Smart surface sensor for collecting data

Patent metadata

Field	Value
Publication number	US-10760985-B2
Application number	US-201816018605-A
Country	US
Kind code	B2
Filing date	Jun 26, 2018
Priority date	Jun 26, 2018
Publication date	Sep 1, 2020
Grant date	Sep 1, 2020

Abstract

A device includes a channel, a slit, and a cap. The channel is formed on a surface of the device. The slit separates the channel to a first portion and a second portion. The first portion comprises liquid metal, e.g., gallatin. The second portion comprises gas. The liquid metal moves within the channel between the first and the second portions in response to external stimuli, e.g., pressure. The liquid metal moving within the channel changes electrical characteristics, e.g., capacitive value, inductance value, resistance value, resonance frequency, etc., of the device.

First claim

What is claimed is:

1. A device comprising:
a metal layer having a planar top surface;
a channel formed on the planar top surface of the metal layer, the channel comprising a first portion and a second portion, wherein the planar top surface of the metal layer provides bottom surfaces of the first and second portions;
a separating component disposed between and separating the first and second portions, wherein the separating component extends downwardly toward the planar top surface of the metal layer and decreases a height of the channel measured from the planar top surface to a bottom surface of the separating component, wherein the first portion comprises liquid metal and wherein the second portion comprises gas, and wherein the liquid metal expands or contracts within the channel between the first and the second portions in response to external pressure, and wherein the liquid metal expanding or contracting within the channel changes electrical characteristics of the device; and
a cap encapsulating the channel and the separating component within, wherein the cap changes dimensions in response to the external pressure, thereby causing the liquid metal to expand or contract, and wherein the expansion or contraction of the liquid metal indicates a value of the external pressure.

2. The device as described by claim 1 , wherein a height of the device is less than 50 micrometers.

3. The device as described by claim 1 , wherein the liquid metal comprises Gallium.

4. The device as described by claim 1 , wherein the electrical characteristics are selected from a group consisting of capacitive value, inductance value, and resistance value.

5. The device as described by claim 1 further comprising a circuitry configured to measure the changes in the electrical characteristics of the device and further configured to convert the measure changes to a pressure value associated with the external pressure.

6. The device as described by claim 1 , wherein resonance frequency of the circuitry changes in response to the changes in the electrical characteristics.

7. A device comprising:
a metal layer having a planar top surface; and
an array of liquid metal sensors formed on the metal layer, wherein each liquid metal sensor of the array of liquid metal sensors comprises:
a channel formed on the planar top surface of the metal layer such that the planar top surface provides a bottom surface of the channel;
a separating component configured to divide the channel to a first portion and a second portion, wherein the separating component decreases a height of channel measured from the planar top surface of the metal layer to a bottom surface of the separating component, wherein the first portion comprises liquid metal and wherein the second portion comprises gas, and wherein the liquid metal expands or contracts within the channel between the first and the second portions in response to external stimuli, and wherein the liquid metal expanding or contracting within the channel changes electrical characteristics of the device; and
a cap encapsulating the channel and the separating component within, wherein the cap changes dimensions in response to the external pressure, thereby causing the liquid metal to expand or contract, and wherein the expansion or contraction of the liquid metal indicates a value of the external pressure.

8. The device as described by claim 7 , wherein the substrate comprises a polymer.

9. The device as described by claim 7 , wherein the separating component is a nozzle.

10. The device as described by claim 7 further comprising:
switches configured to couple liquid metal sensors of the array to one another, and wherein the switches are configured to dynamically control one or more liquid metal sensors of the array.

11. The device as described by claim 7 , wherein a height of the array is less than 50 micrometers.

12. The device as described by claim 7 , wherein the liquid metal comprises Gallium.

13. The device as described by claim 7 , wherein the electrical characteristics are selected from a group consisting of capacitive value, inductance value, resistance value, and resonance frequency.

14. The device as described by claim 7 , wherein the external stimuli is pressure, and wherein the device further comprises a circuitry configured to measure the changes in the electrical characteristics of the array and further configured to convert the measure changes to a pressure value associated with the external pressure.

15. The device as described by claim 7 , wherein a height or length of the liquid metal within the channel changes responsive to the external stimuli.

Assignees

• Tdk Corp

Inventors

• Sethi Rakesh

Classifications

• G01K5/02 Primary

  the material being a liquid (contained in a hollow body having parts which are deformable or displaceable under the pressure developed by the material G01K5/32) · CPC title

• G01P15/006

  by making use of fluid seismic masses · CPC title

• G01F23/24

  by measuring variations of resistance of resistors due to contact with conductor fluid · CPC title

• G01R1/04

  Housings; Supporting members; Arrangements of terminals · CPC title

• G01R27/22

  Measuring resistance of fluids · CPC title