Droplet-based capacitive humidity sensor

Patent metadata

Field	Value
Publication number	US-9739679-B2
Application number	US-201615272806-A
Country	US
Kind code	B2
Filing date	Sep 22, 2016
Priority date	Dec 14, 2012
Publication date	Aug 22, 2017
Grant date	Aug 22, 2017

Abstract

A pressure sensing apparatus which utilizes an electrolytic droplet retained between a first and second sensing electrode within a housing. Contact between the electrolyte droplet and the electrodes form electric double layers (EDL) having interfacial EDL capacitance proportional to interface contact area which varies in response to mechanical pressure applied to deform exterior portions of the housing. The electrolyte contains a sufficient percentage of glycerol to prevent evaporative effects. Preferably, the sensing electrodes are modified with depressions, hydrophilic and/or hydrophobic portions to increase central anchoring of the electrolyte droplet within the housing. The inventive pressure sensor provides high sensitivity and resolution which is beneficial to numerous applications, and is particularly well-suited for medical sensing applications.

First claim

What is claimed is:

1. A humidity sensor apparatus, comprising:
a sensing chamber within an interior volume of a housing having a first and second substrate between which are disposed a substrate separation structure maintaining a periphery of said first and second substrates at a fixed separation distance to form said sensing chamber;
a conductive surface coating on the interior surfaces of said first substrate and said second substrate to form a first electrode and a second electrode; and
a deformable ionic material retained in said sensing chamber in contact with said first and second electrodes and leaving a gap between said ionic material and said substrate separation structure;
wherein contact between said ionic material and said first and second electrodes form electric double layers (EDL) having interfacial EDL capacitance which is influenced by ambient humidity to which the apparatus is exposed.

2. The apparatus recited in claim 1 , wherein a portion of said first substrate, or said second substrate, or a combination of said first and second substrate, centrally disposed in said housing, is modified to be hydrophilic toward centrally anchoring said ionic material within said housing.

3. The apparatus recited in claim 1 , wherein a portion of said first substrate, or said second substrate, or a combination of said first and second substrate, disposed near the periphery of said housing, is modified to be hydrophobic toward enhancing central anchoring of said ionic material within said housing.

4. The apparatus recited in claim 1 , wherein a depression is formed in a central portion of said first substrate, or said second substrate, or a combination of said first and second substrate, toward centrally anchoring said ionic material within said housing.

5. The apparatus recited in claim 1 , wherein said ionic material contains at least 25% anti-evaporation agent.

6. The apparatus recited in claim 1 , wherein at least a portion of said first and second substrates, having the conductive surface coating on said first and second electrodes, extends beyond said housing to provide electrical connection with said first and second electrodes.

7. The apparatus recited in claim 1 , wherein mobile electrons migrate from said first and second electrodes and a counter-ion layer accumulates from the ionic material in response to application of a sensing voltage to said first and second electrodes.

8. The apparatus recited in claim 1 , wherein said housing and ionic material are sized to leave a sufficient gap between said ionic material and said separation structure to allow deformation of the ionic material at maximum sense pressure without contacting said substrate separation structure.

9. The apparatus recited in claim 1 , wherein said first substrate, or said second substrate, or both said first and second substrates comprise a polymer membrane.

10. The apparatus recited in claim 9 , wherein said polymer membrane comprises polyethylene terephthalate (PET).

11. The apparatus recited in claim 1 , wherein said separation structure comprises a polymeric material.

12. The apparatus recited in claim 11 , wherein said separation structure comprises a polydimethylsiloxane (PDMS).

13. The apparatus recited in claim 1 , wherein said conductive surface coating comprises indium tin oxide (ITO).

14. The apparatus recited in claim 1 , wherein said first substrate to which is attached said first electrode, or said second substrate to which is attached said second electrode, or a combination of said first and second substrates and said first and second electrodes, comprise an optically transparent material.

15. The apparatus recited in claim 1 , wherein said separation structure comprises an optically transparent material.

16. The apparatus recited in claim 1 , further comprising one or more ventilation channels formed in said housing to maintain pneumatic pressure balance.

17. A droplet-based humidity sensor apparatus, comprising:
a sensing chamber within an interior volume of a housing having a first and second substrate between which are disposed a substrate separation structure maintaining a periphery of said first and second substrates at a fixed separation distance to form said sensing chamber;
a conductive surface coating on the interior surfaces of said first substrate and said second substrate to form a first electrode and a second electrode; and
a deformable ionic material retained in said sensing chamber in contact with said first and second electrodes and leaving a gap between said ionic material and said substrate separation structure;
wherein contact between said ionic material and said first and second electrodes form electric double layers (EDL) having interfacial EDL capacitance which is influenced by ambient humidity to which the apparatus is exposed; and
wherein one or more portions of said first substrate, or said second substrate, or a combination of said first and second substrate, are modified to be hydrophilic toward centrally anchoring said ionic material within said housing, or are modified to be hydrophobic near the periphery of said housing toward preventing said ionic material from moving into contact with said housing.

18. The apparatus recited in claim 17 , wherein a depression is formed in a central portion of said first substrate, or said second substrate, or a combination of said first and second substrate, toward centrally anchoring said ionic material within said housing.

19. The apparatus recited in claim 17 , wherein said ionic material contains at least 25% anti-evaporation agent.

20. The apparatus recited in claim 17 , wherein at least a portion of said first and second substrates, having the conductive surface coating on said first and second electrodes, extends beyond said housing to provide electrical connection with said first and second electrodes.

21. The apparatus recited in claim 17 , wherein said housing and ionic material are sized to leave a sufficient gap between said ionic material and said separation structure to allow deformation of the ionic material at maximum sense pressure without contacting said substrate separation structure.

22. The apparatus recited in claim 17 , wherein said first substrate, or said second substrate, or both said first and second substrates comprise a polymer membrane.

23. The apparatus recited in claim 17 , wherein said separation structure comprises a polymeric material.

24. The apparatus recited in claim 17 , wherein said conductive surface coating comprises indium tin oxide (ITO).

25. The apparatus recited in claim 17 , further comprising one or more ventilation channels formed in said housing to maintain pneumatic pressure balance.

26. A droplet-based humidity sensor apparatus, comprising:
a sensing chamber within an interior volume of a housing having a first and second substrate between which are disposed a substrate separation structure maintaining a periphery of said first and second substrates at a fixed separation distance to form said sensing chamber;
wherein a depression is formed in a central portion of said first substrate, or said second substrate, or a combination of said first and second substrate, toward centrally anchoring said ionic material within said housing; and
a conductive surface coating on the interior surfaces of said first substrate and said second substrate to form a first electrode and a second electrode, w

Assignees

• Univ California

Inventors

• Pan Tingrui
• Nie Baoqing
• Xing Siyuan
• Brandt James D

Classifications

• G01L9/0092 Primary

  using variations in ohmic resistance · CPC title

• G01L9/0095

  using variations in capacitance · CPC title

• G01L9/0072 Primary

  using variations in capacitance · CPC title

• G01L9/0075

  using a ceramic diaphragm, e.g. alumina, fused quartz, glass · CPC title