Substrate processing apparatus and methods with factory interface chamber filter purge

Patent metadata

Field	Value
Publication number	US-10763134-B2
Application number	US-201815905959-A
Country	US
Kind code	B2
Filing date	Feb 27, 2018
Priority date	Feb 27, 2018
Publication date	Sep 1, 2020
Grant date	Sep 1, 2020

Abstract

Electronic device processing apparatus including factory interface chamber with environmental controls and a purge control apparatus allowing purge of a chamber filter. The filter purge apparatus includes a chamber filter and a flushing gas supply configured to supply flushing gas to the chamber filter when an access door to the factory interface chamber is open to allow personnel safe servicing access to the factory interface chamber. The supply of flushing gas to the chamber filter minimizes moisture contamination of the chamber filter by factory ambient air when the access door is open thereby allowing rapid resumption of substrate processing after factory interface servicing. Purge control methods and apparatus are described, as are numerous other aspects.

First claim

What is claimed is:

1. A factory interface apparatus comprising:
a plurality of walls forming a factory interface chamber, the plurality of walls comprising:
a first wall having one or more load ports configured to dock one or more substrate carriers; and
a second wall comprising an access door configured to facilitate personnel access into the factory interface chamber;

an environmental control system coupled to the factory interface chamber and configured to supply a purge gas to control one or more environmental conditions within the factory interface chamber during substrate transfer through the factory interface chamber;
a chamber filter configured to filter the purge gas provided to factory interface chamber; and
a filter purge apparatus configured to supply a flushing gas to a portion of the factory interface chamber located upstream of the chamber filter when the access door is open in order to minimize moisture contamination of the chamber filter by ambient air, wherein the filter purge apparatus is configured to supply the flushing gas in association with the personnel access via the access door into the factory interface chamber or other breach of the factory interface chamber which compromises controlled environment of the factory interface chamber.

2. The factory interface apparatus of claim 1 , wherein the flushing gas is clean dry air.

3. The factory interface apparatus of claim 1 , wherein the purge gas is an inert gas and the flushing gas is clean dry air.

4. The factory interface apparatus of claim 1 further comprising a third wall located opposite the first wall, and wherein the third wall is configured to couple to one or more load locks.

5. The factory interface apparatus of claim 1 , wherein the portion of the factory interface chamber comprises a plenum chamber, and wherein the chamber filter separates the plenum chamber from a second portion of the factory interface chamber that has substrates passing therethrough.

6. The factory interface apparatus of claim 1 , wherein the flushing gas comprises clean dry air having a relative humidity level less than 10% at room temperature.

7. The factory interface apparatus of claim 1 , wherein the portion of the factory interface chamber comprises a plenum chamber, wherein the filter purge apparatus comprises a valve coupled between a clean dry air supply and the plenum chamber, and wherein the valve is configured to control flow of the flushing gas to the chamber filter.

8. The factory interface apparatus of claim 1 , wherein the portion of the factory interface chamber comprises a plenum chamber, the factory interface apparatus further comprising a controller configured to provide a control signal to open flow of the flushing gas into the plenum chamber located upstream of the chamber filter prior to the access door being opened.

9. The factory interface apparatus of claim 1 , wherein the environmental control system is configured to control the one or more environmental conditions within the factory interface chamber, the one or more environmental conditions comprising one or more of:
a relative humidity level;
an amount of O 2 ;
temperature;
an amount of inert gas;
an amount of clean dry air;
an amount of chemical contaminant.

10. The factory interface apparatus of claim 1 , wherein the purge gas comprises an inert gas selected from a group of argon gas, N 2 gas, and helium gas.

11. The factory interface apparatus of claim 1 , wherein the purge gas comprises clean dry air.

12. The factory interface apparatus of claim 1 , wherein the environmental control system comprises a humidity sensor configured to sense a relative humidity level within the factory interface chamber.

13. The factory interface apparatus of claim 1 further comprising an oxygen sensor configured to sense an oxygen level within the factory interface chamber.

14. The factory interface apparatus of claim 1 , wherein the environmental control system comprises a controller configured to cause the purge gas from a purge gas supply to flow into the factory interface chamber through the chamber filter and into the one or more substrate carriers docked to the first wall.

15. A chamber filter purge apparatus comprising:
a factory interface chamber including an access door configured to facilitate personnel access into the factory interface chamber;
a chamber filter configured to filter purge gas provided to the factory interface chamber; and
a filter purge apparatus configured to supply a flushing gas to a portion of the factory interface chamber located upstream of the chamber filter when the access door is opened in order to minimize moisture contamination of the chamber filter from ambient air, wherein the filter purge apparatus is configured to supply the flushing gas in association with the personnel access via the access door into the factory interface chamber or other breach of the factory interface chamber which compromises controlled environment of the factory interface chamber.

16. The chamber filter purge apparatus of claim 15 , wherein the flushing gas comprises clean dry air.

17. The chamber filter purge apparatus of claim 15 , wherein the flushing gas comprises clean dry air having a relative humidity level less than 10% at room temperature.

18. The chamber filter purge apparatus of claim 15 , wherein the flushing gas comprises clean dry air having a relative humidity level less than 5% at room temperature.

19. The chamber filter purge apparatus of claim 15 , wherein the portion of the factory interface chamber comprises a plenum chamber located upstream of the chamber filter and configured to receive the flushing gas from a clean dry air supply.

20. The chamber filter purge apparatus of claim 19 further comprising a flow control valve coupled between the clean dry air supply and the plenum chamber and configured to control flow of the flushing gas to the plenum chamber.

21. The chamber filter purge apparatus of claim 20 further comprising a controller configured to provide a control signal to the flow control valve to open flow of the flushing gas into the plenum chamber located upstream of the chamber filter prior to the access door being opened.

22. A purge control method comprising:
providing a factory interface chamber having an access door configured to provide personnel servicing access into the factory interface chamber;
providing a chamber filter configured to filter a flow of purge gas supplied to the factory interface chamber; and
supplying a flushing gas to a portion of the factory interface chamber located upstream of the chamber filter when the access door is open to minimize moisture contamination of the chamber filter by ambient air, wherein the flushing gas is to be supplied in association with the personnel servicing access via the access door into the factory interface chamber or other breach of the factory interface chamber which compromises controlled environment of the factory interface chamber.

23. The purge control method of claim 22 , wherein the supplying of the flushing gas to the portion of the factory interface chamber located upstream of the chamber filter continues until the access door is closed.

24. The purge control method of claim 22 , wherein the flow of the purge gas supplied to the factory interface chamber is terminated prior to the supplying the flushing gas.

25. The purge control method of claim 22 , wherein the access

Assignees

• Applied Materials Inc

Inventors

• Rice Michael R

Classifications

• H10P72/3408

  Docking arrangements · CPC title

• H10P72/3406

  involving removal of lid, door or cover · CPC title

• H10P72/3404

  Storage means · CPC title

• H10P72/3402

  Mechanical parts of transfer devices · CPC title

• H10P72/1924

  characterised by atmosphere control · CPC title