Fluid apparatus

Patent metadata

Field	Value
Publication number	US-10767802-B2
Application number	US-201815909019-A
Country	US
Kind code	B2
Filing date	Mar 1, 2018
Priority date	Mar 3, 2017
Publication date	Sep 8, 2020
Grant date	Sep 8, 2020

Abstract

Provided is a plug device which includes: a body portion; and a valve element portion. A fluid flow passage is formed in the body portion. The fluid flow passage extends along an axis, and has a valve hole at one end thereof. The valve element portion is accommodated in the body portion in an advancing and retracting manner along the axis. A proximal end portion of the valve element portion is made of a conductive fluororesin material containing a fluororesin material and carbon nanotubes dispersed in the fluororesin material. The proximal end portion is conductive with a conductive member maintained at a ground potential. A volume resistivity of the conductive fluororesin material falls within a range of larger than 1.0x×10 3 Ω·cm and less than 1.0×10 4 Ω·cm.

First claim

The invention claimed is:

1. A fluid apparatus that is installed in a piping through which a fluid used in a semiconductor manufacturing apparatus is allowed to flow, the fluid apparatus comprising:
a body portion in which a fluid flow passage is formed, the fluid flow passage extending along an axis, and having a valve hole at one end of the fluid flow passage; and
a valve element portion accommodated in the body portion in an advancing and retracting manner along the axis,
wherein at least a portion of the valve element portion is made of a conductive fluororesin material containing a fluororesin material and carbon nanotubes dispersed in the fluororesin material, and is conductive with a grounding portion maintained at a ground potential,
wherein a volume resistivity of the conductive fluororesin material falls within a range of larger than 1.0×10 3 Ω·cm and less than 1.0×10 4 Ω·cm,
wherein the valve element portion has a tubular shape conforming to an inner peripheral surface of the body portion, the valve element portion comprising:
a distal end portion, inserted into the valve hole, made of a non-conductive fluororesin material containing no carbon nanotubes; and
a proximal end portion made of the conductive fluororesin material, the proximal end having:
an inner space in communication with an other end of the fluid flow passage; and
a flow hole allowing a fluid to flow between the inner space and the valve hole,

wherein the body portion includes:
a first body portion configured to support an outer peripheral surface of the valve element portion on a distal end side; and
a second body portion configured to support an outer peripheral surface of the valve element portion on a proximal end side, the second body portion being disposed on an inner peripheral side of the first body portion,

wherein the first body portion is made of a non-conductive fluororesin material containing no carbon nanotubes, and
wherein the second body portion is made of the conductive fluororesin material, and is in contact with both a portion of the valve element portion, which is made of the conductive fluororesin material, and the grounding portion.

2. The fluid apparatus according to claim 1 , wherein the conductive fluororesin material contains carbon nanotubes at a ratio of 0.020 weight % or more and 0.030 weight % or less.

3. The fluid apparatus according to claim 2 , further comprising:
a biasing force generating portion configured to generate a biasing force in a direction that the valve element portion is inserted into the valve hole.

4. The fluid apparatus according to claim 1 , further comprising:
a biasing force generating portion configured to generate a biasing force in a direction that the valve element portion is inserted into the valve hole.

5. The fluid apparatus according to claim 1 , wherein the grounding portion is a metal member mounted on an end portion of the proximal end side of the body portion in a state of being in contact with the second body portion and is maintained at a ground potential.

6. The fluid apparatus according to claim 1 , wherein the distal end portion of the valve element portion is integrally formed with the proximal end portion of the valve element portion, the distal end portion being made of a non-conductive fluororesin material containing no carbon nanotubes and the proximal end portion being made of the conductive fluororesin material.

Assignees

• Surpass Ind Co Ltd

Inventors

• Hasunuma Masahiro

Classifications

• C08L27/18

  Homopolymers or copolymers or tetrafluoroethene · CPC title

• C08K3/041

  Carbon nanotubes · CPC title

• F16L37/23

  by means of balls · CPC title

• F16L37/34 Primary

  at least one of the lift valves being of the sleeve type, i.e. a sleeve being telescoped over an inner cylindrical wall · CPC title

• C08L27/24

  halogenated · CPC title