposed to a first wiring connecting the first excitation electrode to the external electrode for the first excitation electrode in plan view, and
wherein only the metal bump connecting the external electrode for the second excitation electrode to the external element is disposed at a position superimposed to a wiring connecting the second excitation electrode to the external electrode for the second excitation electrode in plan view.

8. A piezoelectric resonator device, comprising:
a piezoelectric substrate including a vibrating part configured to piezoelectrically vibrate by application of a voltage;
a first sealing member covering a first main surface of the piezoelectric substrate so as to seal the vibrating part; and
a second sealing member covering a second main surface of the piezoelectric substrate so as to seal the vibrating part,
the piezoelectric resonator device being configured to seal at least the vibrating part of the piezoelectric substrate by the first sealing member and the second sealing member,
wherein the piezoelectric substrate includes: the vibrating part; and an external frame part configured to be thicker than the vibrating part and to surround an outer periphery of the vibrating part,
wherein external electrodes are provided on at least one of the first sealing member and the second sealing member, the external electrodes being connected to an external element, and wherein the external element is connected to the external electrodes at least on the external frame part of the piezoelectric substrate, and
wherein the external electrodes include, at least: an external electrode for a first excitation electrode and an external electrode for a second excitation electrode connected respectively to a pair of first excitation electrode and second excitation electrode formed on the vibrating part of the piezoelectric substrate; and other electrodes not connected to the first excitation electrode and the second

Assignees

• Daishinku Corp

Inventors

• Kojo Takuya
• Ishino Satoru

Classifications

• H10W76/12

  characterised by their shape · CPC title

• H03H9/0547 Primary

  consisting of a vertical arrangement (H03H9/0566 takes precedence) · CPC title

• H03H9/0595

  the holder support and resonator being formed in one body · CPC title

• H03H9/1035

  the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device · CPC title

• H03H9/173

  Air-gaps · CPC title