Composition for forming a coating type silicon-containing film, substrate, and patterning process
US-2016096977-A1 · Apr 7, 2016 · US
US10767017B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10767017-B2 |
| Application number | US-201715855291-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 27, 2017 |
| Priority date | Dec 28, 2016 |
| Publication date | Sep 8, 2020 |
| Grant date | Sep 8, 2020 |
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A resin composition including a silicon-containing resin component and a solvent, the silicon-containing resin component including at least one of (I) and (II) mentioned below, the solvent including at least one of a terpene compound having at least one of a hydroxy group and an acetoxy group, and a cyclic skeleton-containing acetate compound (excluding the terpene compound): (I) a polysilane-polysiloxane resin having a polysilane structure and a polysiloxane structure, and (II) a mixture of a resin having a polysilane structure and a resin having a polysiloxane structure.
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What is claimed is: 1. A resin composition comprising a silicon-containing resin component and a solvent, wherein the silicon-containing resin component comprises (II) a mixture of a resin having a polysilane structure (II-1) and a resin having a polysiloxane structure (II-2), and the solvent comprises a terpene compound having at least one group selected from the group consisting of a hydroxy group and an acetoxy group, wherein the polysiloxane structures (II-2) comprises a hydrolyzed and condensed structure of at least one silicon compound selected from the group consisting of silicon compounds represented by the following general formulas (A-1-1) to (A-1-4): R 1 R 2 R 3 SiX 1 (A-1-1) R 4 R 5 SiX 2 2 (A-1-2) R 6 SiX 3 3 (A-1-3) SiX 4 4 (A-1-4) wherein X 1 to X 4 are each independently a hydrolyzable group, and wherein R 1 , R 2 , R 3 , R 4 , R 5 , and R 6 are each independently a hydrogen atom or an organic group, and hydrogen atoms in the organic group may be substituted with a halogen atom, and wherein the polysilane structure (II-1) comprises a structure corresponding to at least one selected from the group consisting of polysilane compounds represented by the following general formulas (A-2-1) and (A-2-2): (R 7 R 8 R 9 Si) a1 (R 10 R 11 Si) a2 (R 12 Si) a3 (Si) a4 (A-2-1) wherein R 7 , R 8 , R 9 , R 10 , R 11 , and R 12 are each independently a hydrogen atom, a hydroxyl group, or a monovalent organic group, Si atoms do not bond to each other via R 7 , R 8 , R 9 , R 10 , R 11 or R 12 , but form an Si—Si bond, and a1, a2, a3, and a4 are each independently a molar fraction, a1+a2+a3+a4=1, 0≤a1≤1, 0≤a2≤1, 0≤a3≤1, and 0≤a4≤1, wherein R a1 and R a2 each independently represents a hydrogen atom, a hydroxyl group, or an organic group, and n represents an integer of 5 to 20. 2. A method for producing the composition according to claim 1 , the method comprising mixing a resin having a polysilane structure with a resin having a polysiloxane structure. 3. A film formation method using the composition according to claim 1 . 4. A cured product of the composition according to claim 1 . 5. The resin composition according to claim 1 , wherein the polysilane structure (II-1) consists essentially of a structures corresponding to at least one type selected from the group consisting of polysilane compounds represented by the general formula (A-2-1) and (A-2-2). 6. The resin composition according to claim 1 , wherein the polysilane structure (II-1) consists essentially of at least one type of polysilane structure represented by the following general formula (B1): wherein, R 10 , R 11 , and R 12 each independently represents a hydrogen atom, a hydroxyl group, or a monovalent organic group, * represents a bond, and Si atoms form an Si—Si bond. 7. The resin composition according to claim 1 , wherein in the general formula (A-2-1), at least one selected from the group consisting of R 7 , R 8 and R 9 is an aryl group, at least one selected from the group consisting of R 10 and R 11 is an aryl group, or R12 is an aryl group, and in the general formula (A-2-2), at least one selected from the group consisting of R a1 and R a2 is an aryl group. 8. The cured product according to claim 4 , the cured product being formed in a film having a thickness of 10 nm to 1500 nm. 9. A resin composition comprising a silicon-containing resin component and a solvent, wherein the silicon-containing resin component comprises (II) a mixture of a resin having a polysilane structure (II-1) and a resin having a polysiloxane structure (II-2), and the solvent comprises at least one solvent selected from the group consisting of a terpene compound having at least one group selected from the group consisting of a hydroxy group and an acetoxy group, and a cyclic skeleton-containing acetate compound (excluding the terpene compound), wherein the polysiloxane structure (II-2) comprises a hydrolyzed and condensed structure of at least one silicon compound selected from the group consisting of silicon compounds represented by the following general formulas (A-1-1) to (A-1-4): R 1 R 2 R 3 SiX 1 (A-1-1) R 4 R 5 SiX 2 2 (A-1-2) R 6 SiX 3 3 (A-1-3) SiX 4 4 (A-1-4) wherein X 1 to X 4 are each independently a hydrolyzable group, and wherein R 1 , R 2 , R 3 , R 4 , R 5 , and R 6 are each independently a hydrogen atom or an organic group, and hydrogen atoms in the organic group may be substituted with a halogen atom, and wherein the polysilane structure (II-1) comprises a structure corresponding to a polysilane compound represented by the following general formula (A-2-2): wherein R a1 and R a2 each independently represents a hydrogen atom, a hydroxyl group, or an organic group, and n represents an integer of 5 to 20. 10. The resin composition according to claim 9 , wherein the cyclic skeleton-containing acetate compound is cycloalkyl acetate represented by the following formula (S1): in the formula (S1), R s1 is an alkyl group, p is an integer of 1 to 6, and q is an integer of 0 to (p+1).
Block or graft copolymers containing polysiloxane sequences (obtained by polymerising a compound having a carbon-to-carbon double bond on to a polysiloxane C09D151/08, C09D153/00) · CPC title
Polysiloxanes · CPC title
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