Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device
US-2018364571-A1 · Dec 20, 2018 · US
US10759746B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10759746-B2 |
| Application number | US-201816496031-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 19, 2018 |
| Priority date | Mar 20, 2017 |
| Publication date | Sep 1, 2020 |
| Grant date | Sep 1, 2020 |
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The present invention also relates to a production method for this form of 2-acrylamido-2-methylpropane sulfonic acid and a preparation method for an aqueous solution A of a salt of this form of 2-acrylamido-2-methylpropane sulfonic acid, and the (co)polymer of this form of -acrylamido-2-methylpropane sulfonic acid.
Opening claim text (preview).
The invention claimed is: 1. A hydrated crystalline form of 2-acrylamido-2-methylpropane sulfonic acid having a 2-theta powder X-ray diffraction diagram comprising peaks at 10.58°, 11.2°, 12.65°, 13.66°, 16.28°, 18.45°, 20°, 20.4°, 22.5°, 25.5°, 25.88°, 26.47°, 28.52°, 30.28°, 30.8°, 34.09°, 38.19°, 40.69°, 41.82°, 43.74°, and 46.04° degrees, all peak values being +/−0.1°. 2. A hydrated crystalline form of 2-acrylamido-2-methylpropane sulfonic acid according to claim 1 , wherein it presents a Fourier transform infrared spectrum comprising peaks at 3280 cm −1 , 3126 cm −1 , 1657 cm −1 , 1595 cm −1 , 1453 cm −1 , 1395 cm −1 , 1307 cm −1 , 1205 cm −1 , 1164 cm −1 , 1113 cm −1 , 1041 cm −1 , 968 cm −1 , 885 cm −1 , 815 cm −1 , and 794 cm −1 , all peak values being +/−8 cm −1 . 3. The hydrated crystalline form of 2-acrylamido-2-methylpropane sulfonic acid according to claim 1 , wherein it presents minimum ignition energy greater than 400 mJ. 4. The hydrated crystalline form of 2-acrylamido-2-methylpropane sulfonic acid according to claim 1 , wherein it presents 4 thermal phenomena with the Differential Scanning calorimetry technique at 70° C., 100° C., 150° C. and 190° C., all +/−10° C. 5. The hydrated crystalline form of 2-acrylamido-2-methylpropane sulfonic acid according to claim 1 , wherein it has a water/2-acrylamido-2-methylpropane sulfonic acid molar ratio of 1:1. 6. The hydrated crystalline form of 2-acrylamido-2-methylpropane sulfonic acid according to claim 3 , that presents minimum ignition energy greater than 500 mJ.
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